1/23/2012	8:18:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	8:18:17 AM	Recipe started at 8:18 AM
1/23/2012	8:18:17 AM	Helium valve closed
1/23/2012	8:18:17 AM	H2 valve closed
1/23/2012	8:18:17 AM	BCl3 valve closed
1/23/2012	8:18:17 AM	PH3 valve closed
1/23/2012	8:18:17 AM	SiCl4 pre valve closed
1/23/2012	8:18:17 AM	SiCl4 post valve closed
1/23/2012	8:18:17 AM	Main Vac valve closed
1/23/2012	8:18:17 AM	Bypass valve closed
1/23/2012	8:18:17 AM	Bubbler valve closed
1/23/2012	8:18:17 AM	Helium MFC set to  0.000000
1/23/2012	8:18:17 AM	H2 MFC set to  0.000000
1/23/2012	8:18:17 AM	BCl3 MFC set to  0.000000
1/23/2012	8:18:17 AM	PH3 MFC set to  0.000000
1/23/2012	8:18:17 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:18:17 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:18:17 AM	Tube furnace set to 0
1/23/2012	8:18:20 AM	H2 valve closed
1/23/2012	8:18:20 AM	BCl3 valve closed
1/23/2012	8:18:20 AM	PH3 valve closed
1/23/2012	8:18:20 AM	SiCl4 pre valve closed
1/23/2012	8:18:20 AM	SiCl4 post valve closed
1/23/2012	8:18:20 AM	Main Vac valve closed
1/23/2012	8:18:20 AM	Bypass valve closed
1/23/2012	8:18:20 AM	Bubbler valve closed
1/23/2012	8:18:20 AM	Helium valve opened
1/23/2012	8:18:20 AM	Helium MFC set to  500.000000
1/23/2012	8:18:20 AM	H2 MFC set to  0.000000
1/23/2012	8:18:20 AM	BCl3 MFC set to  0.000000
1/23/2012	8:18:20 AM	PH3 MFC set to  0.000000
1/23/2012	8:18:20 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:18:20 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:18:20 AM	Tube furnace set to 0
1/23/2012	8:19:25 AM	Helium valve closed
1/23/2012	8:19:25 AM	H2 valve closed
1/23/2012	8:19:25 AM	BCl3 valve closed
1/23/2012	8:19:25 AM	PH3 valve closed
1/23/2012	8:19:25 AM	SiCl4 pre valve closed
1/23/2012	8:19:25 AM	SiCl4 post valve closed
1/23/2012	8:19:25 AM	Main Vac valve closed
1/23/2012	8:19:25 AM	Bypass valve closed
1/23/2012	8:19:25 AM	Bubbler valve closed
1/23/2012	8:19:25 AM	Helium MFC set to  0.000000
1/23/2012	8:19:25 AM	H2 MFC set to  0.000000
1/23/2012	8:19:25 AM	BCl3 MFC set to  0.000000
1/23/2012	8:19:25 AM	PH3 MFC set to  0.000000
1/23/2012	8:19:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:19:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:19:25 AM	Tube furnace set to 0
1/23/2012	8:19:26 AM	Run finished at 8:19 AM
1/23/2012	8:19:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	8:21:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	8:21:54 AM	Recipe started at 8:21 AM
1/23/2012	8:21:54 AM	Helium valve closed
1/23/2012	8:21:54 AM	H2 valve closed
1/23/2012	8:21:54 AM	BCl3 valve closed
1/23/2012	8:21:54 AM	PH3 valve closed
1/23/2012	8:21:54 AM	SiCl4 pre valve closed
1/23/2012	8:21:54 AM	SiCl4 post valve closed
1/23/2012	8:21:54 AM	Main Vac valve closed
1/23/2012	8:21:54 AM	Bubbler valve closed
1/23/2012	8:21:54 AM	Bypass valve opened
1/23/2012	8:21:54 AM	Helium MFC set to  0.000000
1/23/2012	8:21:54 AM	H2 MFC set to  0.000000
1/23/2012	8:21:55 AM	BCl3 MFC set to  0.000000
1/23/2012	8:21:55 AM	PH3 MFC set to  0.000000
1/23/2012	8:21:55 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:21:55 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:21:55 AM	Tube furnace set to 0
1/23/2012	8:22:52 AM	Helium valve closed
1/23/2012	8:22:52 AM	H2 valve closed
1/23/2012	8:22:52 AM	BCl3 valve closed
1/23/2012	8:22:52 AM	PH3 valve closed
1/23/2012	8:22:52 AM	SiCl4 pre valve closed
1/23/2012	8:22:52 AM	SiCl4 post valve closed
1/23/2012	8:22:52 AM	Main Vac valve closed
1/23/2012	8:22:52 AM	Bubbler valve closed
1/23/2012	8:22:52 AM	Bypass valve opened
1/23/2012	8:22:52 AM	Helium MFC set to  0.000000
1/23/2012	8:22:52 AM	H2 MFC set to  0.000000
1/23/2012	8:22:52 AM	BCl3 MFC set to  0.000000
1/23/2012	8:22:52 AM	PH3 MFC set to  0.000000
1/23/2012	8:22:52 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:22:52 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:22:52 AM	Tube furnace set to 0
1/23/2012	8:23:41 AM	Helium valve closed
1/23/2012	8:23:41 AM	H2 valve closed
1/23/2012	8:23:41 AM	BCl3 valve closed
1/23/2012	8:23:41 AM	PH3 valve closed
1/23/2012	8:23:41 AM	SiCl4 pre valve closed
1/23/2012	8:23:41 AM	SiCl4 post valve closed
1/23/2012	8:23:41 AM	Bypass valve closed
1/23/2012	8:23:41 AM	Bubbler valve closed
1/23/2012	8:23:41 AM	Main Vac valve opened
1/23/2012	8:23:41 AM	Helium MFC set to  0.000000
1/23/2012	8:23:41 AM	H2 MFC set to  0.000000
1/23/2012	8:23:41 AM	BCl3 MFC set to  0.000000
1/23/2012	8:23:41 AM	PH3 MFC set to  0.000000
1/23/2012	8:23:41 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:23:41 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:23:42 AM	Tube furnace set to 0
1/23/2012	8:23:43 AM	Run finished at 8:23 AM
1/23/2012	8:23:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	8:25:09 AM	Main Vac valve closed
1/23/2012	8:25:18 AM	H2 MFC set to  500.000000
1/23/2012	8:25:19 AM	H2 valve opened
1/23/2012	8:25:40 AM	H2 valve closed
1/23/2012	8:25:43 AM	H2 MFC set to  0.000000
1/23/2012	8:25:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	8:25:45 AM	Recipe started at 8:25 AM
1/23/2012	8:25:45 AM	Helium valve closed
1/23/2012	8:25:45 AM	H2 valve closed
1/23/2012	8:25:45 AM	BCl3 valve closed
1/23/2012	8:25:45 AM	PH3 valve closed
1/23/2012	8:25:45 AM	SiCl4 pre valve closed
1/23/2012	8:25:45 AM	SiCl4 post valve closed
1/23/2012	8:25:45 AM	Main Vac valve closed
1/23/2012	8:25:45 AM	Bubbler valve closed
1/23/2012	8:25:45 AM	Bypass valve opened
1/23/2012	8:25:45 AM	Helium MFC set to  0.000000
1/23/2012	8:25:45 AM	H2 MFC set to  0.000000
1/23/2012	8:25:46 AM	BCl3 MFC set to  0.000000
1/23/2012	8:25:46 AM	PH3 MFC set to  0.000000
1/23/2012	8:25:46 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:25:46 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:25:46 AM	Tube furnace set to 0
1/23/2012	8:25:46 AM	Helium valve closed
1/23/2012	8:25:46 AM	H2 valve closed
1/23/2012	8:25:46 AM	BCl3 valve closed
1/23/2012	8:25:46 AM	PH3 valve closed
1/23/2012	8:25:46 AM	SiCl4 pre valve closed
1/23/2012	8:25:46 AM	SiCl4 post valve closed
1/23/2012	8:25:46 AM	Main Vac valve closed
1/23/2012	8:25:46 AM	Bubbler valve closed
1/23/2012	8:25:46 AM	Bypass valve opened
1/23/2012	8:25:46 AM	Helium MFC set to  0.000000
1/23/2012	8:25:46 AM	H2 MFC set to  0.000000
1/23/2012	8:25:46 AM	BCl3 MFC set to  0.000000
1/23/2012	8:25:46 AM	PH3 MFC set to  0.000000
1/23/2012	8:25:46 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:25:46 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:25:46 AM	Tube furnace set to 0
1/23/2012	8:25:53 AM	Run aborted at 8:25 AM
1/23/2012	8:25:53 AM	Helium valve closed
1/23/2012	8:25:53 AM	H2 valve closed
1/23/2012	8:25:53 AM	BCl3 valve closed
1/23/2012	8:25:53 AM	PH3 valve closed
1/23/2012	8:25:53 AM	SiCl4 pre valve closed
1/23/2012	8:25:53 AM	SiCl4 post valve closed
1/23/2012	8:25:53 AM	Bypass valve closed
1/23/2012	8:25:53 AM	Main Vac valve closed
1/23/2012	8:25:53 AM	Bubbler valve closed
1/23/2012	8:25:53 AM	Helium MFC set to  0.000000
1/23/2012	8:25:53 AM	H2 MFC set to  0.000000
1/23/2012	8:25:53 AM	BCl3 MFC set to  0.000000
1/23/2012	8:25:53 AM	PH3 MFC set to  0.000000
1/23/2012	8:25:53 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:25:54 AM	Tube furnace set to 0
1/23/2012	8:25:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	8:25:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	8:25:57 AM	Recipe started at 8:25 AM
1/23/2012	8:25:57 AM	Helium valve closed
1/23/2012	8:25:57 AM	H2 valve closed
1/23/2012	8:25:57 AM	BCl3 valve closed
1/23/2012	8:25:57 AM	PH3 valve closed
1/23/2012	8:25:57 AM	SiCl4 pre valve closed
1/23/2012	8:25:57 AM	SiCl4 post valve closed
1/23/2012	8:25:57 AM	Main Vac valve closed
1/23/2012	8:25:57 AM	Bubbler valve closed
1/23/2012	8:25:57 AM	Bypass valve opened
1/23/2012	8:25:57 AM	Helium MFC set to  0.000000
1/23/2012	8:25:57 AM	H2 MFC set to  0.000000
1/23/2012	8:25:57 AM	BCl3 MFC set to  0.000000
1/23/2012	8:25:57 AM	PH3 MFC set to  0.000000
1/23/2012	8:25:57 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:25:57 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:25:57 AM	Tube furnace set to 0
1/23/2012	8:26:19 AM	Helium valve closed
1/23/2012	8:26:19 AM	H2 valve closed
1/23/2012	8:26:19 AM	BCl3 valve closed
1/23/2012	8:26:19 AM	PH3 valve closed
1/23/2012	8:26:19 AM	SiCl4 pre valve closed
1/23/2012	8:26:19 AM	SiCl4 post valve closed
1/23/2012	8:26:19 AM	Main Vac valve closed
1/23/2012	8:26:19 AM	Bubbler valve closed
1/23/2012	8:26:19 AM	Bypass valve opened
1/23/2012	8:26:19 AM	Helium MFC set to  0.000000
1/23/2012	8:26:19 AM	H2 MFC set to  0.000000
1/23/2012	8:26:19 AM	BCl3 MFC set to  0.000000
1/23/2012	8:26:19 AM	PH3 MFC set to  0.000000
1/23/2012	8:26:19 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:26:19 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:26:19 AM	Tube furnace set to 0
1/23/2012	8:27:05 AM	Helium valve closed
1/23/2012	8:27:05 AM	H2 valve closed
1/23/2012	8:27:05 AM	BCl3 valve closed
1/23/2012	8:27:05 AM	PH3 valve closed
1/23/2012	8:27:05 AM	SiCl4 pre valve closed
1/23/2012	8:27:05 AM	SiCl4 post valve closed
1/23/2012	8:27:05 AM	Bypass valve closed
1/23/2012	8:27:05 AM	Bubbler valve closed
1/23/2012	8:27:05 AM	Main Vac valve opened
1/23/2012	8:27:05 AM	Helium MFC set to  0.000000
1/23/2012	8:27:05 AM	H2 MFC set to  0.000000
1/23/2012	8:27:05 AM	BCl3 MFC set to  0.000000
1/23/2012	8:27:05 AM	PH3 MFC set to  0.000000
1/23/2012	8:27:05 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:27:05 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:27:05 AM	Tube furnace set to 0
1/23/2012	8:27:06 AM	Run finished at 8:27 AM
1/23/2012	8:27:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	8:30:12 AM	Recipe started at 8:30 AM
1/23/2012	8:30:12 AM	Helium valve closed
1/23/2012	8:30:12 AM	H2 valve closed
1/23/2012	8:30:12 AM	BCl3 valve closed
1/23/2012	8:30:12 AM	PH3 valve closed
1/23/2012	8:30:12 AM	SiCl4 pre valve closed
1/23/2012	8:30:12 AM	SiCl4 post valve closed
1/23/2012	8:30:12 AM	Bypass valve closed
1/23/2012	8:30:12 AM	Bubbler valve closed
1/23/2012	8:30:12 AM	Main Vac valve opened
1/23/2012	8:30:13 AM	Helium MFC set to  0.000000
1/23/2012	8:30:13 AM	H2 MFC set to  0.000000
1/23/2012	8:30:13 AM	BCl3 MFC set to  0.000000
1/23/2012	8:30:13 AM	PH3 MFC set to  0.000000
1/23/2012	8:30:13 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:30:13 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:30:13 AM	Tube furnace set to 150
1/23/2012	8:30:17 AM	H2 valve closed
1/23/2012	8:30:17 AM	BCl3 valve closed
1/23/2012	8:30:17 AM	PH3 valve closed
1/23/2012	8:30:17 AM	SiCl4 pre valve closed
1/23/2012	8:30:17 AM	SiCl4 post valve closed
1/23/2012	8:30:17 AM	Bypass valve closed
1/23/2012	8:30:17 AM	Bubbler valve closed
1/23/2012	8:30:17 AM	Helium valve opened
1/23/2012	8:30:17 AM	Main Vac valve opened
1/23/2012	8:30:17 AM	Helium MFC set to  20.000000
1/23/2012	8:30:17 AM	H2 MFC set to  0.000000
1/23/2012	8:30:17 AM	BCl3 MFC set to  0.000000
1/23/2012	8:30:17 AM	PH3 MFC set to  0.000000
1/23/2012	8:30:17 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:30:17 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:30:17 AM	Tube furnace set to 150
1/23/2012	8:30:47 AM	Helium valve closed
1/23/2012	8:30:47 AM	H2 valve closed
1/23/2012	8:30:47 AM	BCl3 valve closed
1/23/2012	8:30:47 AM	PH3 valve closed
1/23/2012	8:30:47 AM	SiCl4 pre valve closed
1/23/2012	8:30:47 AM	SiCl4 post valve closed
1/23/2012	8:30:47 AM	Bypass valve closed
1/23/2012	8:30:47 AM	Bubbler valve closed
1/23/2012	8:30:47 AM	Main Vac valve opened
1/23/2012	8:30:47 AM	Helium MFC set to  0.000000
1/23/2012	8:30:47 AM	H2 MFC set to  0.000000
1/23/2012	8:30:47 AM	BCl3 MFC set to  0.000000
1/23/2012	8:30:47 AM	PH3 MFC set to  0.000000
1/23/2012	8:30:47 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:30:47 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:30:47 AM	Tube furnace set to 150
1/23/2012	8:31:17 AM	H2 valve closed
1/23/2012	8:31:17 AM	BCl3 valve closed
1/23/2012	8:31:17 AM	PH3 valve closed
1/23/2012	8:31:17 AM	SiCl4 pre valve closed
1/23/2012	8:31:17 AM	SiCl4 post valve closed
1/23/2012	8:31:17 AM	Bypass valve closed
1/23/2012	8:31:17 AM	Bubbler valve closed
1/23/2012	8:31:17 AM	Helium valve opened
1/23/2012	8:31:17 AM	Main Vac valve opened
1/23/2012	8:31:17 AM	Helium MFC set to  20.000000
1/23/2012	8:31:17 AM	H2 MFC set to  0.000000
1/23/2012	8:31:17 AM	BCl3 MFC set to  0.000000
1/23/2012	8:31:17 AM	PH3 MFC set to  0.000000
1/23/2012	8:31:17 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:31:17 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:31:18 AM	Tube furnace set to 150
1/23/2012	8:31:48 AM	Helium valve closed
1/23/2012	8:31:48 AM	H2 valve closed
1/23/2012	8:31:48 AM	BCl3 valve closed
1/23/2012	8:31:48 AM	PH3 valve closed
1/23/2012	8:31:48 AM	SiCl4 pre valve closed
1/23/2012	8:31:48 AM	SiCl4 post valve closed
1/23/2012	8:31:48 AM	Bypass valve closed
1/23/2012	8:31:48 AM	Bubbler valve closed
1/23/2012	8:31:48 AM	Main Vac valve opened
1/23/2012	8:31:48 AM	Helium MFC set to  0.000000
1/23/2012	8:31:48 AM	H2 MFC set to  0.000000
1/23/2012	8:31:48 AM	BCl3 MFC set to  0.000000
1/23/2012	8:31:48 AM	PH3 MFC set to  0.000000
1/23/2012	8:31:48 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:31:48 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:31:48 AM	Tube furnace set to 150
1/23/2012	8:32:18 AM	H2 valve closed
1/23/2012	8:32:18 AM	BCl3 valve closed
1/23/2012	8:32:18 AM	PH3 valve closed
1/23/2012	8:32:18 AM	SiCl4 pre valve closed
1/23/2012	8:32:18 AM	SiCl4 post valve closed
1/23/2012	8:32:18 AM	Bypass valve closed
1/23/2012	8:32:18 AM	Bubbler valve closed
1/23/2012	8:32:18 AM	Helium valve opened
1/23/2012	8:32:18 AM	Main Vac valve opened
1/23/2012	8:32:18 AM	Helium MFC set to  20.000000
1/23/2012	8:32:18 AM	H2 MFC set to  0.000000
1/23/2012	8:32:18 AM	BCl3 MFC set to  0.000000
1/23/2012	8:32:18 AM	PH3 MFC set to  0.000000
1/23/2012	8:32:18 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:32:18 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:32:18 AM	Tube furnace set to 150
1/23/2012	8:32:48 AM	Helium valve closed
1/23/2012	8:32:48 AM	H2 valve closed
1/23/2012	8:32:48 AM	BCl3 valve closed
1/23/2012	8:32:48 AM	PH3 valve closed
1/23/2012	8:32:48 AM	SiCl4 pre valve closed
1/23/2012	8:32:48 AM	SiCl4 post valve closed
1/23/2012	8:32:48 AM	Bypass valve closed
1/23/2012	8:32:48 AM	Bubbler valve closed
1/23/2012	8:32:48 AM	Main Vac valve opened
1/23/2012	8:32:48 AM	Helium MFC set to  0.000000
1/23/2012	8:32:48 AM	H2 MFC set to  0.000000
1/23/2012	8:32:48 AM	BCl3 MFC set to  0.000000
1/23/2012	8:32:48 AM	PH3 MFC set to  0.000000
1/23/2012	8:32:48 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:32:48 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:32:48 AM	Tube furnace set to 150
1/23/2012	8:33:18 AM	H2 valve closed
1/23/2012	8:33:18 AM	BCl3 valve closed
1/23/2012	8:33:18 AM	PH3 valve closed
1/23/2012	8:33:18 AM	SiCl4 pre valve closed
1/23/2012	8:33:18 AM	SiCl4 post valve closed
1/23/2012	8:33:18 AM	Bypass valve closed
1/23/2012	8:33:18 AM	Bubbler valve closed
1/23/2012	8:33:18 AM	Helium valve opened
1/23/2012	8:33:18 AM	Main Vac valve opened
1/23/2012	8:33:18 AM	Helium MFC set to  20.000000
1/23/2012	8:33:18 AM	H2 MFC set to  0.000000
1/23/2012	8:33:18 AM	BCl3 MFC set to  0.000000
1/23/2012	8:33:18 AM	PH3 MFC set to  0.000000
1/23/2012	8:33:18 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:33:18 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:33:18 AM	Tube furnace set to 150
1/23/2012	8:33:48 AM	Helium valve closed
1/23/2012	8:33:48 AM	H2 valve closed
1/23/2012	8:33:48 AM	BCl3 valve closed
1/23/2012	8:33:48 AM	PH3 valve closed
1/23/2012	8:33:48 AM	SiCl4 pre valve closed
1/23/2012	8:33:48 AM	SiCl4 post valve closed
1/23/2012	8:33:48 AM	Bypass valve closed
1/23/2012	8:33:48 AM	Bubbler valve closed
1/23/2012	8:33:48 AM	Main Vac valve opened
1/23/2012	8:33:48 AM	Helium MFC set to  0.000000
1/23/2012	8:33:48 AM	H2 MFC set to  0.000000
1/23/2012	8:33:48 AM	BCl3 MFC set to  0.000000
1/23/2012	8:33:48 AM	PH3 MFC set to  0.000000
1/23/2012	8:33:48 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:33:48 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:33:49 AM	Tube furnace set to 150
1/23/2012	8:34:19 AM	H2 valve closed
1/23/2012	8:34:19 AM	BCl3 valve closed
1/23/2012	8:34:19 AM	PH3 valve closed
1/23/2012	8:34:19 AM	SiCl4 pre valve closed
1/23/2012	8:34:19 AM	SiCl4 post valve closed
1/23/2012	8:34:19 AM	Bypass valve closed
1/23/2012	8:34:19 AM	Bubbler valve closed
1/23/2012	8:34:19 AM	Helium valve opened
1/23/2012	8:34:19 AM	Main Vac valve opened
1/23/2012	8:34:19 AM	Helium MFC set to  20.000000
1/23/2012	8:34:19 AM	H2 MFC set to  0.000000
1/23/2012	8:34:19 AM	BCl3 MFC set to  0.000000
1/23/2012	8:34:19 AM	PH3 MFC set to  0.000000
1/23/2012	8:34:19 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:34:19 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:34:19 AM	Tube furnace set to 150
1/23/2012	8:34:49 AM	Helium valve closed
1/23/2012	8:34:49 AM	H2 valve closed
1/23/2012	8:34:49 AM	BCl3 valve closed
1/23/2012	8:34:49 AM	PH3 valve closed
1/23/2012	8:34:49 AM	SiCl4 pre valve closed
1/23/2012	8:34:49 AM	SiCl4 post valve closed
1/23/2012	8:34:49 AM	Bypass valve closed
1/23/2012	8:34:49 AM	Bubbler valve closed
1/23/2012	8:34:49 AM	Main Vac valve opened
1/23/2012	8:34:49 AM	Helium MFC set to  0.000000
1/23/2012	8:34:49 AM	H2 MFC set to  0.000000
1/23/2012	8:34:49 AM	BCl3 MFC set to  0.000000
1/23/2012	8:34:49 AM	PH3 MFC set to  0.000000
1/23/2012	8:34:49 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:34:49 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:34:49 AM	Tube furnace set to 150
1/23/2012	8:35:19 AM	H2 valve closed
1/23/2012	8:35:19 AM	BCl3 valve closed
1/23/2012	8:35:19 AM	PH3 valve closed
1/23/2012	8:35:19 AM	SiCl4 pre valve closed
1/23/2012	8:35:19 AM	SiCl4 post valve closed
1/23/2012	8:35:19 AM	Bypass valve closed
1/23/2012	8:35:19 AM	Bubbler valve closed
1/23/2012	8:35:19 AM	Helium valve opened
1/23/2012	8:35:19 AM	Main Vac valve opened
1/23/2012	8:35:19 AM	Helium MFC set to  20.000000
1/23/2012	8:35:19 AM	H2 MFC set to  0.000000
1/23/2012	8:35:19 AM	BCl3 MFC set to  0.000000
1/23/2012	8:35:19 AM	PH3 MFC set to  0.000000
1/23/2012	8:35:19 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:35:19 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:35:19 AM	Tube furnace set to 150
1/23/2012	8:35:49 AM	Helium valve closed
1/23/2012	8:35:49 AM	H2 valve closed
1/23/2012	8:35:49 AM	BCl3 valve closed
1/23/2012	8:35:49 AM	PH3 valve closed
1/23/2012	8:35:49 AM	SiCl4 pre valve closed
1/23/2012	8:35:49 AM	SiCl4 post valve closed
1/23/2012	8:35:49 AM	Bypass valve closed
1/23/2012	8:35:49 AM	Bubbler valve closed
1/23/2012	8:35:49 AM	Main Vac valve opened
1/23/2012	8:35:49 AM	Helium MFC set to  0.000000
1/23/2012	8:35:49 AM	H2 MFC set to  0.000000
1/23/2012	8:35:49 AM	BCl3 MFC set to  0.000000
1/23/2012	8:35:49 AM	PH3 MFC set to  0.000000
1/23/2012	8:35:49 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:35:49 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:35:49 AM	Tube furnace set to 150
1/23/2012	8:36:19 AM	H2 valve closed
1/23/2012	8:36:19 AM	BCl3 valve closed
1/23/2012	8:36:19 AM	PH3 valve closed
1/23/2012	8:36:19 AM	SiCl4 pre valve closed
1/23/2012	8:36:19 AM	SiCl4 post valve closed
1/23/2012	8:36:19 AM	Bypass valve closed
1/23/2012	8:36:19 AM	Bubbler valve closed
1/23/2012	8:36:19 AM	Helium valve opened
1/23/2012	8:36:19 AM	Main Vac valve opened
1/23/2012	8:36:19 AM	Helium MFC set to  20.000000
1/23/2012	8:36:19 AM	H2 MFC set to  0.000000
1/23/2012	8:36:19 AM	BCl3 MFC set to  0.000000
1/23/2012	8:36:19 AM	PH3 MFC set to  0.000000
1/23/2012	8:36:19 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:36:19 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:36:20 AM	Tube furnace set to 150
1/23/2012	8:36:50 AM	Helium valve closed
1/23/2012	8:36:50 AM	H2 valve closed
1/23/2012	8:36:50 AM	BCl3 valve closed
1/23/2012	8:36:50 AM	PH3 valve closed
1/23/2012	8:36:50 AM	SiCl4 pre valve closed
1/23/2012	8:36:50 AM	SiCl4 post valve closed
1/23/2012	8:36:50 AM	Bypass valve closed
1/23/2012	8:36:50 AM	Bubbler valve closed
1/23/2012	8:36:50 AM	Main Vac valve opened
1/23/2012	8:36:50 AM	Helium MFC set to  0.000000
1/23/2012	8:36:50 AM	H2 MFC set to  0.000000
1/23/2012	8:36:50 AM	BCl3 MFC set to  0.000000
1/23/2012	8:36:50 AM	PH3 MFC set to  0.000000
1/23/2012	8:36:50 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:36:50 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:36:50 AM	Tube furnace set to 150
1/23/2012	8:37:20 AM	H2 valve closed
1/23/2012	8:37:20 AM	BCl3 valve closed
1/23/2012	8:37:20 AM	PH3 valve closed
1/23/2012	8:37:20 AM	SiCl4 pre valve closed
1/23/2012	8:37:20 AM	SiCl4 post valve closed
1/23/2012	8:37:20 AM	Bypass valve closed
1/23/2012	8:37:20 AM	Bubbler valve closed
1/23/2012	8:37:20 AM	Helium valve opened
1/23/2012	8:37:20 AM	Main Vac valve opened
1/23/2012	8:37:20 AM	Helium MFC set to  20.000000
1/23/2012	8:37:20 AM	H2 MFC set to  0.000000
1/23/2012	8:37:20 AM	BCl3 MFC set to  0.000000
1/23/2012	8:37:20 AM	PH3 MFC set to  0.000000
1/23/2012	8:37:20 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:37:20 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:37:20 AM	Tube furnace set to 150
1/23/2012	8:37:50 AM	Helium valve closed
1/23/2012	8:37:50 AM	H2 valve closed
1/23/2012	8:37:50 AM	BCl3 valve closed
1/23/2012	8:37:50 AM	PH3 valve closed
1/23/2012	8:37:50 AM	SiCl4 pre valve closed
1/23/2012	8:37:50 AM	SiCl4 post valve closed
1/23/2012	8:37:50 AM	Bypass valve closed
1/23/2012	8:37:50 AM	Bubbler valve closed
1/23/2012	8:37:50 AM	Main Vac valve opened
1/23/2012	8:37:50 AM	Helium MFC set to  0.000000
1/23/2012	8:37:50 AM	H2 MFC set to  0.000000
1/23/2012	8:37:50 AM	BCl3 MFC set to  0.000000
1/23/2012	8:37:50 AM	PH3 MFC set to  0.000000
1/23/2012	8:37:50 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:37:50 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:37:50 AM	Tube furnace set to 150
1/23/2012	8:38:20 AM	H2 valve closed
1/23/2012	8:38:20 AM	BCl3 valve closed
1/23/2012	8:38:20 AM	PH3 valve closed
1/23/2012	8:38:20 AM	SiCl4 pre valve closed
1/23/2012	8:38:20 AM	SiCl4 post valve closed
1/23/2012	8:38:20 AM	Bypass valve closed
1/23/2012	8:38:20 AM	Bubbler valve closed
1/23/2012	8:38:20 AM	Helium valve opened
1/23/2012	8:38:20 AM	Main Vac valve opened
1/23/2012	8:38:20 AM	Helium MFC set to  20.000000
1/23/2012	8:38:20 AM	H2 MFC set to  0.000000
1/23/2012	8:38:20 AM	BCl3 MFC set to  0.000000
1/23/2012	8:38:20 AM	PH3 MFC set to  0.000000
1/23/2012	8:38:20 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:38:20 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:38:21 AM	Tube furnace set to 150
1/23/2012	8:38:51 AM	Helium valve closed
1/23/2012	8:38:51 AM	H2 valve closed
1/23/2012	8:38:51 AM	BCl3 valve closed
1/23/2012	8:38:51 AM	PH3 valve closed
1/23/2012	8:38:51 AM	SiCl4 pre valve closed
1/23/2012	8:38:51 AM	SiCl4 post valve closed
1/23/2012	8:38:51 AM	Bypass valve closed
1/23/2012	8:38:51 AM	Bubbler valve closed
1/23/2012	8:38:51 AM	Main Vac valve opened
1/23/2012	8:38:51 AM	Helium MFC set to  0.000000
1/23/2012	8:38:51 AM	H2 MFC set to  0.000000
1/23/2012	8:38:51 AM	BCl3 MFC set to  0.000000
1/23/2012	8:38:51 AM	PH3 MFC set to  0.000000
1/23/2012	8:38:51 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:38:51 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:38:51 AM	Tube furnace set to 150
1/23/2012	8:39:21 AM	H2 valve closed
1/23/2012	8:39:21 AM	BCl3 valve closed
1/23/2012	8:39:21 AM	PH3 valve closed
1/23/2012	8:39:21 AM	SiCl4 pre valve closed
1/23/2012	8:39:21 AM	SiCl4 post valve closed
1/23/2012	8:39:21 AM	Bypass valve closed
1/23/2012	8:39:21 AM	Bubbler valve closed
1/23/2012	8:39:21 AM	Helium valve opened
1/23/2012	8:39:21 AM	Main Vac valve opened
1/23/2012	8:39:21 AM	Helium MFC set to  20.000000
1/23/2012	8:39:21 AM	H2 MFC set to  0.000000
1/23/2012	8:39:21 AM	BCl3 MFC set to  0.000000
1/23/2012	8:39:21 AM	PH3 MFC set to  0.000000
1/23/2012	8:39:21 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:39:21 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:39:21 AM	Tube furnace set to 150
1/23/2012	8:39:51 AM	Helium valve closed
1/23/2012	8:39:51 AM	H2 valve closed
1/23/2012	8:39:51 AM	BCl3 valve closed
1/23/2012	8:39:51 AM	PH3 valve closed
1/23/2012	8:39:51 AM	SiCl4 pre valve closed
1/23/2012	8:39:51 AM	SiCl4 post valve closed
1/23/2012	8:39:51 AM	Bypass valve closed
1/23/2012	8:39:51 AM	Bubbler valve closed
1/23/2012	8:39:51 AM	Main Vac valve opened
1/23/2012	8:39:51 AM	Helium MFC set to  0.000000
1/23/2012	8:39:51 AM	H2 MFC set to  0.000000
1/23/2012	8:39:51 AM	BCl3 MFC set to  0.000000
1/23/2012	8:39:51 AM	PH3 MFC set to  0.000000
1/23/2012	8:39:51 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:39:51 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:39:51 AM	Tube furnace set to 150
1/23/2012	8:39:52 AM	Run finished at 8:39 AM
1/23/2012	8:40:54 AM	Recipe started at 8:40 AM
1/23/2012	8:40:54 AM	Helium valve closed
1/23/2012	8:40:54 AM	H2 valve closed
1/23/2012	8:40:54 AM	BCl3 valve closed
1/23/2012	8:40:54 AM	PH3 valve closed
1/23/2012	8:40:54 AM	SiCl4 pre valve closed
1/23/2012	8:40:54 AM	SiCl4 post valve closed
1/23/2012	8:40:54 AM	Bypass valve closed
1/23/2012	8:40:54 AM	Bubbler valve closed
1/23/2012	8:40:54 AM	Main Vac valve opened
1/23/2012	8:40:54 AM	Helium MFC set to  0.000000
1/23/2012	8:40:54 AM	H2 MFC set to  0.000000
1/23/2012	8:40:54 AM	BCl3 MFC set to  0.000000
1/23/2012	8:40:54 AM	PH3 MFC set to  0.000000
1/23/2012	8:40:54 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:40:54 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:40:55 AM	Tube furnace set to 150
1/23/2012	8:41:25 AM	H2 valve closed
1/23/2012	8:41:25 AM	BCl3 valve closed
1/23/2012	8:41:25 AM	PH3 valve closed
1/23/2012	8:41:25 AM	SiCl4 pre valve closed
1/23/2012	8:41:25 AM	SiCl4 post valve closed
1/23/2012	8:41:25 AM	Bypass valve closed
1/23/2012	8:41:25 AM	Bubbler valve closed
1/23/2012	8:41:25 AM	Helium valve opened
1/23/2012	8:41:25 AM	Main Vac valve opened
1/23/2012	8:41:25 AM	Helium MFC set to  20.000000
1/23/2012	8:41:25 AM	H2 MFC set to  0.000000
1/23/2012	8:41:25 AM	BCl3 MFC set to  0.000000
1/23/2012	8:41:25 AM	PH3 MFC set to  0.000000
1/23/2012	8:41:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:41:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:41:25 AM	Tube furnace set to 150
1/23/2012	8:41:55 AM	Helium valve closed
1/23/2012	8:41:55 AM	H2 valve closed
1/23/2012	8:41:55 AM	BCl3 valve closed
1/23/2012	8:41:55 AM	PH3 valve closed
1/23/2012	8:41:55 AM	SiCl4 pre valve closed
1/23/2012	8:41:55 AM	SiCl4 post valve closed
1/23/2012	8:41:55 AM	Bypass valve closed
1/23/2012	8:41:55 AM	Bubbler valve closed
1/23/2012	8:41:55 AM	Main Vac valve opened
1/23/2012	8:41:55 AM	Helium MFC set to  0.000000
1/23/2012	8:41:55 AM	H2 MFC set to  0.000000
1/23/2012	8:41:55 AM	BCl3 MFC set to  0.000000
1/23/2012	8:41:55 AM	PH3 MFC set to  0.000000
1/23/2012	8:41:55 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:41:55 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:41:55 AM	Tube furnace set to 150
1/23/2012	8:42:25 AM	H2 valve closed
1/23/2012	8:42:25 AM	BCl3 valve closed
1/23/2012	8:42:25 AM	PH3 valve closed
1/23/2012	8:42:25 AM	SiCl4 pre valve closed
1/23/2012	8:42:25 AM	SiCl4 post valve closed
1/23/2012	8:42:25 AM	Bypass valve closed
1/23/2012	8:42:25 AM	Bubbler valve closed
1/23/2012	8:42:25 AM	Helium valve opened
1/23/2012	8:42:25 AM	Main Vac valve opened
1/23/2012	8:42:25 AM	Helium MFC set to  20.000000
1/23/2012	8:42:25 AM	H2 MFC set to  0.000000
1/23/2012	8:42:25 AM	BCl3 MFC set to  0.000000
1/23/2012	8:42:25 AM	PH3 MFC set to  0.000000
1/23/2012	8:42:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:42:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:42:25 AM	Tube furnace set to 150
1/23/2012	8:42:55 AM	Helium valve closed
1/23/2012	8:42:55 AM	H2 valve closed
1/23/2012	8:42:55 AM	BCl3 valve closed
1/23/2012	8:42:55 AM	PH3 valve closed
1/23/2012	8:42:55 AM	SiCl4 pre valve closed
1/23/2012	8:42:55 AM	SiCl4 post valve closed
1/23/2012	8:42:55 AM	Bypass valve closed
1/23/2012	8:42:55 AM	Bubbler valve closed
1/23/2012	8:42:55 AM	Main Vac valve opened
1/23/2012	8:42:55 AM	Helium MFC set to  0.000000
1/23/2012	8:42:55 AM	H2 MFC set to  0.000000
1/23/2012	8:42:55 AM	BCl3 MFC set to  0.000000
1/23/2012	8:42:55 AM	PH3 MFC set to  0.000000
1/23/2012	8:42:55 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:42:55 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:42:55 AM	Tube furnace set to 150
1/23/2012	8:43:25 AM	H2 valve closed
1/23/2012	8:43:25 AM	BCl3 valve closed
1/23/2012	8:43:25 AM	PH3 valve closed
1/23/2012	8:43:25 AM	SiCl4 pre valve closed
1/23/2012	8:43:25 AM	SiCl4 post valve closed
1/23/2012	8:43:25 AM	Bypass valve closed
1/23/2012	8:43:25 AM	Bubbler valve closed
1/23/2012	8:43:25 AM	Helium valve opened
1/23/2012	8:43:25 AM	Main Vac valve opened
1/23/2012	8:43:25 AM	Helium MFC set to  20.000000
1/23/2012	8:43:25 AM	H2 MFC set to  0.000000
1/23/2012	8:43:25 AM	BCl3 MFC set to  0.000000
1/23/2012	8:43:25 AM	PH3 MFC set to  0.000000
1/23/2012	8:43:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:43:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:43:26 AM	Tube furnace set to 150
1/23/2012	8:43:56 AM	Helium valve closed
1/23/2012	8:43:56 AM	H2 valve closed
1/23/2012	8:43:56 AM	BCl3 valve closed
1/23/2012	8:43:56 AM	PH3 valve closed
1/23/2012	8:43:56 AM	SiCl4 pre valve closed
1/23/2012	8:43:56 AM	SiCl4 post valve closed
1/23/2012	8:43:56 AM	Bypass valve closed
1/23/2012	8:43:56 AM	Bubbler valve closed
1/23/2012	8:43:56 AM	Main Vac valve opened
1/23/2012	8:43:56 AM	Helium MFC set to  0.000000
1/23/2012	8:43:56 AM	H2 MFC set to  0.000000
1/23/2012	8:43:56 AM	BCl3 MFC set to  0.000000
1/23/2012	8:43:56 AM	PH3 MFC set to  0.000000
1/23/2012	8:43:56 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:43:56 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:43:56 AM	Tube furnace set to 150
1/23/2012	8:44:26 AM	H2 valve closed
1/23/2012	8:44:26 AM	BCl3 valve closed
1/23/2012	8:44:26 AM	PH3 valve closed
1/23/2012	8:44:26 AM	SiCl4 pre valve closed
1/23/2012	8:44:26 AM	SiCl4 post valve closed
1/23/2012	8:44:26 AM	Bypass valve closed
1/23/2012	8:44:26 AM	Bubbler valve closed
1/23/2012	8:44:26 AM	Helium valve opened
1/23/2012	8:44:26 AM	Main Vac valve opened
1/23/2012	8:44:26 AM	Helium MFC set to  20.000000
1/23/2012	8:44:26 AM	H2 MFC set to  0.000000
1/23/2012	8:44:26 AM	BCl3 MFC set to  0.000000
1/23/2012	8:44:26 AM	PH3 MFC set to  0.000000
1/23/2012	8:44:26 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:44:26 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:44:26 AM	Tube furnace set to 150
1/23/2012	8:44:56 AM	Helium valve closed
1/23/2012	8:44:56 AM	H2 valve closed
1/23/2012	8:44:56 AM	BCl3 valve closed
1/23/2012	8:44:56 AM	PH3 valve closed
1/23/2012	8:44:56 AM	SiCl4 pre valve closed
1/23/2012	8:44:56 AM	SiCl4 post valve closed
1/23/2012	8:44:56 AM	Bypass valve closed
1/23/2012	8:44:56 AM	Bubbler valve closed
1/23/2012	8:44:56 AM	Main Vac valve opened
1/23/2012	8:44:56 AM	Helium MFC set to  0.000000
1/23/2012	8:44:56 AM	H2 MFC set to  0.000000
1/23/2012	8:44:56 AM	BCl3 MFC set to  0.000000
1/23/2012	8:44:56 AM	PH3 MFC set to  0.000000
1/23/2012	8:44:56 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:44:56 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:44:56 AM	Tube furnace set to 150
1/23/2012	8:45:26 AM	H2 valve closed
1/23/2012	8:45:26 AM	BCl3 valve closed
1/23/2012	8:45:26 AM	PH3 valve closed
1/23/2012	8:45:26 AM	SiCl4 pre valve closed
1/23/2012	8:45:26 AM	SiCl4 post valve closed
1/23/2012	8:45:26 AM	Bypass valve closed
1/23/2012	8:45:26 AM	Bubbler valve closed
1/23/2012	8:45:26 AM	Helium valve opened
1/23/2012	8:45:26 AM	Main Vac valve opened
1/23/2012	8:45:26 AM	Helium MFC set to  20.000000
1/23/2012	8:45:26 AM	H2 MFC set to  0.000000
1/23/2012	8:45:26 AM	BCl3 MFC set to  0.000000
1/23/2012	8:45:26 AM	PH3 MFC set to  0.000000
1/23/2012	8:45:26 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:45:26 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:45:26 AM	Tube furnace set to 150
1/23/2012	8:45:57 AM	Helium valve closed
1/23/2012	8:45:57 AM	H2 valve closed
1/23/2012	8:45:57 AM	BCl3 valve closed
1/23/2012	8:45:57 AM	PH3 valve closed
1/23/2012	8:45:57 AM	SiCl4 pre valve closed
1/23/2012	8:45:57 AM	SiCl4 post valve closed
1/23/2012	8:45:57 AM	Bypass valve closed
1/23/2012	8:45:57 AM	Bubbler valve closed
1/23/2012	8:45:57 AM	Main Vac valve opened
1/23/2012	8:45:57 AM	Helium MFC set to  0.000000
1/23/2012	8:45:57 AM	H2 MFC set to  0.000000
1/23/2012	8:45:57 AM	BCl3 MFC set to  0.000000
1/23/2012	8:45:57 AM	PH3 MFC set to  0.000000
1/23/2012	8:45:57 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:45:57 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:45:57 AM	Tube furnace set to 150
1/23/2012	8:46:27 AM	H2 valve closed
1/23/2012	8:46:27 AM	BCl3 valve closed
1/23/2012	8:46:27 AM	PH3 valve closed
1/23/2012	8:46:27 AM	SiCl4 pre valve closed
1/23/2012	8:46:27 AM	SiCl4 post valve closed
1/23/2012	8:46:27 AM	Bypass valve closed
1/23/2012	8:46:27 AM	Bubbler valve closed
1/23/2012	8:46:27 AM	Helium valve opened
1/23/2012	8:46:27 AM	Main Vac valve opened
1/23/2012	8:46:27 AM	Helium MFC set to  20.000000
1/23/2012	8:46:27 AM	H2 MFC set to  0.000000
1/23/2012	8:46:27 AM	BCl3 MFC set to  0.000000
1/23/2012	8:46:27 AM	PH3 MFC set to  0.000000
1/23/2012	8:46:27 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:46:27 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:46:27 AM	Tube furnace set to 150
1/23/2012	8:46:57 AM	Helium valve closed
1/23/2012	8:46:57 AM	H2 valve closed
1/23/2012	8:46:57 AM	BCl3 valve closed
1/23/2012	8:46:57 AM	PH3 valve closed
1/23/2012	8:46:57 AM	SiCl4 pre valve closed
1/23/2012	8:46:57 AM	SiCl4 post valve closed
1/23/2012	8:46:57 AM	Bypass valve closed
1/23/2012	8:46:57 AM	Bubbler valve closed
1/23/2012	8:46:57 AM	Main Vac valve opened
1/23/2012	8:46:57 AM	Helium MFC set to  0.000000
1/23/2012	8:46:57 AM	H2 MFC set to  0.000000
1/23/2012	8:46:57 AM	BCl3 MFC set to  0.000000
1/23/2012	8:46:57 AM	PH3 MFC set to  0.000000
1/23/2012	8:46:57 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:46:57 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:46:57 AM	Tube furnace set to 150
1/23/2012	8:47:27 AM	H2 valve closed
1/23/2012	8:47:27 AM	BCl3 valve closed
1/23/2012	8:47:27 AM	PH3 valve closed
1/23/2012	8:47:27 AM	SiCl4 pre valve closed
1/23/2012	8:47:27 AM	SiCl4 post valve closed
1/23/2012	8:47:27 AM	Bypass valve closed
1/23/2012	8:47:27 AM	Bubbler valve closed
1/23/2012	8:47:27 AM	Helium valve opened
1/23/2012	8:47:27 AM	Main Vac valve opened
1/23/2012	8:47:27 AM	Helium MFC set to  20.000000
1/23/2012	8:47:27 AM	H2 MFC set to  0.000000
1/23/2012	8:47:27 AM	BCl3 MFC set to  0.000000
1/23/2012	8:47:27 AM	PH3 MFC set to  0.000000
1/23/2012	8:47:27 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:47:27 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:47:27 AM	Tube furnace set to 150
1/23/2012	8:47:57 AM	Helium valve closed
1/23/2012	8:47:57 AM	H2 valve closed
1/23/2012	8:47:57 AM	BCl3 valve closed
1/23/2012	8:47:57 AM	PH3 valve closed
1/23/2012	8:47:57 AM	SiCl4 pre valve closed
1/23/2012	8:47:57 AM	SiCl4 post valve closed
1/23/2012	8:47:57 AM	Bypass valve closed
1/23/2012	8:47:57 AM	Bubbler valve closed
1/23/2012	8:47:57 AM	Main Vac valve opened
1/23/2012	8:47:57 AM	Helium MFC set to  0.000000
1/23/2012	8:47:57 AM	H2 MFC set to  0.000000
1/23/2012	8:47:57 AM	BCl3 MFC set to  0.000000
1/23/2012	8:47:57 AM	PH3 MFC set to  0.000000
1/23/2012	8:47:57 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:47:57 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:47:58 AM	Tube furnace set to 150
1/23/2012	8:48:28 AM	H2 valve closed
1/23/2012	8:48:28 AM	BCl3 valve closed
1/23/2012	8:48:28 AM	PH3 valve closed
1/23/2012	8:48:28 AM	SiCl4 pre valve closed
1/23/2012	8:48:28 AM	SiCl4 post valve closed
1/23/2012	8:48:28 AM	Bypass valve closed
1/23/2012	8:48:28 AM	Bubbler valve closed
1/23/2012	8:48:28 AM	Helium valve opened
1/23/2012	8:48:28 AM	Main Vac valve opened
1/23/2012	8:48:28 AM	Helium MFC set to  20.000000
1/23/2012	8:48:28 AM	H2 MFC set to  0.000000
1/23/2012	8:48:28 AM	BCl3 MFC set to  0.000000
1/23/2012	8:48:28 AM	PH3 MFC set to  0.000000
1/23/2012	8:48:28 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:48:28 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:48:28 AM	Tube furnace set to 150
1/23/2012	8:48:58 AM	Helium valve closed
1/23/2012	8:48:58 AM	H2 valve closed
1/23/2012	8:48:58 AM	BCl3 valve closed
1/23/2012	8:48:58 AM	PH3 valve closed
1/23/2012	8:48:58 AM	SiCl4 pre valve closed
1/23/2012	8:48:58 AM	SiCl4 post valve closed
1/23/2012	8:48:58 AM	Bypass valve closed
1/23/2012	8:48:58 AM	Bubbler valve closed
1/23/2012	8:48:58 AM	Main Vac valve opened
1/23/2012	8:48:58 AM	Helium MFC set to  0.000000
1/23/2012	8:48:58 AM	H2 MFC set to  0.000000
1/23/2012	8:48:58 AM	BCl3 MFC set to  0.000000
1/23/2012	8:48:58 AM	PH3 MFC set to  0.000000
1/23/2012	8:48:58 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:48:58 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:48:58 AM	Tube furnace set to 150
1/23/2012	8:49:28 AM	H2 valve closed
1/23/2012	8:49:28 AM	BCl3 valve closed
1/23/2012	8:49:28 AM	PH3 valve closed
1/23/2012	8:49:28 AM	SiCl4 pre valve closed
1/23/2012	8:49:28 AM	SiCl4 post valve closed
1/23/2012	8:49:28 AM	Bypass valve closed
1/23/2012	8:49:28 AM	Bubbler valve closed
1/23/2012	8:49:28 AM	Helium valve opened
1/23/2012	8:49:28 AM	Main Vac valve opened
1/23/2012	8:49:28 AM	Helium MFC set to  20.000000
1/23/2012	8:49:28 AM	H2 MFC set to  0.000000
1/23/2012	8:49:28 AM	BCl3 MFC set to  0.000000
1/23/2012	8:49:28 AM	PH3 MFC set to  0.000000
1/23/2012	8:49:28 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:49:28 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:49:28 AM	Tube furnace set to 150
1/23/2012	8:49:58 AM	Helium valve closed
1/23/2012	8:49:58 AM	H2 valve closed
1/23/2012	8:49:58 AM	BCl3 valve closed
1/23/2012	8:49:58 AM	PH3 valve closed
1/23/2012	8:49:58 AM	SiCl4 pre valve closed
1/23/2012	8:49:58 AM	SiCl4 post valve closed
1/23/2012	8:49:58 AM	Bypass valve closed
1/23/2012	8:49:58 AM	Bubbler valve closed
1/23/2012	8:49:58 AM	Main Vac valve opened
1/23/2012	8:49:58 AM	Helium MFC set to  0.000000
1/23/2012	8:49:58 AM	H2 MFC set to  0.000000
1/23/2012	8:49:58 AM	BCl3 MFC set to  0.000000
1/23/2012	8:49:58 AM	PH3 MFC set to  0.000000
1/23/2012	8:49:58 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:49:58 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:49:58 AM	Tube furnace set to 150
1/23/2012	8:50:28 AM	H2 valve closed
1/23/2012	8:50:28 AM	BCl3 valve closed
1/23/2012	8:50:28 AM	PH3 valve closed
1/23/2012	8:50:28 AM	SiCl4 pre valve closed
1/23/2012	8:50:28 AM	SiCl4 post valve closed
1/23/2012	8:50:28 AM	Bypass valve closed
1/23/2012	8:50:28 AM	Bubbler valve closed
1/23/2012	8:50:28 AM	Helium valve opened
1/23/2012	8:50:28 AM	Main Vac valve opened
1/23/2012	8:50:28 AM	Helium MFC set to  20.000000
1/23/2012	8:50:28 AM	H2 MFC set to  0.000000
1/23/2012	8:50:28 AM	BCl3 MFC set to  0.000000
1/23/2012	8:50:28 AM	PH3 MFC set to  0.000000
1/23/2012	8:50:28 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:50:28 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:50:29 AM	Tube furnace set to 150
1/23/2012	8:50:59 AM	Helium valve closed
1/23/2012	8:50:59 AM	H2 valve closed
1/23/2012	8:50:59 AM	BCl3 valve closed
1/23/2012	8:50:59 AM	PH3 valve closed
1/23/2012	8:50:59 AM	SiCl4 pre valve closed
1/23/2012	8:50:59 AM	SiCl4 post valve closed
1/23/2012	8:50:59 AM	Bypass valve closed
1/23/2012	8:50:59 AM	Bubbler valve closed
1/23/2012	8:50:59 AM	Main Vac valve opened
1/23/2012	8:50:59 AM	Helium MFC set to  0.000000
1/23/2012	8:50:59 AM	H2 MFC set to  0.000000
1/23/2012	8:50:59 AM	BCl3 MFC set to  0.000000
1/23/2012	8:50:59 AM	PH3 MFC set to  0.000000
1/23/2012	8:50:59 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:50:59 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:50:59 AM	Tube furnace set to 150
1/23/2012	8:51:00 AM	Run finished at 8:51 AM
1/23/2012	8:57:01 AM	Tube furnace set to 0
1/23/2012	8:58:53 AM	Main Vac valve closed
1/23/2012	8:58:58 AM	Main Vac valve opened
1/23/2012	8:59:43 AM	Recipe started at 8:59 AM
1/23/2012	8:59:43 AM	Helium valve closed
1/23/2012	8:59:43 AM	H2 valve closed
1/23/2012	8:59:43 AM	BCl3 valve closed
1/23/2012	8:59:43 AM	PH3 valve closed
1/23/2012	8:59:43 AM	SiCl4 pre valve closed
1/23/2012	8:59:43 AM	SiCl4 post valve closed
1/23/2012	8:59:43 AM	Bypass valve closed
1/23/2012	8:59:43 AM	Bubbler valve closed
1/23/2012	8:59:43 AM	Main Vac valve opened
1/23/2012	8:59:43 AM	Helium MFC set to  0.000000
1/23/2012	8:59:43 AM	H2 MFC set to  0.000000
1/23/2012	8:59:43 AM	BCl3 MFC set to  0.000000
1/23/2012	8:59:43 AM	PH3 MFC set to  0.000000
1/23/2012	8:59:43 AM	SiCl4 MFC set to  0.000000
1/23/2012	8:59:43 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	8:59:43 AM	Tube furnace set to 150
1/23/2012	9:00:13 AM	H2 valve closed
1/23/2012	9:00:13 AM	BCl3 valve closed
1/23/2012	9:00:13 AM	PH3 valve closed
1/23/2012	9:00:13 AM	SiCl4 pre valve closed
1/23/2012	9:00:13 AM	SiCl4 post valve closed
1/23/2012	9:00:13 AM	Bypass valve closed
1/23/2012	9:00:13 AM	Bubbler valve closed
1/23/2012	9:00:13 AM	Helium valve opened
1/23/2012	9:00:13 AM	Main Vac valve opened
1/23/2012	9:00:13 AM	Helium MFC set to  20.000000
1/23/2012	9:00:13 AM	H2 MFC set to  0.000000
1/23/2012	9:00:13 AM	BCl3 MFC set to  0.000000
1/23/2012	9:00:13 AM	PH3 MFC set to  0.000000
1/23/2012	9:00:13 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:00:13 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:00:13 AM	Tube furnace set to 150
1/23/2012	9:00:43 AM	Helium valve closed
1/23/2012	9:00:43 AM	H2 valve closed
1/23/2012	9:00:43 AM	BCl3 valve closed
1/23/2012	9:00:43 AM	PH3 valve closed
1/23/2012	9:00:43 AM	SiCl4 pre valve closed
1/23/2012	9:00:43 AM	SiCl4 post valve closed
1/23/2012	9:00:43 AM	Bypass valve closed
1/23/2012	9:00:43 AM	Bubbler valve closed
1/23/2012	9:00:43 AM	Main Vac valve opened
1/23/2012	9:00:43 AM	Helium MFC set to  0.000000
1/23/2012	9:00:43 AM	H2 MFC set to  0.000000
1/23/2012	9:00:43 AM	BCl3 MFC set to  0.000000
1/23/2012	9:00:43 AM	PH3 MFC set to  0.000000
1/23/2012	9:00:43 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:00:43 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:00:43 AM	Tube furnace set to 150
1/23/2012	9:01:13 AM	H2 valve closed
1/23/2012	9:01:13 AM	BCl3 valve closed
1/23/2012	9:01:13 AM	PH3 valve closed
1/23/2012	9:01:13 AM	SiCl4 pre valve closed
1/23/2012	9:01:13 AM	SiCl4 post valve closed
1/23/2012	9:01:13 AM	Bypass valve closed
1/23/2012	9:01:13 AM	Bubbler valve closed
1/23/2012	9:01:13 AM	Helium valve opened
1/23/2012	9:01:13 AM	Main Vac valve opened
1/23/2012	9:01:13 AM	Helium MFC set to  20.000000
1/23/2012	9:01:13 AM	H2 MFC set to  0.000000
1/23/2012	9:01:13 AM	BCl3 MFC set to  0.000000
1/23/2012	9:01:13 AM	PH3 MFC set to  0.000000
1/23/2012	9:01:13 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:01:13 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:01:13 AM	Tube furnace set to 150
1/23/2012	9:01:43 AM	Helium valve closed
1/23/2012	9:01:43 AM	H2 valve closed
1/23/2012	9:01:43 AM	BCl3 valve closed
1/23/2012	9:01:43 AM	PH3 valve closed
1/23/2012	9:01:43 AM	SiCl4 pre valve closed
1/23/2012	9:01:43 AM	SiCl4 post valve closed
1/23/2012	9:01:43 AM	Bypass valve closed
1/23/2012	9:01:43 AM	Bubbler valve closed
1/23/2012	9:01:43 AM	Main Vac valve opened
1/23/2012	9:01:43 AM	Helium MFC set to  0.000000
1/23/2012	9:01:43 AM	H2 MFC set to  0.000000
1/23/2012	9:01:43 AM	BCl3 MFC set to  0.000000
1/23/2012	9:01:43 AM	PH3 MFC set to  0.000000
1/23/2012	9:01:43 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:01:43 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:01:44 AM	Tube furnace set to 150
1/23/2012	9:02:14 AM	H2 valve closed
1/23/2012	9:02:14 AM	BCl3 valve closed
1/23/2012	9:02:14 AM	PH3 valve closed
1/23/2012	9:02:14 AM	SiCl4 pre valve closed
1/23/2012	9:02:14 AM	SiCl4 post valve closed
1/23/2012	9:02:14 AM	Bypass valve closed
1/23/2012	9:02:14 AM	Bubbler valve closed
1/23/2012	9:02:14 AM	Helium valve opened
1/23/2012	9:02:14 AM	Main Vac valve opened
1/23/2012	9:02:14 AM	Helium MFC set to  20.000000
1/23/2012	9:02:14 AM	H2 MFC set to  0.000000
1/23/2012	9:02:14 AM	BCl3 MFC set to  0.000000
1/23/2012	9:02:14 AM	PH3 MFC set to  0.000000
1/23/2012	9:02:14 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:02:14 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:02:14 AM	Tube furnace set to 150
1/23/2012	9:02:44 AM	Helium valve closed
1/23/2012	9:02:44 AM	H2 valve closed
1/23/2012	9:02:44 AM	BCl3 valve closed
1/23/2012	9:02:44 AM	PH3 valve closed
1/23/2012	9:02:44 AM	SiCl4 pre valve closed
1/23/2012	9:02:44 AM	SiCl4 post valve closed
1/23/2012	9:02:44 AM	Bypass valve closed
1/23/2012	9:02:44 AM	Bubbler valve closed
1/23/2012	9:02:44 AM	Main Vac valve opened
1/23/2012	9:02:44 AM	Helium MFC set to  0.000000
1/23/2012	9:02:44 AM	H2 MFC set to  0.000000
1/23/2012	9:02:44 AM	BCl3 MFC set to  0.000000
1/23/2012	9:02:44 AM	PH3 MFC set to  0.000000
1/23/2012	9:02:44 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:02:44 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:02:44 AM	Tube furnace set to 150
1/23/2012	9:03:14 AM	H2 valve closed
1/23/2012	9:03:14 AM	BCl3 valve closed
1/23/2012	9:03:14 AM	PH3 valve closed
1/23/2012	9:03:14 AM	SiCl4 pre valve closed
1/23/2012	9:03:14 AM	SiCl4 post valve closed
1/23/2012	9:03:14 AM	Bypass valve closed
1/23/2012	9:03:14 AM	Bubbler valve closed
1/23/2012	9:03:14 AM	Helium valve opened
1/23/2012	9:03:14 AM	Main Vac valve opened
1/23/2012	9:03:14 AM	Helium MFC set to  20.000000
1/23/2012	9:03:14 AM	H2 MFC set to  0.000000
1/23/2012	9:03:14 AM	BCl3 MFC set to  0.000000
1/23/2012	9:03:14 AM	PH3 MFC set to  0.000000
1/23/2012	9:03:14 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:03:14 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:03:14 AM	Tube furnace set to 150
1/23/2012	9:03:44 AM	Helium valve closed
1/23/2012	9:03:44 AM	H2 valve closed
1/23/2012	9:03:44 AM	BCl3 valve closed
1/23/2012	9:03:44 AM	PH3 valve closed
1/23/2012	9:03:44 AM	SiCl4 pre valve closed
1/23/2012	9:03:44 AM	SiCl4 post valve closed
1/23/2012	9:03:44 AM	Bypass valve closed
1/23/2012	9:03:44 AM	Bubbler valve closed
1/23/2012	9:03:44 AM	Main Vac valve opened
1/23/2012	9:03:44 AM	Helium MFC set to  0.000000
1/23/2012	9:03:44 AM	H2 MFC set to  0.000000
1/23/2012	9:03:44 AM	BCl3 MFC set to  0.000000
1/23/2012	9:03:44 AM	PH3 MFC set to  0.000000
1/23/2012	9:03:44 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:03:44 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:03:44 AM	Tube furnace set to 150
1/23/2012	9:04:14 AM	H2 valve closed
1/23/2012	9:04:14 AM	BCl3 valve closed
1/23/2012	9:04:14 AM	PH3 valve closed
1/23/2012	9:04:14 AM	SiCl4 pre valve closed
1/23/2012	9:04:14 AM	SiCl4 post valve closed
1/23/2012	9:04:14 AM	Bypass valve closed
1/23/2012	9:04:14 AM	Bubbler valve closed
1/23/2012	9:04:14 AM	Helium valve opened
1/23/2012	9:04:14 AM	Main Vac valve opened
1/23/2012	9:04:14 AM	Helium MFC set to  20.000000
1/23/2012	9:04:14 AM	H2 MFC set to  0.000000
1/23/2012	9:04:14 AM	BCl3 MFC set to  0.000000
1/23/2012	9:04:14 AM	PH3 MFC set to  0.000000
1/23/2012	9:04:14 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:04:14 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:04:15 AM	Tube furnace set to 150
1/23/2012	9:04:45 AM	Helium valve closed
1/23/2012	9:04:45 AM	H2 valve closed
1/23/2012	9:04:45 AM	BCl3 valve closed
1/23/2012	9:04:45 AM	PH3 valve closed
1/23/2012	9:04:45 AM	SiCl4 pre valve closed
1/23/2012	9:04:45 AM	SiCl4 post valve closed
1/23/2012	9:04:45 AM	Bypass valve closed
1/23/2012	9:04:45 AM	Bubbler valve closed
1/23/2012	9:04:45 AM	Main Vac valve opened
1/23/2012	9:04:45 AM	Helium MFC set to  0.000000
1/23/2012	9:04:45 AM	H2 MFC set to  0.000000
1/23/2012	9:04:45 AM	BCl3 MFC set to  0.000000
1/23/2012	9:04:45 AM	PH3 MFC set to  0.000000
1/23/2012	9:04:45 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:04:45 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:04:45 AM	Tube furnace set to 150
1/23/2012	9:05:15 AM	H2 valve closed
1/23/2012	9:05:15 AM	BCl3 valve closed
1/23/2012	9:05:15 AM	PH3 valve closed
1/23/2012	9:05:15 AM	SiCl4 pre valve closed
1/23/2012	9:05:15 AM	SiCl4 post valve closed
1/23/2012	9:05:15 AM	Bypass valve closed
1/23/2012	9:05:15 AM	Bubbler valve closed
1/23/2012	9:05:15 AM	Helium valve opened
1/23/2012	9:05:15 AM	Main Vac valve opened
1/23/2012	9:05:15 AM	Helium MFC set to  20.000000
1/23/2012	9:05:15 AM	H2 MFC set to  0.000000
1/23/2012	9:05:15 AM	BCl3 MFC set to  0.000000
1/23/2012	9:05:15 AM	PH3 MFC set to  0.000000
1/23/2012	9:05:15 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:05:15 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:05:15 AM	Tube furnace set to 150
1/23/2012	9:05:45 AM	Helium valve closed
1/23/2012	9:05:45 AM	H2 valve closed
1/23/2012	9:05:45 AM	BCl3 valve closed
1/23/2012	9:05:45 AM	PH3 valve closed
1/23/2012	9:05:45 AM	SiCl4 pre valve closed
1/23/2012	9:05:45 AM	SiCl4 post valve closed
1/23/2012	9:05:45 AM	Bypass valve closed
1/23/2012	9:05:45 AM	Bubbler valve closed
1/23/2012	9:05:45 AM	Main Vac valve opened
1/23/2012	9:05:45 AM	Helium MFC set to  0.000000
1/23/2012	9:05:45 AM	H2 MFC set to  0.000000
1/23/2012	9:05:45 AM	BCl3 MFC set to  0.000000
1/23/2012	9:05:45 AM	PH3 MFC set to  0.000000
1/23/2012	9:05:45 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:05:45 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:05:45 AM	Tube furnace set to 150
1/23/2012	9:06:15 AM	H2 valve closed
1/23/2012	9:06:15 AM	BCl3 valve closed
1/23/2012	9:06:15 AM	PH3 valve closed
1/23/2012	9:06:15 AM	SiCl4 pre valve closed
1/23/2012	9:06:15 AM	SiCl4 post valve closed
1/23/2012	9:06:15 AM	Bypass valve closed
1/23/2012	9:06:15 AM	Bubbler valve closed
1/23/2012	9:06:15 AM	Helium valve opened
1/23/2012	9:06:15 AM	Main Vac valve opened
1/23/2012	9:06:15 AM	Helium MFC set to  20.000000
1/23/2012	9:06:15 AM	H2 MFC set to  0.000000
1/23/2012	9:06:15 AM	BCl3 MFC set to  0.000000
1/23/2012	9:06:15 AM	PH3 MFC set to  0.000000
1/23/2012	9:06:15 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:06:15 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:06:15 AM	Tube furnace set to 150
1/23/2012	9:06:45 AM	Helium valve closed
1/23/2012	9:06:45 AM	H2 valve closed
1/23/2012	9:06:45 AM	BCl3 valve closed
1/23/2012	9:06:45 AM	PH3 valve closed
1/23/2012	9:06:45 AM	SiCl4 pre valve closed
1/23/2012	9:06:45 AM	SiCl4 post valve closed
1/23/2012	9:06:45 AM	Bypass valve closed
1/23/2012	9:06:45 AM	Bubbler valve closed
1/23/2012	9:06:45 AM	Main Vac valve opened
1/23/2012	9:06:45 AM	Helium MFC set to  0.000000
1/23/2012	9:06:45 AM	H2 MFC set to  0.000000
1/23/2012	9:06:45 AM	BCl3 MFC set to  0.000000
1/23/2012	9:06:45 AM	PH3 MFC set to  0.000000
1/23/2012	9:06:45 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:06:45 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:06:46 AM	Tube furnace set to 150
1/23/2012	9:07:16 AM	H2 valve closed
1/23/2012	9:07:16 AM	BCl3 valve closed
1/23/2012	9:07:16 AM	PH3 valve closed
1/23/2012	9:07:16 AM	SiCl4 pre valve closed
1/23/2012	9:07:16 AM	SiCl4 post valve closed
1/23/2012	9:07:16 AM	Bypass valve closed
1/23/2012	9:07:16 AM	Bubbler valve closed
1/23/2012	9:07:16 AM	Helium valve opened
1/23/2012	9:07:16 AM	Main Vac valve opened
1/23/2012	9:07:16 AM	Helium MFC set to  20.000000
1/23/2012	9:07:16 AM	H2 MFC set to  0.000000
1/23/2012	9:07:16 AM	BCl3 MFC set to  0.000000
1/23/2012	9:07:16 AM	PH3 MFC set to  0.000000
1/23/2012	9:07:16 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:07:16 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:07:16 AM	Tube furnace set to 150
1/23/2012	9:07:46 AM	Helium valve closed
1/23/2012	9:07:46 AM	H2 valve closed
1/23/2012	9:07:46 AM	BCl3 valve closed
1/23/2012	9:07:46 AM	PH3 valve closed
1/23/2012	9:07:46 AM	SiCl4 pre valve closed
1/23/2012	9:07:46 AM	SiCl4 post valve closed
1/23/2012	9:07:46 AM	Bypass valve closed
1/23/2012	9:07:46 AM	Bubbler valve closed
1/23/2012	9:07:46 AM	Main Vac valve opened
1/23/2012	9:07:46 AM	Helium MFC set to  0.000000
1/23/2012	9:07:46 AM	H2 MFC set to  0.000000
1/23/2012	9:07:46 AM	BCl3 MFC set to  0.000000
1/23/2012	9:07:46 AM	PH3 MFC set to  0.000000
1/23/2012	9:07:46 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:07:46 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:07:46 AM	Tube furnace set to 150
1/23/2012	9:08:16 AM	H2 valve closed
1/23/2012	9:08:16 AM	BCl3 valve closed
1/23/2012	9:08:16 AM	PH3 valve closed
1/23/2012	9:08:16 AM	SiCl4 pre valve closed
1/23/2012	9:08:16 AM	SiCl4 post valve closed
1/23/2012	9:08:16 AM	Bypass valve closed
1/23/2012	9:08:16 AM	Bubbler valve closed
1/23/2012	9:08:16 AM	Helium valve opened
1/23/2012	9:08:16 AM	Main Vac valve opened
1/23/2012	9:08:16 AM	Helium MFC set to  20.000000
1/23/2012	9:08:16 AM	H2 MFC set to  0.000000
1/23/2012	9:08:16 AM	BCl3 MFC set to  0.000000
1/23/2012	9:08:16 AM	PH3 MFC set to  0.000000
1/23/2012	9:08:16 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:08:16 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:08:16 AM	Tube furnace set to 150
1/23/2012	9:08:46 AM	Helium valve closed
1/23/2012	9:08:46 AM	H2 valve closed
1/23/2012	9:08:46 AM	BCl3 valve closed
1/23/2012	9:08:46 AM	PH3 valve closed
1/23/2012	9:08:46 AM	SiCl4 pre valve closed
1/23/2012	9:08:46 AM	SiCl4 post valve closed
1/23/2012	9:08:46 AM	Bypass valve closed
1/23/2012	9:08:46 AM	Bubbler valve closed
1/23/2012	9:08:46 AM	Main Vac valve opened
1/23/2012	9:08:46 AM	Helium MFC set to  0.000000
1/23/2012	9:08:46 AM	H2 MFC set to  0.000000
1/23/2012	9:08:46 AM	BCl3 MFC set to  0.000000
1/23/2012	9:08:46 AM	PH3 MFC set to  0.000000
1/23/2012	9:08:46 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:08:46 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:08:46 AM	Tube furnace set to 150
1/23/2012	9:09:16 AM	H2 valve closed
1/23/2012	9:09:16 AM	BCl3 valve closed
1/23/2012	9:09:16 AM	PH3 valve closed
1/23/2012	9:09:16 AM	SiCl4 pre valve closed
1/23/2012	9:09:16 AM	SiCl4 post valve closed
1/23/2012	9:09:16 AM	Bypass valve closed
1/23/2012	9:09:16 AM	Bubbler valve closed
1/23/2012	9:09:16 AM	Helium valve opened
1/23/2012	9:09:16 AM	Main Vac valve opened
1/23/2012	9:09:16 AM	Helium MFC set to  20.000000
1/23/2012	9:09:16 AM	H2 MFC set to  0.000000
1/23/2012	9:09:16 AM	BCl3 MFC set to  0.000000
1/23/2012	9:09:16 AM	PH3 MFC set to  0.000000
1/23/2012	9:09:16 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:09:16 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:09:17 AM	Tube furnace set to 150
1/23/2012	9:09:47 AM	Helium valve closed
1/23/2012	9:09:47 AM	H2 valve closed
1/23/2012	9:09:47 AM	BCl3 valve closed
1/23/2012	9:09:47 AM	PH3 valve closed
1/23/2012	9:09:47 AM	SiCl4 pre valve closed
1/23/2012	9:09:47 AM	SiCl4 post valve closed
1/23/2012	9:09:47 AM	Bypass valve closed
1/23/2012	9:09:47 AM	Bubbler valve closed
1/23/2012	9:09:47 AM	Main Vac valve opened
1/23/2012	9:09:47 AM	Helium MFC set to  0.000000
1/23/2012	9:09:47 AM	H2 MFC set to  0.000000
1/23/2012	9:09:47 AM	BCl3 MFC set to  0.000000
1/23/2012	9:09:47 AM	PH3 MFC set to  0.000000
1/23/2012	9:09:47 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:09:47 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:09:47 AM	Tube furnace set to 150
1/23/2012	9:09:48 AM	Run finished at 9:09 AM
1/23/2012	9:11:29 AM	Main Vac valve closed
1/23/2012	9:11:34 AM	Main Vac valve opened
1/23/2012	9:11:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	9:11:58 AM	Recipe started at 9:11 AM
1/23/2012	9:11:58 AM	Helium valve closed
1/23/2012	9:11:58 AM	H2 valve closed
1/23/2012	9:11:58 AM	BCl3 valve closed
1/23/2012	9:11:58 AM	PH3 valve closed
1/23/2012	9:11:58 AM	SiCl4 pre valve closed
1/23/2012	9:11:58 AM	SiCl4 post valve closed
1/23/2012	9:11:58 AM	Main Vac valve closed
1/23/2012	9:11:58 AM	Bypass valve closed
1/23/2012	9:11:58 AM	Bubbler valve closed
1/23/2012	9:11:58 AM	Helium MFC set to  0.000000
1/23/2012	9:11:58 AM	H2 MFC set to  0.000000
1/23/2012	9:11:58 AM	BCl3 MFC set to  0.000000
1/23/2012	9:11:58 AM	PH3 MFC set to  0.000000
1/23/2012	9:11:58 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:11:58 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:11:58 AM	Tube furnace set to 0
1/23/2012	9:12:01 AM	H2 valve closed
1/23/2012	9:12:01 AM	BCl3 valve closed
1/23/2012	9:12:01 AM	PH3 valve closed
1/23/2012	9:12:01 AM	SiCl4 pre valve closed
1/23/2012	9:12:01 AM	SiCl4 post valve closed
1/23/2012	9:12:01 AM	Main Vac valve closed
1/23/2012	9:12:01 AM	Bypass valve closed
1/23/2012	9:12:01 AM	Bubbler valve closed
1/23/2012	9:12:01 AM	Helium valve opened
1/23/2012	9:12:01 AM	Helium MFC set to  500.000000
1/23/2012	9:12:01 AM	H2 MFC set to  0.000000
1/23/2012	9:12:01 AM	BCl3 MFC set to  0.000000
1/23/2012	9:12:01 AM	PH3 MFC set to  0.000000
1/23/2012	9:12:01 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:12:01 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:12:01 AM	Tube furnace set to 0
1/23/2012	9:13:03 AM	Helium valve closed
1/23/2012	9:13:03 AM	H2 valve closed
1/23/2012	9:13:03 AM	BCl3 valve closed
1/23/2012	9:13:03 AM	PH3 valve closed
1/23/2012	9:13:03 AM	SiCl4 pre valve closed
1/23/2012	9:13:03 AM	SiCl4 post valve closed
1/23/2012	9:13:03 AM	Main Vac valve closed
1/23/2012	9:13:03 AM	Bypass valve closed
1/23/2012	9:13:03 AM	Bubbler valve closed
1/23/2012	9:13:03 AM	Helium MFC set to  0.000000
1/23/2012	9:13:03 AM	H2 MFC set to  0.000000
1/23/2012	9:13:03 AM	BCl3 MFC set to  0.000000
1/23/2012	9:13:03 AM	PH3 MFC set to  0.000000
1/23/2012	9:13:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:13:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:13:03 AM	Tube furnace set to 0
1/23/2012	9:13:04 AM	Run finished at 9:13 AM
1/23/2012	9:13:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	9:14:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	9:14:39 AM	Recipe started at 9:14 AM
1/23/2012	9:14:39 AM	Helium valve closed
1/23/2012	9:14:39 AM	H2 valve closed
1/23/2012	9:14:39 AM	BCl3 valve closed
1/23/2012	9:14:39 AM	PH3 valve closed
1/23/2012	9:14:39 AM	SiCl4 pre valve closed
1/23/2012	9:14:39 AM	SiCl4 post valve closed
1/23/2012	9:14:39 AM	Main Vac valve closed
1/23/2012	9:14:39 AM	Bubbler valve closed
1/23/2012	9:14:39 AM	Bypass valve opened
1/23/2012	9:14:39 AM	Helium MFC set to  0.000000
1/23/2012	9:14:39 AM	H2 MFC set to  0.000000
1/23/2012	9:14:39 AM	BCl3 MFC set to  0.000000
1/23/2012	9:14:39 AM	PH3 MFC set to  0.000000
1/23/2012	9:14:39 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:14:39 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:14:39 AM	Tube furnace set to 0
1/23/2012	9:15:33 AM	Helium valve closed
1/23/2012	9:15:33 AM	H2 valve closed
1/23/2012	9:15:33 AM	BCl3 valve closed
1/23/2012	9:15:33 AM	PH3 valve closed
1/23/2012	9:15:33 AM	SiCl4 pre valve closed
1/23/2012	9:15:33 AM	SiCl4 post valve closed
1/23/2012	9:15:33 AM	Main Vac valve closed
1/23/2012	9:15:33 AM	Bubbler valve closed
1/23/2012	9:15:33 AM	Bypass valve opened
1/23/2012	9:15:33 AM	Helium MFC set to  0.000000
1/23/2012	9:15:33 AM	H2 MFC set to  0.000000
1/23/2012	9:15:33 AM	BCl3 MFC set to  0.000000
1/23/2012	9:15:33 AM	PH3 MFC set to  0.000000
1/23/2012	9:15:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:15:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:15:33 AM	Tube furnace set to 0
1/23/2012	9:15:45 AM	Helium valve closed
1/23/2012	9:15:45 AM	H2 valve closed
1/23/2012	9:15:45 AM	BCl3 valve closed
1/23/2012	9:15:46 AM	PH3 valve closed
1/23/2012	9:15:46 AM	SiCl4 pre valve closed
1/23/2012	9:15:46 AM	SiCl4 post valve closed
1/23/2012	9:15:46 AM	Bypass valve closed
1/23/2012	9:15:46 AM	Bubbler valve closed
1/23/2012	9:15:46 AM	Main Vac valve opened
1/23/2012	9:15:46 AM	Helium MFC set to  0.000000
1/23/2012	9:15:46 AM	H2 MFC set to  0.000000
1/23/2012	9:15:46 AM	BCl3 MFC set to  0.000000
1/23/2012	9:15:46 AM	PH3 MFC set to  0.000000
1/23/2012	9:15:46 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:15:46 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:15:46 AM	Tube furnace set to 0
1/23/2012	9:15:47 AM	Run finished at 9:15 AM
1/23/2012	9:15:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	9:17:33 AM	Recipe started at 9:17 AM
1/23/2012	9:17:33 AM	Helium valve closed
1/23/2012	9:17:33 AM	H2 valve closed
1/23/2012	9:17:33 AM	BCl3 valve closed
1/23/2012	9:17:33 AM	PH3 valve closed
1/23/2012	9:17:33 AM	SiCl4 pre valve closed
1/23/2012	9:17:33 AM	SiCl4 post valve closed
1/23/2012	9:17:33 AM	Bypass valve closed
1/23/2012	9:17:33 AM	Bubbler valve closed
1/23/2012	9:17:33 AM	Main Vac valve opened
1/23/2012	9:17:33 AM	Helium MFC set to  0.000000
1/23/2012	9:17:33 AM	H2 MFC set to  0.000000
1/23/2012	9:17:33 AM	BCl3 MFC set to  0.000000
1/23/2012	9:17:33 AM	PH3 MFC set to  0.000000
1/23/2012	9:17:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:17:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:17:33 AM	Tube furnace set to 150
1/23/2012	9:18:03 AM	H2 valve closed
1/23/2012	9:18:03 AM	BCl3 valve closed
1/23/2012	9:18:03 AM	PH3 valve closed
1/23/2012	9:18:03 AM	SiCl4 pre valve closed
1/23/2012	9:18:03 AM	SiCl4 post valve closed
1/23/2012	9:18:03 AM	Bypass valve closed
1/23/2012	9:18:03 AM	Bubbler valve closed
1/23/2012	9:18:03 AM	Helium valve opened
1/23/2012	9:18:03 AM	Main Vac valve opened
1/23/2012	9:18:03 AM	Helium MFC set to  20.000000
1/23/2012	9:18:03 AM	H2 MFC set to  0.000000
1/23/2012	9:18:03 AM	BCl3 MFC set to  0.000000
1/23/2012	9:18:03 AM	PH3 MFC set to  0.000000
1/23/2012	9:18:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:18:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:18:03 AM	Tube furnace set to 150
1/23/2012	9:18:33 AM	Helium valve closed
1/23/2012	9:18:33 AM	H2 valve closed
1/23/2012	9:18:33 AM	BCl3 valve closed
1/23/2012	9:18:33 AM	PH3 valve closed
1/23/2012	9:18:33 AM	SiCl4 pre valve closed
1/23/2012	9:18:33 AM	SiCl4 post valve closed
1/23/2012	9:18:33 AM	Bypass valve closed
1/23/2012	9:18:33 AM	Bubbler valve closed
1/23/2012	9:18:33 AM	Main Vac valve opened
1/23/2012	9:18:33 AM	Helium MFC set to  0.000000
1/23/2012	9:18:33 AM	H2 MFC set to  0.000000
1/23/2012	9:18:33 AM	BCl3 MFC set to  0.000000
1/23/2012	9:18:33 AM	PH3 MFC set to  0.000000
1/23/2012	9:18:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:18:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:18:33 AM	Tube furnace set to 150
1/23/2012	9:19:03 AM	H2 valve closed
1/23/2012	9:19:03 AM	BCl3 valve closed
1/23/2012	9:19:03 AM	PH3 valve closed
1/23/2012	9:19:03 AM	SiCl4 pre valve closed
1/23/2012	9:19:03 AM	SiCl4 post valve closed
1/23/2012	9:19:03 AM	Bypass valve closed
1/23/2012	9:19:03 AM	Bubbler valve closed
1/23/2012	9:19:03 AM	Helium valve opened
1/23/2012	9:19:03 AM	Main Vac valve opened
1/23/2012	9:19:03 AM	Helium MFC set to  20.000000
1/23/2012	9:19:03 AM	H2 MFC set to  0.000000
1/23/2012	9:19:03 AM	BCl3 MFC set to  0.000000
1/23/2012	9:19:03 AM	PH3 MFC set to  0.000000
1/23/2012	9:19:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:19:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:19:04 AM	Tube furnace set to 150
1/23/2012	9:19:34 AM	Helium valve closed
1/23/2012	9:19:34 AM	H2 valve closed
1/23/2012	9:19:34 AM	BCl3 valve closed
1/23/2012	9:19:34 AM	PH3 valve closed
1/23/2012	9:19:34 AM	SiCl4 pre valve closed
1/23/2012	9:19:34 AM	SiCl4 post valve closed
1/23/2012	9:19:34 AM	Bypass valve closed
1/23/2012	9:19:34 AM	Bubbler valve closed
1/23/2012	9:19:34 AM	Main Vac valve opened
1/23/2012	9:19:34 AM	Helium MFC set to  0.000000
1/23/2012	9:19:34 AM	H2 MFC set to  0.000000
1/23/2012	9:19:34 AM	BCl3 MFC set to  0.000000
1/23/2012	9:19:34 AM	PH3 MFC set to  0.000000
1/23/2012	9:19:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:19:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:19:34 AM	Tube furnace set to 150
1/23/2012	9:20:04 AM	H2 valve closed
1/23/2012	9:20:04 AM	BCl3 valve closed
1/23/2012	9:20:04 AM	PH3 valve closed
1/23/2012	9:20:04 AM	SiCl4 pre valve closed
1/23/2012	9:20:04 AM	SiCl4 post valve closed
1/23/2012	9:20:04 AM	Bypass valve closed
1/23/2012	9:20:04 AM	Bubbler valve closed
1/23/2012	9:20:04 AM	Helium valve opened
1/23/2012	9:20:04 AM	Main Vac valve opened
1/23/2012	9:20:04 AM	Helium MFC set to  20.000000
1/23/2012	9:20:04 AM	H2 MFC set to  0.000000
1/23/2012	9:20:04 AM	BCl3 MFC set to  0.000000
1/23/2012	9:20:04 AM	PH3 MFC set to  0.000000
1/23/2012	9:20:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:20:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:20:04 AM	Tube furnace set to 150
1/23/2012	9:20:34 AM	Helium valve closed
1/23/2012	9:20:34 AM	H2 valve closed
1/23/2012	9:20:34 AM	BCl3 valve closed
1/23/2012	9:20:34 AM	PH3 valve closed
1/23/2012	9:20:34 AM	SiCl4 pre valve closed
1/23/2012	9:20:34 AM	SiCl4 post valve closed
1/23/2012	9:20:34 AM	Bypass valve closed
1/23/2012	9:20:34 AM	Bubbler valve closed
1/23/2012	9:20:34 AM	Main Vac valve opened
1/23/2012	9:20:34 AM	Helium MFC set to  0.000000
1/23/2012	9:20:34 AM	H2 MFC set to  0.000000
1/23/2012	9:20:34 AM	BCl3 MFC set to  0.000000
1/23/2012	9:20:34 AM	PH3 MFC set to  0.000000
1/23/2012	9:20:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:20:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:20:34 AM	Tube furnace set to 150
1/23/2012	9:21:04 AM	H2 valve closed
1/23/2012	9:21:04 AM	BCl3 valve closed
1/23/2012	9:21:04 AM	PH3 valve closed
1/23/2012	9:21:04 AM	SiCl4 pre valve closed
1/23/2012	9:21:04 AM	SiCl4 post valve closed
1/23/2012	9:21:04 AM	Bypass valve closed
1/23/2012	9:21:04 AM	Bubbler valve closed
1/23/2012	9:21:04 AM	Helium valve opened
1/23/2012	9:21:04 AM	Main Vac valve opened
1/23/2012	9:21:04 AM	Helium MFC set to  20.000000
1/23/2012	9:21:04 AM	H2 MFC set to  0.000000
1/23/2012	9:21:04 AM	BCl3 MFC set to  0.000000
1/23/2012	9:21:04 AM	PH3 MFC set to  0.000000
1/23/2012	9:21:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:21:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:21:04 AM	Tube furnace set to 150
1/23/2012	9:21:34 AM	Helium valve closed
1/23/2012	9:21:34 AM	H2 valve closed
1/23/2012	9:21:34 AM	BCl3 valve closed
1/23/2012	9:21:34 AM	PH3 valve closed
1/23/2012	9:21:34 AM	SiCl4 pre valve closed
1/23/2012	9:21:34 AM	SiCl4 post valve closed
1/23/2012	9:21:34 AM	Bypass valve closed
1/23/2012	9:21:34 AM	Bubbler valve closed
1/23/2012	9:21:34 AM	Main Vac valve opened
1/23/2012	9:21:34 AM	Helium MFC set to  0.000000
1/23/2012	9:21:34 AM	H2 MFC set to  0.000000
1/23/2012	9:21:34 AM	BCl3 MFC set to  0.000000
1/23/2012	9:21:34 AM	PH3 MFC set to  0.000000
1/23/2012	9:21:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:21:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:21:35 AM	Tube furnace set to 150
1/23/2012	9:22:05 AM	H2 valve closed
1/23/2012	9:22:05 AM	BCl3 valve closed
1/23/2012	9:22:05 AM	PH3 valve closed
1/23/2012	9:22:05 AM	SiCl4 pre valve closed
1/23/2012	9:22:05 AM	SiCl4 post valve closed
1/23/2012	9:22:05 AM	Bypass valve closed
1/23/2012	9:22:05 AM	Bubbler valve closed
1/23/2012	9:22:05 AM	Helium valve opened
1/23/2012	9:22:05 AM	Main Vac valve opened
1/23/2012	9:22:05 AM	Helium MFC set to  20.000000
1/23/2012	9:22:05 AM	H2 MFC set to  0.000000
1/23/2012	9:22:05 AM	BCl3 MFC set to  0.000000
1/23/2012	9:22:05 AM	PH3 MFC set to  0.000000
1/23/2012	9:22:05 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:22:05 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:22:05 AM	Tube furnace set to 150
1/23/2012	9:22:35 AM	Helium valve closed
1/23/2012	9:22:35 AM	H2 valve closed
1/23/2012	9:22:35 AM	BCl3 valve closed
1/23/2012	9:22:35 AM	PH3 valve closed
1/23/2012	9:22:35 AM	SiCl4 pre valve closed
1/23/2012	9:22:35 AM	SiCl4 post valve closed
1/23/2012	9:22:35 AM	Bypass valve closed
1/23/2012	9:22:35 AM	Bubbler valve closed
1/23/2012	9:22:35 AM	Main Vac valve opened
1/23/2012	9:22:35 AM	Helium MFC set to  0.000000
1/23/2012	9:22:35 AM	H2 MFC set to  0.000000
1/23/2012	9:22:35 AM	BCl3 MFC set to  0.000000
1/23/2012	9:22:35 AM	PH3 MFC set to  0.000000
1/23/2012	9:22:35 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:22:35 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:22:35 AM	Tube furnace set to 150
1/23/2012	9:23:05 AM	H2 valve closed
1/23/2012	9:23:05 AM	BCl3 valve closed
1/23/2012	9:23:05 AM	PH3 valve closed
1/23/2012	9:23:05 AM	SiCl4 pre valve closed
1/23/2012	9:23:05 AM	SiCl4 post valve closed
1/23/2012	9:23:05 AM	Bypass valve closed
1/23/2012	9:23:05 AM	Bubbler valve closed
1/23/2012	9:23:05 AM	Helium valve opened
1/23/2012	9:23:05 AM	Main Vac valve opened
1/23/2012	9:23:05 AM	Helium MFC set to  20.000000
1/23/2012	9:23:05 AM	H2 MFC set to  0.000000
1/23/2012	9:23:05 AM	BCl3 MFC set to  0.000000
1/23/2012	9:23:05 AM	PH3 MFC set to  0.000000
1/23/2012	9:23:05 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:23:05 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:23:05 AM	Tube furnace set to 150
1/23/2012	9:23:35 AM	Helium valve closed
1/23/2012	9:23:35 AM	H2 valve closed
1/23/2012	9:23:35 AM	BCl3 valve closed
1/23/2012	9:23:35 AM	PH3 valve closed
1/23/2012	9:23:35 AM	SiCl4 pre valve closed
1/23/2012	9:23:35 AM	SiCl4 post valve closed
1/23/2012	9:23:35 AM	Bypass valve closed
1/23/2012	9:23:35 AM	Bubbler valve closed
1/23/2012	9:23:35 AM	Main Vac valve opened
1/23/2012	9:23:35 AM	Helium MFC set to  0.000000
1/23/2012	9:23:35 AM	H2 MFC set to  0.000000
1/23/2012	9:23:35 AM	BCl3 MFC set to  0.000000
1/23/2012	9:23:35 AM	PH3 MFC set to  0.000000
1/23/2012	9:23:35 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:23:35 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:23:35 AM	Tube furnace set to 150
1/23/2012	9:24:05 AM	H2 valve closed
1/23/2012	9:24:05 AM	BCl3 valve closed
1/23/2012	9:24:05 AM	PH3 valve closed
1/23/2012	9:24:05 AM	SiCl4 pre valve closed
1/23/2012	9:24:05 AM	SiCl4 post valve closed
1/23/2012	9:24:05 AM	Bypass valve closed
1/23/2012	9:24:05 AM	Bubbler valve closed
1/23/2012	9:24:05 AM	Helium valve opened
1/23/2012	9:24:05 AM	Main Vac valve opened
1/23/2012	9:24:05 AM	Helium MFC set to  20.000000
1/23/2012	9:24:05 AM	H2 MFC set to  0.000000
1/23/2012	9:24:05 AM	BCl3 MFC set to  0.000000
1/23/2012	9:24:05 AM	PH3 MFC set to  0.000000
1/23/2012	9:24:05 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:24:05 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:24:06 AM	Tube furnace set to 150
1/23/2012	9:24:36 AM	Helium valve closed
1/23/2012	9:24:36 AM	H2 valve closed
1/23/2012	9:24:36 AM	BCl3 valve closed
1/23/2012	9:24:36 AM	PH3 valve closed
1/23/2012	9:24:36 AM	SiCl4 pre valve closed
1/23/2012	9:24:36 AM	SiCl4 post valve closed
1/23/2012	9:24:36 AM	Bypass valve closed
1/23/2012	9:24:36 AM	Bubbler valve closed
1/23/2012	9:24:36 AM	Main Vac valve opened
1/23/2012	9:24:36 AM	Helium MFC set to  0.000000
1/23/2012	9:24:36 AM	H2 MFC set to  0.000000
1/23/2012	9:24:36 AM	BCl3 MFC set to  0.000000
1/23/2012	9:24:36 AM	PH3 MFC set to  0.000000
1/23/2012	9:24:36 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:24:36 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:24:36 AM	Tube furnace set to 150
1/23/2012	9:25:06 AM	H2 valve closed
1/23/2012	9:25:06 AM	BCl3 valve closed
1/23/2012	9:25:06 AM	PH3 valve closed
1/23/2012	9:25:06 AM	SiCl4 pre valve closed
1/23/2012	9:25:06 AM	SiCl4 post valve closed
1/23/2012	9:25:06 AM	Bypass valve closed
1/23/2012	9:25:06 AM	Bubbler valve closed
1/23/2012	9:25:06 AM	Helium valve opened
1/23/2012	9:25:06 AM	Main Vac valve opened
1/23/2012	9:25:06 AM	Helium MFC set to  20.000000
1/23/2012	9:25:06 AM	H2 MFC set to  0.000000
1/23/2012	9:25:06 AM	BCl3 MFC set to  0.000000
1/23/2012	9:25:06 AM	PH3 MFC set to  0.000000
1/23/2012	9:25:06 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:25:06 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:25:06 AM	Tube furnace set to 150
1/23/2012	9:25:36 AM	Helium valve closed
1/23/2012	9:25:36 AM	H2 valve closed
1/23/2012	9:25:36 AM	BCl3 valve closed
1/23/2012	9:25:36 AM	PH3 valve closed
1/23/2012	9:25:36 AM	SiCl4 pre valve closed
1/23/2012	9:25:36 AM	SiCl4 post valve closed
1/23/2012	9:25:36 AM	Bypass valve closed
1/23/2012	9:25:36 AM	Bubbler valve closed
1/23/2012	9:25:36 AM	Main Vac valve opened
1/23/2012	9:25:36 AM	Helium MFC set to  0.000000
1/23/2012	9:25:36 AM	H2 MFC set to  0.000000
1/23/2012	9:25:36 AM	BCl3 MFC set to  0.000000
1/23/2012	9:25:36 AM	PH3 MFC set to  0.000000
1/23/2012	9:25:36 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:25:36 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:25:36 AM	Tube furnace set to 150
1/23/2012	9:26:06 AM	H2 valve closed
1/23/2012	9:26:06 AM	BCl3 valve closed
1/23/2012	9:26:06 AM	PH3 valve closed
1/23/2012	9:26:06 AM	SiCl4 pre valve closed
1/23/2012	9:26:06 AM	SiCl4 post valve closed
1/23/2012	9:26:06 AM	Bypass valve closed
1/23/2012	9:26:06 AM	Bubbler valve closed
1/23/2012	9:26:06 AM	Helium valve opened
1/23/2012	9:26:06 AM	Main Vac valve opened
1/23/2012	9:26:06 AM	Helium MFC set to  20.000000
1/23/2012	9:26:06 AM	H2 MFC set to  0.000000
1/23/2012	9:26:06 AM	BCl3 MFC set to  0.000000
1/23/2012	9:26:06 AM	PH3 MFC set to  0.000000
1/23/2012	9:26:06 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:26:06 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:26:06 AM	Tube furnace set to 150
1/23/2012	9:26:36 AM	Helium valve closed
1/23/2012	9:26:36 AM	H2 valve closed
1/23/2012	9:26:36 AM	BCl3 valve closed
1/23/2012	9:26:36 AM	PH3 valve closed
1/23/2012	9:26:36 AM	SiCl4 pre valve closed
1/23/2012	9:26:36 AM	SiCl4 post valve closed
1/23/2012	9:26:36 AM	Bypass valve closed
1/23/2012	9:26:37 AM	Bubbler valve closed
1/23/2012	9:26:37 AM	Main Vac valve opened
1/23/2012	9:26:37 AM	Helium MFC set to  0.000000
1/23/2012	9:26:37 AM	H2 MFC set to  0.000000
1/23/2012	9:26:37 AM	BCl3 MFC set to  0.000000
1/23/2012	9:26:37 AM	PH3 MFC set to  0.000000
1/23/2012	9:26:37 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:26:37 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:26:37 AM	Tube furnace set to 150
1/23/2012	9:27:07 AM	H2 valve closed
1/23/2012	9:27:07 AM	BCl3 valve closed
1/23/2012	9:27:07 AM	PH3 valve closed
1/23/2012	9:27:07 AM	SiCl4 pre valve closed
1/23/2012	9:27:07 AM	SiCl4 post valve closed
1/23/2012	9:27:07 AM	Bypass valve closed
1/23/2012	9:27:07 AM	Bubbler valve closed
1/23/2012	9:27:07 AM	Helium valve opened
1/23/2012	9:27:07 AM	Main Vac valve opened
1/23/2012	9:27:07 AM	Helium MFC set to  20.000000
1/23/2012	9:27:07 AM	H2 MFC set to  0.000000
1/23/2012	9:27:07 AM	BCl3 MFC set to  0.000000
1/23/2012	9:27:07 AM	PH3 MFC set to  0.000000
1/23/2012	9:27:07 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:27:07 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:27:07 AM	Tube furnace set to 150
1/23/2012	9:27:37 AM	Helium valve closed
1/23/2012	9:27:37 AM	H2 valve closed
1/23/2012	9:27:37 AM	BCl3 valve closed
1/23/2012	9:27:37 AM	PH3 valve closed
1/23/2012	9:27:37 AM	SiCl4 pre valve closed
1/23/2012	9:27:37 AM	SiCl4 post valve closed
1/23/2012	9:27:37 AM	Bypass valve closed
1/23/2012	9:27:37 AM	Bubbler valve closed
1/23/2012	9:27:37 AM	Main Vac valve opened
1/23/2012	9:27:37 AM	Helium MFC set to  0.000000
1/23/2012	9:27:37 AM	H2 MFC set to  0.000000
1/23/2012	9:27:37 AM	BCl3 MFC set to  0.000000
1/23/2012	9:27:37 AM	PH3 MFC set to  0.000000
1/23/2012	9:27:37 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:27:37 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:27:37 AM	Tube furnace set to 150
1/23/2012	9:27:38 AM	Run finished at 9:27 AM
1/23/2012	9:29:05 AM	Main Vac valve closed
1/23/2012	9:29:09 AM	Main Vac valve opened
1/23/2012	9:29:19 AM	Recipe started at 9:29 AM
1/23/2012	9:29:19 AM	Helium valve closed
1/23/2012	9:29:19 AM	H2 valve closed
1/23/2012	9:29:19 AM	BCl3 valve closed
1/23/2012	9:29:19 AM	PH3 valve closed
1/23/2012	9:29:19 AM	SiCl4 pre valve closed
1/23/2012	9:29:19 AM	SiCl4 post valve closed
1/23/2012	9:29:19 AM	Bypass valve closed
1/23/2012	9:29:19 AM	Bubbler valve closed
1/23/2012	9:29:19 AM	Main Vac valve opened
1/23/2012	9:29:19 AM	Helium MFC set to  0.000000
1/23/2012	9:29:19 AM	H2 MFC set to  0.000000
1/23/2012	9:29:19 AM	BCl3 MFC set to  0.000000
1/23/2012	9:29:19 AM	PH3 MFC set to  0.000000
1/23/2012	9:29:19 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:29:19 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:29:20 AM	Tube furnace set to 150
1/23/2012	9:29:32 AM	H2 valve closed
1/23/2012	9:29:32 AM	BCl3 valve closed
1/23/2012	9:29:32 AM	PH3 valve closed
1/23/2012	9:29:32 AM	SiCl4 pre valve closed
1/23/2012	9:29:32 AM	SiCl4 post valve closed
1/23/2012	9:29:32 AM	Bypass valve closed
1/23/2012	9:29:32 AM	Bubbler valve closed
1/23/2012	9:29:32 AM	Helium valve opened
1/23/2012	9:29:32 AM	Main Vac valve opened
1/23/2012	9:29:32 AM	Helium MFC set to  20.000000
1/23/2012	9:29:32 AM	H2 MFC set to  0.000000
1/23/2012	9:29:32 AM	BCl3 MFC set to  0.000000
1/23/2012	9:29:32 AM	PH3 MFC set to  0.000000
1/23/2012	9:29:32 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:29:32 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:29:32 AM	Tube furnace set to 150
1/23/2012	9:30:02 AM	Helium valve closed
1/23/2012	9:30:02 AM	H2 valve closed
1/23/2012	9:30:02 AM	BCl3 valve closed
1/23/2012	9:30:02 AM	PH3 valve closed
1/23/2012	9:30:02 AM	SiCl4 pre valve closed
1/23/2012	9:30:02 AM	SiCl4 post valve closed
1/23/2012	9:30:02 AM	Bypass valve closed
1/23/2012	9:30:02 AM	Bubbler valve closed
1/23/2012	9:30:02 AM	Main Vac valve opened
1/23/2012	9:30:02 AM	Helium MFC set to  0.000000
1/23/2012	9:30:02 AM	H2 MFC set to  0.000000
1/23/2012	9:30:02 AM	BCl3 MFC set to  0.000000
1/23/2012	9:30:02 AM	PH3 MFC set to  0.000000
1/23/2012	9:30:02 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:30:02 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:30:02 AM	Tube furnace set to 150
1/23/2012	9:30:33 AM	H2 valve closed
1/23/2012	9:30:33 AM	BCl3 valve closed
1/23/2012	9:30:33 AM	PH3 valve closed
1/23/2012	9:30:33 AM	SiCl4 pre valve closed
1/23/2012	9:30:33 AM	SiCl4 post valve closed
1/23/2012	9:30:33 AM	Bypass valve closed
1/23/2012	9:30:33 AM	Bubbler valve closed
1/23/2012	9:30:33 AM	Helium valve opened
1/23/2012	9:30:33 AM	Main Vac valve opened
1/23/2012	9:30:33 AM	Helium MFC set to  20.000000
1/23/2012	9:30:33 AM	H2 MFC set to  0.000000
1/23/2012	9:30:33 AM	BCl3 MFC set to  0.000000
1/23/2012	9:30:33 AM	PH3 MFC set to  0.000000
1/23/2012	9:30:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:30:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:30:33 AM	Tube furnace set to 150
1/23/2012	9:31:03 AM	Helium valve closed
1/23/2012	9:31:03 AM	H2 valve closed
1/23/2012	9:31:03 AM	BCl3 valve closed
1/23/2012	9:31:03 AM	PH3 valve closed
1/23/2012	9:31:03 AM	SiCl4 pre valve closed
1/23/2012	9:31:03 AM	SiCl4 post valve closed
1/23/2012	9:31:03 AM	Bypass valve closed
1/23/2012	9:31:03 AM	Bubbler valve closed
1/23/2012	9:31:03 AM	Main Vac valve opened
1/23/2012	9:31:03 AM	Helium MFC set to  0.000000
1/23/2012	9:31:03 AM	H2 MFC set to  0.000000
1/23/2012	9:31:03 AM	BCl3 MFC set to  0.000000
1/23/2012	9:31:03 AM	PH3 MFC set to  0.000000
1/23/2012	9:31:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:31:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:31:03 AM	Tube furnace set to 150
1/23/2012	9:31:33 AM	H2 valve closed
1/23/2012	9:31:33 AM	BCl3 valve closed
1/23/2012	9:31:33 AM	PH3 valve closed
1/23/2012	9:31:33 AM	SiCl4 pre valve closed
1/23/2012	9:31:33 AM	SiCl4 post valve closed
1/23/2012	9:31:33 AM	Bypass valve closed
1/23/2012	9:31:33 AM	Bubbler valve closed
1/23/2012	9:31:33 AM	Helium valve opened
1/23/2012	9:31:33 AM	Main Vac valve opened
1/23/2012	9:31:33 AM	Helium MFC set to  20.000000
1/23/2012	9:31:33 AM	H2 MFC set to  0.000000
1/23/2012	9:31:33 AM	BCl3 MFC set to  0.000000
1/23/2012	9:31:33 AM	PH3 MFC set to  0.000000
1/23/2012	9:31:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:31:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:31:33 AM	Tube furnace set to 150
1/23/2012	9:32:03 AM	Helium valve closed
1/23/2012	9:32:03 AM	H2 valve closed
1/23/2012	9:32:03 AM	BCl3 valve closed
1/23/2012	9:32:03 AM	PH3 valve closed
1/23/2012	9:32:03 AM	SiCl4 pre valve closed
1/23/2012	9:32:03 AM	SiCl4 post valve closed
1/23/2012	9:32:03 AM	Bypass valve closed
1/23/2012	9:32:03 AM	Bubbler valve closed
1/23/2012	9:32:03 AM	Main Vac valve opened
1/23/2012	9:32:03 AM	Helium MFC set to  0.000000
1/23/2012	9:32:03 AM	H2 MFC set to  0.000000
1/23/2012	9:32:03 AM	BCl3 MFC set to  0.000000
1/23/2012	9:32:03 AM	PH3 MFC set to  0.000000
1/23/2012	9:32:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:32:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:32:03 AM	Tube furnace set to 150
1/23/2012	9:32:33 AM	H2 valve closed
1/23/2012	9:32:33 AM	BCl3 valve closed
1/23/2012	9:32:33 AM	PH3 valve closed
1/23/2012	9:32:33 AM	SiCl4 pre valve closed
1/23/2012	9:32:33 AM	SiCl4 post valve closed
1/23/2012	9:32:33 AM	Bypass valve closed
1/23/2012	9:32:33 AM	Bubbler valve closed
1/23/2012	9:32:33 AM	Helium valve opened
1/23/2012	9:32:33 AM	Main Vac valve opened
1/23/2012	9:32:33 AM	Helium MFC set to  20.000000
1/23/2012	9:32:33 AM	H2 MFC set to  0.000000
1/23/2012	9:32:33 AM	BCl3 MFC set to  0.000000
1/23/2012	9:32:33 AM	PH3 MFC set to  0.000000
1/23/2012	9:32:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:32:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:32:34 AM	Tube furnace set to 150
1/23/2012	9:33:04 AM	Helium valve closed
1/23/2012	9:33:04 AM	H2 valve closed
1/23/2012	9:33:04 AM	BCl3 valve closed
1/23/2012	9:33:04 AM	PH3 valve closed
1/23/2012	9:33:04 AM	SiCl4 pre valve closed
1/23/2012	9:33:04 AM	SiCl4 post valve closed
1/23/2012	9:33:04 AM	Bypass valve closed
1/23/2012	9:33:04 AM	Bubbler valve closed
1/23/2012	9:33:04 AM	Main Vac valve opened
1/23/2012	9:33:04 AM	Helium MFC set to  0.000000
1/23/2012	9:33:04 AM	H2 MFC set to  0.000000
1/23/2012	9:33:04 AM	BCl3 MFC set to  0.000000
1/23/2012	9:33:04 AM	PH3 MFC set to  0.000000
1/23/2012	9:33:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:33:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:33:04 AM	Tube furnace set to 150
1/23/2012	9:33:34 AM	H2 valve closed
1/23/2012	9:33:34 AM	BCl3 valve closed
1/23/2012	9:33:34 AM	PH3 valve closed
1/23/2012	9:33:34 AM	SiCl4 pre valve closed
1/23/2012	9:33:34 AM	SiCl4 post valve closed
1/23/2012	9:33:34 AM	Bypass valve closed
1/23/2012	9:33:34 AM	Bubbler valve closed
1/23/2012	9:33:34 AM	Helium valve opened
1/23/2012	9:33:34 AM	Main Vac valve opened
1/23/2012	9:33:34 AM	Helium MFC set to  20.000000
1/23/2012	9:33:34 AM	H2 MFC set to  0.000000
1/23/2012	9:33:34 AM	BCl3 MFC set to  0.000000
1/23/2012	9:33:34 AM	PH3 MFC set to  0.000000
1/23/2012	9:33:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:33:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:33:34 AM	Tube furnace set to 150
1/23/2012	9:34:04 AM	Helium valve closed
1/23/2012	9:34:04 AM	H2 valve closed
1/23/2012	9:34:04 AM	BCl3 valve closed
1/23/2012	9:34:04 AM	PH3 valve closed
1/23/2012	9:34:04 AM	SiCl4 pre valve closed
1/23/2012	9:34:04 AM	SiCl4 post valve closed
1/23/2012	9:34:04 AM	Bypass valve closed
1/23/2012	9:34:04 AM	Bubbler valve closed
1/23/2012	9:34:04 AM	Main Vac valve opened
1/23/2012	9:34:04 AM	Helium MFC set to  0.000000
1/23/2012	9:34:04 AM	H2 MFC set to  0.000000
1/23/2012	9:34:04 AM	BCl3 MFC set to  0.000000
1/23/2012	9:34:04 AM	PH3 MFC set to  0.000000
1/23/2012	9:34:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:34:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:34:04 AM	Tube furnace set to 150
1/23/2012	9:34:34 AM	H2 valve closed
1/23/2012	9:34:34 AM	BCl3 valve closed
1/23/2012	9:34:34 AM	PH3 valve closed
1/23/2012	9:34:34 AM	SiCl4 pre valve closed
1/23/2012	9:34:34 AM	SiCl4 post valve closed
1/23/2012	9:34:34 AM	Bypass valve closed
1/23/2012	9:34:34 AM	Bubbler valve closed
1/23/2012	9:34:34 AM	Helium valve opened
1/23/2012	9:34:34 AM	Main Vac valve opened
1/23/2012	9:34:34 AM	Helium MFC set to  20.000000
1/23/2012	9:34:34 AM	H2 MFC set to  0.000000
1/23/2012	9:34:34 AM	BCl3 MFC set to  0.000000
1/23/2012	9:34:34 AM	PH3 MFC set to  0.000000
1/23/2012	9:34:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:34:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:34:34 AM	Tube furnace set to 150
1/23/2012	9:35:04 AM	Helium valve closed
1/23/2012	9:35:04 AM	H2 valve closed
1/23/2012	9:35:04 AM	BCl3 valve closed
1/23/2012	9:35:04 AM	PH3 valve closed
1/23/2012	9:35:04 AM	SiCl4 pre valve closed
1/23/2012	9:35:04 AM	SiCl4 post valve closed
1/23/2012	9:35:04 AM	Bypass valve closed
1/23/2012	9:35:04 AM	Bubbler valve closed
1/23/2012	9:35:04 AM	Main Vac valve opened
1/23/2012	9:35:04 AM	Helium MFC set to  0.000000
1/23/2012	9:35:04 AM	H2 MFC set to  0.000000
1/23/2012	9:35:04 AM	BCl3 MFC set to  0.000000
1/23/2012	9:35:04 AM	PH3 MFC set to  0.000000
1/23/2012	9:35:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:35:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:35:05 AM	Tube furnace set to 150
1/23/2012	9:35:35 AM	H2 valve closed
1/23/2012	9:35:35 AM	BCl3 valve closed
1/23/2012	9:35:35 AM	PH3 valve closed
1/23/2012	9:35:35 AM	SiCl4 pre valve closed
1/23/2012	9:35:35 AM	SiCl4 post valve closed
1/23/2012	9:35:35 AM	Bypass valve closed
1/23/2012	9:35:35 AM	Bubbler valve closed
1/23/2012	9:35:35 AM	Helium valve opened
1/23/2012	9:35:35 AM	Main Vac valve opened
1/23/2012	9:35:35 AM	Helium MFC set to  20.000000
1/23/2012	9:35:35 AM	H2 MFC set to  0.000000
1/23/2012	9:35:35 AM	BCl3 MFC set to  0.000000
1/23/2012	9:35:35 AM	PH3 MFC set to  0.000000
1/23/2012	9:35:35 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:35:35 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:35:35 AM	Tube furnace set to 150
1/23/2012	9:36:05 AM	Helium valve closed
1/23/2012	9:36:05 AM	H2 valve closed
1/23/2012	9:36:05 AM	BCl3 valve closed
1/23/2012	9:36:05 AM	PH3 valve closed
1/23/2012	9:36:05 AM	SiCl4 pre valve closed
1/23/2012	9:36:05 AM	SiCl4 post valve closed
1/23/2012	9:36:05 AM	Bypass valve closed
1/23/2012	9:36:05 AM	Bubbler valve closed
1/23/2012	9:36:05 AM	Main Vac valve opened
1/23/2012	9:36:05 AM	Helium MFC set to  0.000000
1/23/2012	9:36:05 AM	H2 MFC set to  0.000000
1/23/2012	9:36:05 AM	BCl3 MFC set to  0.000000
1/23/2012	9:36:05 AM	PH3 MFC set to  0.000000
1/23/2012	9:36:05 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:36:05 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:36:05 AM	Tube furnace set to 150
1/23/2012	9:36:35 AM	H2 valve closed
1/23/2012	9:36:35 AM	BCl3 valve closed
1/23/2012	9:36:35 AM	PH3 valve closed
1/23/2012	9:36:35 AM	SiCl4 pre valve closed
1/23/2012	9:36:35 AM	SiCl4 post valve closed
1/23/2012	9:36:35 AM	Bypass valve closed
1/23/2012	9:36:35 AM	Bubbler valve closed
1/23/2012	9:36:35 AM	Helium valve opened
1/23/2012	9:36:35 AM	Main Vac valve opened
1/23/2012	9:36:35 AM	Helium MFC set to  20.000000
1/23/2012	9:36:35 AM	H2 MFC set to  0.000000
1/23/2012	9:36:35 AM	BCl3 MFC set to  0.000000
1/23/2012	9:36:35 AM	PH3 MFC set to  0.000000
1/23/2012	9:36:35 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:36:35 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:36:35 AM	Tube furnace set to 150
1/23/2012	9:37:05 AM	Helium valve closed
1/23/2012	9:37:05 AM	H2 valve closed
1/23/2012	9:37:05 AM	BCl3 valve closed
1/23/2012	9:37:05 AM	PH3 valve closed
1/23/2012	9:37:05 AM	SiCl4 pre valve closed
1/23/2012	9:37:05 AM	SiCl4 post valve closed
1/23/2012	9:37:05 AM	Bypass valve closed
1/23/2012	9:37:05 AM	Bubbler valve closed
1/23/2012	9:37:05 AM	Main Vac valve opened
1/23/2012	9:37:05 AM	Helium MFC set to  0.000000
1/23/2012	9:37:05 AM	H2 MFC set to  0.000000
1/23/2012	9:37:05 AM	BCl3 MFC set to  0.000000
1/23/2012	9:37:05 AM	PH3 MFC set to  0.000000
1/23/2012	9:37:05 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:37:05 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:37:05 AM	Tube furnace set to 150
1/23/2012	9:37:35 AM	H2 valve closed
1/23/2012	9:37:35 AM	BCl3 valve closed
1/23/2012	9:37:35 AM	PH3 valve closed
1/23/2012	9:37:35 AM	SiCl4 pre valve closed
1/23/2012	9:37:35 AM	SiCl4 post valve closed
1/23/2012	9:37:35 AM	Bypass valve closed
1/23/2012	9:37:35 AM	Bubbler valve closed
1/23/2012	9:37:35 AM	Helium valve opened
1/23/2012	9:37:35 AM	Main Vac valve opened
1/23/2012	9:37:35 AM	Helium MFC set to  20.000000
1/23/2012	9:37:35 AM	H2 MFC set to  0.000000
1/23/2012	9:37:35 AM	BCl3 MFC set to  0.000000
1/23/2012	9:37:35 AM	PH3 MFC set to  0.000000
1/23/2012	9:37:35 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:37:35 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:37:36 AM	Tube furnace set to 150
1/23/2012	9:38:06 AM	Helium valve closed
1/23/2012	9:38:06 AM	H2 valve closed
1/23/2012	9:38:06 AM	BCl3 valve closed
1/23/2012	9:38:06 AM	PH3 valve closed
1/23/2012	9:38:06 AM	SiCl4 pre valve closed
1/23/2012	9:38:06 AM	SiCl4 post valve closed
1/23/2012	9:38:06 AM	Bypass valve closed
1/23/2012	9:38:06 AM	Bubbler valve closed
1/23/2012	9:38:06 AM	Main Vac valve opened
1/23/2012	9:38:06 AM	Helium MFC set to  0.000000
1/23/2012	9:38:06 AM	H2 MFC set to  0.000000
1/23/2012	9:38:06 AM	BCl3 MFC set to  0.000000
1/23/2012	9:38:06 AM	PH3 MFC set to  0.000000
1/23/2012	9:38:06 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:38:06 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:38:06 AM	Tube furnace set to 150
1/23/2012	9:38:36 AM	H2 valve closed
1/23/2012	9:38:36 AM	BCl3 valve closed
1/23/2012	9:38:36 AM	PH3 valve closed
1/23/2012	9:38:36 AM	SiCl4 pre valve closed
1/23/2012	9:38:36 AM	SiCl4 post valve closed
1/23/2012	9:38:36 AM	Bypass valve closed
1/23/2012	9:38:36 AM	Bubbler valve closed
1/23/2012	9:38:36 AM	Helium valve opened
1/23/2012	9:38:36 AM	Main Vac valve opened
1/23/2012	9:38:36 AM	Helium MFC set to  20.000000
1/23/2012	9:38:36 AM	H2 MFC set to  0.000000
1/23/2012	9:38:36 AM	BCl3 MFC set to  0.000000
1/23/2012	9:38:36 AM	PH3 MFC set to  0.000000
1/23/2012	9:38:36 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:38:36 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:38:36 AM	Tube furnace set to 150
1/23/2012	9:39:06 AM	Helium valve closed
1/23/2012	9:39:06 AM	H2 valve closed
1/23/2012	9:39:06 AM	BCl3 valve closed
1/23/2012	9:39:06 AM	PH3 valve closed
1/23/2012	9:39:06 AM	SiCl4 pre valve closed
1/23/2012	9:39:06 AM	SiCl4 post valve closed
1/23/2012	9:39:06 AM	Bypass valve closed
1/23/2012	9:39:06 AM	Bubbler valve closed
1/23/2012	9:39:06 AM	Main Vac valve opened
1/23/2012	9:39:06 AM	Helium MFC set to  0.000000
1/23/2012	9:39:06 AM	H2 MFC set to  0.000000
1/23/2012	9:39:06 AM	BCl3 MFC set to  0.000000
1/23/2012	9:39:06 AM	PH3 MFC set to  0.000000
1/23/2012	9:39:06 AM	SiCl4 MFC set to  0.000000
1/23/2012	9:39:06 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	9:39:06 AM	Tube furnace set to 150
1/23/2012	9:39:07 AM	Run finished at 9:39 AM
1/23/2012	10:04:01 AM	Tube furnace set to 0
1/23/2012	10:04:14 AM	Main Vac valve closed
1/23/2012	10:04:19 AM	Main Vac valve opened
1/23/2012	10:05:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	10:05:09 AM	Recipe started at 10:05 AM
1/23/2012	10:05:09 AM	Helium valve closed
1/23/2012	10:05:09 AM	H2 valve closed
1/23/2012	10:05:09 AM	BCl3 valve closed
1/23/2012	10:05:09 AM	PH3 valve closed
1/23/2012	10:05:09 AM	SiCl4 pre valve closed
1/23/2012	10:05:09 AM	SiCl4 post valve closed
1/23/2012	10:05:09 AM	Main Vac valve closed
1/23/2012	10:05:09 AM	Bypass valve closed
1/23/2012	10:05:09 AM	Bubbler valve closed
1/23/2012	10:05:09 AM	Helium MFC set to  0.000000
1/23/2012	10:05:09 AM	H2 MFC set to  0.000000
1/23/2012	10:05:09 AM	BCl3 MFC set to  0.000000
1/23/2012	10:05:09 AM	PH3 MFC set to  0.000000
1/23/2012	10:05:09 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:05:09 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:05:09 AM	Tube furnace set to 0
1/23/2012	10:05:12 AM	H2 valve closed
1/23/2012	10:05:12 AM	BCl3 valve closed
1/23/2012	10:05:12 AM	PH3 valve closed
1/23/2012	10:05:12 AM	SiCl4 pre valve closed
1/23/2012	10:05:12 AM	SiCl4 post valve closed
1/23/2012	10:05:12 AM	Main Vac valve closed
1/23/2012	10:05:12 AM	Bypass valve closed
1/23/2012	10:05:12 AM	Bubbler valve closed
1/23/2012	10:05:12 AM	Helium valve opened
1/23/2012	10:05:12 AM	Helium MFC set to  500.000000
1/23/2012	10:05:12 AM	H2 MFC set to  0.000000
1/23/2012	10:05:12 AM	BCl3 MFC set to  0.000000
1/23/2012	10:05:12 AM	PH3 MFC set to  0.000000
1/23/2012	10:05:12 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:05:12 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:05:12 AM	Tube furnace set to 0
1/23/2012	10:06:14 AM	Helium valve closed
1/23/2012	10:06:14 AM	H2 valve closed
1/23/2012	10:06:14 AM	BCl3 valve closed
1/23/2012	10:06:14 AM	PH3 valve closed
1/23/2012	10:06:14 AM	SiCl4 pre valve closed
1/23/2012	10:06:14 AM	SiCl4 post valve closed
1/23/2012	10:06:14 AM	Main Vac valve closed
1/23/2012	10:06:14 AM	Bypass valve closed
1/23/2012	10:06:14 AM	Bubbler valve closed
1/23/2012	10:06:14 AM	Helium MFC set to  0.000000
1/23/2012	10:06:14 AM	H2 MFC set to  0.000000
1/23/2012	10:06:14 AM	BCl3 MFC set to  0.000000
1/23/2012	10:06:14 AM	PH3 MFC set to  0.000000
1/23/2012	10:06:14 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:06:14 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:06:14 AM	Tube furnace set to 0
1/23/2012	10:06:15 AM	Run finished at 10:06 AM
1/23/2012	10:06:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	10:12:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	10:12:58 AM	Recipe started at 10:12 AM
1/23/2012	10:12:58 AM	Helium valve closed
1/23/2012	10:12:58 AM	H2 valve closed
1/23/2012	10:12:58 AM	BCl3 valve closed
1/23/2012	10:12:58 AM	PH3 valve closed
1/23/2012	10:12:58 AM	SiCl4 pre valve closed
1/23/2012	10:12:58 AM	SiCl4 post valve closed
1/23/2012	10:12:58 AM	Main Vac valve closed
1/23/2012	10:12:58 AM	Bubbler valve closed
1/23/2012	10:12:58 AM	Bypass valve opened
1/23/2012	10:12:58 AM	Helium MFC set to  0.000000
1/23/2012	10:12:58 AM	H2 MFC set to  0.000000
1/23/2012	10:12:58 AM	BCl3 MFC set to  0.000000
1/23/2012	10:12:58 AM	PH3 MFC set to  0.000000
1/23/2012	10:12:58 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:12:58 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:12:59 AM	Tube furnace set to 0
1/23/2012	10:14:00 AM	Helium valve closed
1/23/2012	10:14:00 AM	H2 valve closed
1/23/2012	10:14:00 AM	BCl3 valve closed
1/23/2012	10:14:00 AM	PH3 valve closed
1/23/2012	10:14:00 AM	SiCl4 pre valve closed
1/23/2012	10:14:00 AM	SiCl4 post valve closed
1/23/2012	10:14:00 AM	Main Vac valve closed
1/23/2012	10:14:00 AM	Bubbler valve closed
1/23/2012	10:14:00 AM	Bypass valve opened
1/23/2012	10:14:00 AM	Helium MFC set to  0.000000
1/23/2012	10:14:00 AM	H2 MFC set to  0.000000
1/23/2012	10:14:00 AM	BCl3 MFC set to  0.000000
1/23/2012	10:14:00 AM	PH3 MFC set to  0.000000
1/23/2012	10:14:00 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:14:00 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:14:00 AM	Tube furnace set to 0
1/23/2012	10:15:00 AM	Helium valve closed
1/23/2012	10:15:01 AM	H2 valve closed
1/23/2012	10:15:01 AM	BCl3 valve closed
1/23/2012	10:15:01 AM	PH3 valve closed
1/23/2012	10:15:01 AM	SiCl4 pre valve closed
1/23/2012	10:15:01 AM	SiCl4 post valve closed
1/23/2012	10:15:01 AM	Bypass valve closed
1/23/2012	10:15:01 AM	Bubbler valve closed
1/23/2012	10:15:01 AM	Main Vac valve opened
1/23/2012	10:15:01 AM	Helium MFC set to  0.000000
1/23/2012	10:15:01 AM	H2 MFC set to  0.000000
1/23/2012	10:15:01 AM	BCl3 MFC set to  0.000000
1/23/2012	10:15:01 AM	PH3 MFC set to  0.000000
1/23/2012	10:15:01 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:15:01 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:15:01 AM	Tube furnace set to 0
1/23/2012	10:15:02 AM	Run finished at 10:15 AM
1/23/2012	10:15:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	10:28:30 AM	Recipe started at 10:28 AM
1/23/2012	10:28:30 AM	Helium valve closed
1/23/2012	10:28:30 AM	H2 valve closed
1/23/2012	10:28:30 AM	BCl3 valve closed
1/23/2012	10:28:30 AM	PH3 valve closed
1/23/2012	10:28:30 AM	SiCl4 pre valve closed
1/23/2012	10:28:30 AM	SiCl4 post valve closed
1/23/2012	10:28:30 AM	Bypass valve closed
1/23/2012	10:28:30 AM	Bubbler valve closed
1/23/2012	10:28:30 AM	Main Vac valve opened
1/23/2012	10:28:30 AM	Helium MFC set to  0.000000
1/23/2012	10:28:30 AM	H2 MFC set to  0.000000
1/23/2012	10:28:30 AM	BCl3 MFC set to  0.000000
1/23/2012	10:28:30 AM	PH3 MFC set to  0.000000
1/23/2012	10:28:30 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:28:30 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:28:30 AM	Tube furnace set to 150
1/23/2012	10:29:00 AM	H2 valve closed
1/23/2012	10:29:00 AM	BCl3 valve closed
1/23/2012	10:29:00 AM	PH3 valve closed
1/23/2012	10:29:00 AM	SiCl4 pre valve closed
1/23/2012	10:29:00 AM	SiCl4 post valve closed
1/23/2012	10:29:00 AM	Bypass valve closed
1/23/2012	10:29:00 AM	Bubbler valve closed
1/23/2012	10:29:00 AM	Helium valve opened
1/23/2012	10:29:00 AM	Main Vac valve opened
1/23/2012	10:29:00 AM	Helium MFC set to  20.000000
1/23/2012	10:29:00 AM	H2 MFC set to  0.000000
1/23/2012	10:29:00 AM	BCl3 MFC set to  0.000000
1/23/2012	10:29:00 AM	PH3 MFC set to  0.000000
1/23/2012	10:29:00 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:29:00 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:29:01 AM	Tube furnace set to 150
1/23/2012	10:29:31 AM	Helium valve closed
1/23/2012	10:29:31 AM	H2 valve closed
1/23/2012	10:29:31 AM	BCl3 valve closed
1/23/2012	10:29:31 AM	PH3 valve closed
1/23/2012	10:29:31 AM	SiCl4 pre valve closed
1/23/2012	10:29:31 AM	SiCl4 post valve closed
1/23/2012	10:29:31 AM	Bypass valve closed
1/23/2012	10:29:31 AM	Bubbler valve closed
1/23/2012	10:29:31 AM	Main Vac valve opened
1/23/2012	10:29:31 AM	Helium MFC set to  0.000000
1/23/2012	10:29:31 AM	H2 MFC set to  0.000000
1/23/2012	10:29:31 AM	BCl3 MFC set to  0.000000
1/23/2012	10:29:31 AM	PH3 MFC set to  0.000000
1/23/2012	10:29:31 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:29:31 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:29:31 AM	Tube furnace set to 150
1/23/2012	10:30:01 AM	H2 valve closed
1/23/2012	10:30:01 AM	BCl3 valve closed
1/23/2012	10:30:01 AM	PH3 valve closed
1/23/2012	10:30:01 AM	SiCl4 pre valve closed
1/23/2012	10:30:01 AM	SiCl4 post valve closed
1/23/2012	10:30:01 AM	Bypass valve closed
1/23/2012	10:30:01 AM	Bubbler valve closed
1/23/2012	10:30:01 AM	Helium valve opened
1/23/2012	10:30:01 AM	Main Vac valve opened
1/23/2012	10:30:01 AM	Helium MFC set to  20.000000
1/23/2012	10:30:01 AM	H2 MFC set to  0.000000
1/23/2012	10:30:01 AM	BCl3 MFC set to  0.000000
1/23/2012	10:30:01 AM	PH3 MFC set to  0.000000
1/23/2012	10:30:01 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:30:01 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:30:01 AM	Tube furnace set to 150
1/23/2012	10:30:31 AM	Helium valve closed
1/23/2012	10:30:31 AM	H2 valve closed
1/23/2012	10:30:31 AM	BCl3 valve closed
1/23/2012	10:30:31 AM	PH3 valve closed
1/23/2012	10:30:31 AM	SiCl4 pre valve closed
1/23/2012	10:30:31 AM	SiCl4 post valve closed
1/23/2012	10:30:31 AM	Bypass valve closed
1/23/2012	10:30:31 AM	Bubbler valve closed
1/23/2012	10:30:31 AM	Main Vac valve opened
1/23/2012	10:30:31 AM	Helium MFC set to  0.000000
1/23/2012	10:30:31 AM	H2 MFC set to  0.000000
1/23/2012	10:30:31 AM	BCl3 MFC set to  0.000000
1/23/2012	10:30:31 AM	PH3 MFC set to  0.000000
1/23/2012	10:30:31 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:30:31 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:30:31 AM	Tube furnace set to 150
1/23/2012	10:31:01 AM	H2 valve closed
1/23/2012	10:31:01 AM	BCl3 valve closed
1/23/2012	10:31:01 AM	PH3 valve closed
1/23/2012	10:31:01 AM	SiCl4 pre valve closed
1/23/2012	10:31:01 AM	SiCl4 post valve closed
1/23/2012	10:31:01 AM	Bypass valve closed
1/23/2012	10:31:01 AM	Bubbler valve closed
1/23/2012	10:31:01 AM	Helium valve opened
1/23/2012	10:31:01 AM	Main Vac valve opened
1/23/2012	10:31:01 AM	Helium MFC set to  20.000000
1/23/2012	10:31:01 AM	H2 MFC set to  0.000000
1/23/2012	10:31:01 AM	BCl3 MFC set to  0.000000
1/23/2012	10:31:01 AM	PH3 MFC set to  0.000000
1/23/2012	10:31:01 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:31:01 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:31:01 AM	Tube furnace set to 150
1/23/2012	10:31:31 AM	Helium valve closed
1/23/2012	10:31:31 AM	H2 valve closed
1/23/2012	10:31:31 AM	BCl3 valve closed
1/23/2012	10:31:31 AM	PH3 valve closed
1/23/2012	10:31:31 AM	SiCl4 pre valve closed
1/23/2012	10:31:31 AM	SiCl4 post valve closed
1/23/2012	10:31:31 AM	Bypass valve closed
1/23/2012	10:31:31 AM	Bubbler valve closed
1/23/2012	10:31:31 AM	Main Vac valve opened
1/23/2012	10:31:31 AM	Helium MFC set to  0.000000
1/23/2012	10:31:31 AM	H2 MFC set to  0.000000
1/23/2012	10:31:31 AM	BCl3 MFC set to  0.000000
1/23/2012	10:31:31 AM	PH3 MFC set to  0.000000
1/23/2012	10:31:31 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:31:31 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:31:32 AM	Tube furnace set to 150
1/23/2012	10:32:02 AM	H2 valve closed
1/23/2012	10:32:02 AM	BCl3 valve closed
1/23/2012	10:32:02 AM	PH3 valve closed
1/23/2012	10:32:02 AM	SiCl4 pre valve closed
1/23/2012	10:32:02 AM	SiCl4 post valve closed
1/23/2012	10:32:02 AM	Bypass valve closed
1/23/2012	10:32:02 AM	Bubbler valve closed
1/23/2012	10:32:02 AM	Helium valve opened
1/23/2012	10:32:02 AM	Main Vac valve opened
1/23/2012	10:32:02 AM	Helium MFC set to  20.000000
1/23/2012	10:32:02 AM	H2 MFC set to  0.000000
1/23/2012	10:32:02 AM	BCl3 MFC set to  0.000000
1/23/2012	10:32:02 AM	PH3 MFC set to  0.000000
1/23/2012	10:32:02 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:32:02 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:32:02 AM	Tube furnace set to 150
1/23/2012	10:32:32 AM	Helium valve closed
1/23/2012	10:32:32 AM	H2 valve closed
1/23/2012	10:32:32 AM	BCl3 valve closed
1/23/2012	10:32:32 AM	PH3 valve closed
1/23/2012	10:32:32 AM	SiCl4 pre valve closed
1/23/2012	10:32:32 AM	SiCl4 post valve closed
1/23/2012	10:32:32 AM	Bypass valve closed
1/23/2012	10:32:32 AM	Bubbler valve closed
1/23/2012	10:32:32 AM	Main Vac valve opened
1/23/2012	10:32:32 AM	Helium MFC set to  0.000000
1/23/2012	10:32:32 AM	H2 MFC set to  0.000000
1/23/2012	10:32:32 AM	BCl3 MFC set to  0.000000
1/23/2012	10:32:32 AM	PH3 MFC set to  0.000000
1/23/2012	10:32:32 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:32:32 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:32:32 AM	Tube furnace set to 150
1/23/2012	10:33:02 AM	H2 valve closed
1/23/2012	10:33:02 AM	BCl3 valve closed
1/23/2012	10:33:02 AM	PH3 valve closed
1/23/2012	10:33:02 AM	SiCl4 pre valve closed
1/23/2012	10:33:02 AM	SiCl4 post valve closed
1/23/2012	10:33:02 AM	Bypass valve closed
1/23/2012	10:33:02 AM	Bubbler valve closed
1/23/2012	10:33:02 AM	Helium valve opened
1/23/2012	10:33:02 AM	Main Vac valve opened
1/23/2012	10:33:02 AM	Helium MFC set to  20.000000
1/23/2012	10:33:02 AM	H2 MFC set to  0.000000
1/23/2012	10:33:02 AM	BCl3 MFC set to  0.000000
1/23/2012	10:33:02 AM	PH3 MFC set to  0.000000
1/23/2012	10:33:02 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:33:02 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:33:02 AM	Tube furnace set to 150
1/23/2012	10:33:32 AM	Helium valve closed
1/23/2012	10:33:32 AM	H2 valve closed
1/23/2012	10:33:32 AM	BCl3 valve closed
1/23/2012	10:33:32 AM	PH3 valve closed
1/23/2012	10:33:32 AM	SiCl4 pre valve closed
1/23/2012	10:33:32 AM	SiCl4 post valve closed
1/23/2012	10:33:32 AM	Bypass valve closed
1/23/2012	10:33:32 AM	Bubbler valve closed
1/23/2012	10:33:32 AM	Main Vac valve opened
1/23/2012	10:33:32 AM	Helium MFC set to  0.000000
1/23/2012	10:33:32 AM	H2 MFC set to  0.000000
1/23/2012	10:33:32 AM	BCl3 MFC set to  0.000000
1/23/2012	10:33:32 AM	PH3 MFC set to  0.000000
1/23/2012	10:33:32 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:33:32 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:33:32 AM	Tube furnace set to 150
1/23/2012	10:34:02 AM	H2 valve closed
1/23/2012	10:34:02 AM	BCl3 valve closed
1/23/2012	10:34:02 AM	PH3 valve closed
1/23/2012	10:34:02 AM	SiCl4 pre valve closed
1/23/2012	10:34:02 AM	SiCl4 post valve closed
1/23/2012	10:34:02 AM	Bypass valve closed
1/23/2012	10:34:02 AM	Bubbler valve closed
1/23/2012	10:34:02 AM	Helium valve opened
1/23/2012	10:34:02 AM	Main Vac valve opened
1/23/2012	10:34:02 AM	Helium MFC set to  20.000000
1/23/2012	10:34:02 AM	H2 MFC set to  0.000000
1/23/2012	10:34:02 AM	BCl3 MFC set to  0.000000
1/23/2012	10:34:02 AM	PH3 MFC set to  0.000000
1/23/2012	10:34:02 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:34:02 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:34:03 AM	Tube furnace set to 150
1/23/2012	10:34:33 AM	Helium valve closed
1/23/2012	10:34:33 AM	H2 valve closed
1/23/2012	10:34:33 AM	BCl3 valve closed
1/23/2012	10:34:33 AM	PH3 valve closed
1/23/2012	10:34:33 AM	SiCl4 pre valve closed
1/23/2012	10:34:33 AM	SiCl4 post valve closed
1/23/2012	10:34:33 AM	Bypass valve closed
1/23/2012	10:34:33 AM	Bubbler valve closed
1/23/2012	10:34:33 AM	Main Vac valve opened
1/23/2012	10:34:33 AM	Helium MFC set to  0.000000
1/23/2012	10:34:33 AM	H2 MFC set to  0.000000
1/23/2012	10:34:33 AM	BCl3 MFC set to  0.000000
1/23/2012	10:34:33 AM	PH3 MFC set to  0.000000
1/23/2012	10:34:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:34:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:34:33 AM	Tube furnace set to 150
1/23/2012	10:35:03 AM	H2 valve closed
1/23/2012	10:35:03 AM	BCl3 valve closed
1/23/2012	10:35:03 AM	PH3 valve closed
1/23/2012	10:35:03 AM	SiCl4 pre valve closed
1/23/2012	10:35:03 AM	SiCl4 post valve closed
1/23/2012	10:35:03 AM	Bypass valve closed
1/23/2012	10:35:03 AM	Bubbler valve closed
1/23/2012	10:35:03 AM	Helium valve opened
1/23/2012	10:35:03 AM	Main Vac valve opened
1/23/2012	10:35:03 AM	Helium MFC set to  20.000000
1/23/2012	10:35:03 AM	H2 MFC set to  0.000000
1/23/2012	10:35:03 AM	BCl3 MFC set to  0.000000
1/23/2012	10:35:03 AM	PH3 MFC set to  0.000000
1/23/2012	10:35:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:35:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:35:03 AM	Tube furnace set to 150
1/23/2012	10:35:33 AM	Helium valve closed
1/23/2012	10:35:33 AM	H2 valve closed
1/23/2012	10:35:33 AM	BCl3 valve closed
1/23/2012	10:35:33 AM	PH3 valve closed
1/23/2012	10:35:33 AM	SiCl4 pre valve closed
1/23/2012	10:35:33 AM	SiCl4 post valve closed
1/23/2012	10:35:33 AM	Bypass valve closed
1/23/2012	10:35:33 AM	Bubbler valve closed
1/23/2012	10:35:33 AM	Main Vac valve opened
1/23/2012	10:35:33 AM	Helium MFC set to  0.000000
1/23/2012	10:35:33 AM	H2 MFC set to  0.000000
1/23/2012	10:35:33 AM	BCl3 MFC set to  0.000000
1/23/2012	10:35:33 AM	PH3 MFC set to  0.000000
1/23/2012	10:35:33 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:35:33 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:35:33 AM	Tube furnace set to 150
1/23/2012	10:36:03 AM	H2 valve closed
1/23/2012	10:36:03 AM	BCl3 valve closed
1/23/2012	10:36:03 AM	PH3 valve closed
1/23/2012	10:36:03 AM	SiCl4 pre valve closed
1/23/2012	10:36:03 AM	SiCl4 post valve closed
1/23/2012	10:36:03 AM	Bypass valve closed
1/23/2012	10:36:03 AM	Bubbler valve closed
1/23/2012	10:36:03 AM	Helium valve opened
1/23/2012	10:36:03 AM	Main Vac valve opened
1/23/2012	10:36:03 AM	Helium MFC set to  20.000000
1/23/2012	10:36:03 AM	H2 MFC set to  0.000000
1/23/2012	10:36:03 AM	BCl3 MFC set to  0.000000
1/23/2012	10:36:03 AM	PH3 MFC set to  0.000000
1/23/2012	10:36:03 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:36:03 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:36:03 AM	Tube furnace set to 150
1/23/2012	10:36:33 AM	Helium valve closed
1/23/2012	10:36:33 AM	H2 valve closed
1/23/2012	10:36:33 AM	BCl3 valve closed
1/23/2012	10:36:33 AM	PH3 valve closed
1/23/2012	10:36:33 AM	SiCl4 pre valve closed
1/23/2012	10:36:33 AM	SiCl4 post valve closed
1/23/2012	10:36:33 AM	Bypass valve closed
1/23/2012	10:36:33 AM	Bubbler valve closed
1/23/2012	10:36:33 AM	Main Vac valve opened
1/23/2012	10:36:33 AM	Helium MFC set to  0.000000
1/23/2012	10:36:33 AM	H2 MFC set to  0.000000
1/23/2012	10:36:33 AM	BCl3 MFC set to  0.000000
1/23/2012	10:36:34 AM	PH3 MFC set to  0.000000
1/23/2012	10:36:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:36:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:36:34 AM	Tube furnace set to 150
1/23/2012	10:37:04 AM	H2 valve closed
1/23/2012	10:37:04 AM	BCl3 valve closed
1/23/2012	10:37:04 AM	PH3 valve closed
1/23/2012	10:37:04 AM	SiCl4 pre valve closed
1/23/2012	10:37:04 AM	SiCl4 post valve closed
1/23/2012	10:37:04 AM	Bypass valve closed
1/23/2012	10:37:04 AM	Bubbler valve closed
1/23/2012	10:37:04 AM	Helium valve opened
1/23/2012	10:37:04 AM	Main Vac valve opened
1/23/2012	10:37:04 AM	Helium MFC set to  20.000000
1/23/2012	10:37:04 AM	H2 MFC set to  0.000000
1/23/2012	10:37:04 AM	BCl3 MFC set to  0.000000
1/23/2012	10:37:04 AM	PH3 MFC set to  0.000000
1/23/2012	10:37:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:37:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:37:04 AM	Tube furnace set to 150
1/23/2012	10:37:34 AM	Helium valve closed
1/23/2012	10:37:34 AM	H2 valve closed
1/23/2012	10:37:34 AM	BCl3 valve closed
1/23/2012	10:37:34 AM	PH3 valve closed
1/23/2012	10:37:34 AM	SiCl4 pre valve closed
1/23/2012	10:37:34 AM	SiCl4 post valve closed
1/23/2012	10:37:34 AM	Bypass valve closed
1/23/2012	10:37:34 AM	Bubbler valve closed
1/23/2012	10:37:34 AM	Main Vac valve opened
1/23/2012	10:37:34 AM	Helium MFC set to  0.000000
1/23/2012	10:37:34 AM	H2 MFC set to  0.000000
1/23/2012	10:37:34 AM	BCl3 MFC set to  0.000000
1/23/2012	10:37:34 AM	PH3 MFC set to  0.000000
1/23/2012	10:37:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:37:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:37:34 AM	Tube furnace set to 150
1/23/2012	10:38:04 AM	H2 valve closed
1/23/2012	10:38:04 AM	BCl3 valve closed
1/23/2012	10:38:04 AM	PH3 valve closed
1/23/2012	10:38:04 AM	SiCl4 pre valve closed
1/23/2012	10:38:04 AM	SiCl4 post valve closed
1/23/2012	10:38:04 AM	Bypass valve closed
1/23/2012	10:38:04 AM	Bubbler valve closed
1/23/2012	10:38:04 AM	Helium valve opened
1/23/2012	10:38:04 AM	Main Vac valve opened
1/23/2012	10:38:04 AM	Helium MFC set to  20.000000
1/23/2012	10:38:04 AM	H2 MFC set to  0.000000
1/23/2012	10:38:04 AM	BCl3 MFC set to  0.000000
1/23/2012	10:38:04 AM	PH3 MFC set to  0.000000
1/23/2012	10:38:04 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:38:04 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:38:04 AM	Tube furnace set to 150
1/23/2012	10:38:34 AM	Helium valve closed
1/23/2012	10:38:34 AM	H2 valve closed
1/23/2012	10:38:34 AM	BCl3 valve closed
1/23/2012	10:38:34 AM	PH3 valve closed
1/23/2012	10:38:34 AM	SiCl4 pre valve closed
1/23/2012	10:38:34 AM	SiCl4 post valve closed
1/23/2012	10:38:34 AM	Bypass valve closed
1/23/2012	10:38:34 AM	Bubbler valve closed
1/23/2012	10:38:34 AM	Main Vac valve opened
1/23/2012	10:38:34 AM	Helium MFC set to  0.000000
1/23/2012	10:38:34 AM	H2 MFC set to  0.000000
1/23/2012	10:38:34 AM	BCl3 MFC set to  0.000000
1/23/2012	10:38:34 AM	PH3 MFC set to  0.000000
1/23/2012	10:38:34 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:38:34 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:38:34 AM	Tube furnace set to 150
1/23/2012	10:38:35 AM	Run finished at 10:38 AM
1/23/2012	10:48:52 AM	Recipe started at 10:48 AM
1/23/2012	10:48:52 AM	Helium valve closed
1/23/2012	10:48:52 AM	H2 valve closed
1/23/2012	10:48:52 AM	BCl3 valve closed
1/23/2012	10:48:52 AM	PH3 valve closed
1/23/2012	10:48:52 AM	SiCl4 pre valve closed
1/23/2012	10:48:52 AM	SiCl4 post valve closed
1/23/2012	10:48:52 AM	Bypass valve closed
1/23/2012	10:48:52 AM	Bubbler valve closed
1/23/2012	10:48:52 AM	Main Vac valve opened
1/23/2012	10:48:52 AM	Helium MFC set to  0.000000
1/23/2012	10:48:52 AM	H2 MFC set to  0.000000
1/23/2012	10:48:52 AM	BCl3 MFC set to  0.000000
1/23/2012	10:48:52 AM	PH3 MFC set to  0.000000
1/23/2012	10:48:52 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:48:52 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:48:53 AM	Tube furnace set to 150
1/23/2012	10:49:23 AM	H2 valve closed
1/23/2012	10:49:23 AM	BCl3 valve closed
1/23/2012	10:49:23 AM	PH3 valve closed
1/23/2012	10:49:23 AM	SiCl4 pre valve closed
1/23/2012	10:49:23 AM	SiCl4 post valve closed
1/23/2012	10:49:23 AM	Bypass valve closed
1/23/2012	10:49:23 AM	Bubbler valve closed
1/23/2012	10:49:23 AM	Helium valve opened
1/23/2012	10:49:23 AM	Main Vac valve opened
1/23/2012	10:49:23 AM	Helium MFC set to  20.000000
1/23/2012	10:49:23 AM	H2 MFC set to  0.000000
1/23/2012	10:49:23 AM	BCl3 MFC set to  0.000000
1/23/2012	10:49:23 AM	PH3 MFC set to  0.000000
1/23/2012	10:49:23 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:49:23 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:49:23 AM	Tube furnace set to 150
1/23/2012	10:49:53 AM	Helium valve closed
1/23/2012	10:49:53 AM	H2 valve closed
1/23/2012	10:49:53 AM	BCl3 valve closed
1/23/2012	10:49:53 AM	PH3 valve closed
1/23/2012	10:49:53 AM	SiCl4 pre valve closed
1/23/2012	10:49:53 AM	SiCl4 post valve closed
1/23/2012	10:49:53 AM	Bypass valve closed
1/23/2012	10:49:53 AM	Bubbler valve closed
1/23/2012	10:49:53 AM	Main Vac valve opened
1/23/2012	10:49:53 AM	Helium MFC set to  0.000000
1/23/2012	10:49:53 AM	H2 MFC set to  0.000000
1/23/2012	10:49:53 AM	BCl3 MFC set to  0.000000
1/23/2012	10:49:53 AM	PH3 MFC set to  0.000000
1/23/2012	10:49:53 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:49:53 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:49:53 AM	Tube furnace set to 150
1/23/2012	10:50:23 AM	H2 valve closed
1/23/2012	10:50:23 AM	BCl3 valve closed
1/23/2012	10:50:23 AM	PH3 valve closed
1/23/2012	10:50:23 AM	SiCl4 pre valve closed
1/23/2012	10:50:23 AM	SiCl4 post valve closed
1/23/2012	10:50:23 AM	Bypass valve closed
1/23/2012	10:50:23 AM	Bubbler valve closed
1/23/2012	10:50:23 AM	Helium valve opened
1/23/2012	10:50:23 AM	Main Vac valve opened
1/23/2012	10:50:23 AM	Helium MFC set to  20.000000
1/23/2012	10:50:23 AM	H2 MFC set to  0.000000
1/23/2012	10:50:23 AM	BCl3 MFC set to  0.000000
1/23/2012	10:50:23 AM	PH3 MFC set to  0.000000
1/23/2012	10:50:23 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:50:23 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:50:23 AM	Tube furnace set to 150
1/23/2012	10:50:53 AM	Helium valve closed
1/23/2012	10:50:53 AM	H2 valve closed
1/23/2012	10:50:53 AM	BCl3 valve closed
1/23/2012	10:50:53 AM	PH3 valve closed
1/23/2012	10:50:53 AM	SiCl4 pre valve closed
1/23/2012	10:50:53 AM	SiCl4 post valve closed
1/23/2012	10:50:53 AM	Bypass valve closed
1/23/2012	10:50:53 AM	Bubbler valve closed
1/23/2012	10:50:53 AM	Main Vac valve opened
1/23/2012	10:50:53 AM	Helium MFC set to  0.000000
1/23/2012	10:50:53 AM	H2 MFC set to  0.000000
1/23/2012	10:50:53 AM	BCl3 MFC set to  0.000000
1/23/2012	10:50:53 AM	PH3 MFC set to  0.000000
1/23/2012	10:50:53 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:50:53 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:50:53 AM	Tube furnace set to 150
1/23/2012	10:51:23 AM	H2 valve closed
1/23/2012	10:51:23 AM	BCl3 valve closed
1/23/2012	10:51:23 AM	PH3 valve closed
1/23/2012	10:51:23 AM	SiCl4 pre valve closed
1/23/2012	10:51:23 AM	SiCl4 post valve closed
1/23/2012	10:51:23 AM	Bypass valve closed
1/23/2012	10:51:23 AM	Bubbler valve closed
1/23/2012	10:51:23 AM	Helium valve opened
1/23/2012	10:51:23 AM	Main Vac valve opened
1/23/2012	10:51:23 AM	Helium MFC set to  20.000000
1/23/2012	10:51:23 AM	H2 MFC set to  0.000000
1/23/2012	10:51:23 AM	BCl3 MFC set to  0.000000
1/23/2012	10:51:23 AM	PH3 MFC set to  0.000000
1/23/2012	10:51:23 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:51:23 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:51:24 AM	Tube furnace set to 150
1/23/2012	10:51:54 AM	Helium valve closed
1/23/2012	10:51:54 AM	H2 valve closed
1/23/2012	10:51:54 AM	BCl3 valve closed
1/23/2012	10:51:54 AM	PH3 valve closed
1/23/2012	10:51:54 AM	SiCl4 pre valve closed
1/23/2012	10:51:54 AM	SiCl4 post valve closed
1/23/2012	10:51:54 AM	Bypass valve closed
1/23/2012	10:51:54 AM	Bubbler valve closed
1/23/2012	10:51:54 AM	Main Vac valve opened
1/23/2012	10:51:54 AM	Helium MFC set to  0.000000
1/23/2012	10:51:54 AM	H2 MFC set to  0.000000
1/23/2012	10:51:54 AM	BCl3 MFC set to  0.000000
1/23/2012	10:51:54 AM	PH3 MFC set to  0.000000
1/23/2012	10:51:54 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:51:54 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:51:54 AM	Tube furnace set to 150
1/23/2012	10:52:24 AM	H2 valve closed
1/23/2012	10:52:24 AM	BCl3 valve closed
1/23/2012	10:52:24 AM	PH3 valve closed
1/23/2012	10:52:24 AM	SiCl4 pre valve closed
1/23/2012	10:52:24 AM	SiCl4 post valve closed
1/23/2012	10:52:24 AM	Bypass valve closed
1/23/2012	10:52:24 AM	Bubbler valve closed
1/23/2012	10:52:24 AM	Helium valve opened
1/23/2012	10:52:24 AM	Main Vac valve opened
1/23/2012	10:52:24 AM	Helium MFC set to  20.000000
1/23/2012	10:52:24 AM	H2 MFC set to  0.000000
1/23/2012	10:52:24 AM	BCl3 MFC set to  0.000000
1/23/2012	10:52:24 AM	PH3 MFC set to  0.000000
1/23/2012	10:52:24 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:52:24 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:52:24 AM	Tube furnace set to 150
1/23/2012	10:52:54 AM	Helium valve closed
1/23/2012	10:52:54 AM	H2 valve closed
1/23/2012	10:52:54 AM	BCl3 valve closed
1/23/2012	10:52:54 AM	PH3 valve closed
1/23/2012	10:52:54 AM	SiCl4 pre valve closed
1/23/2012	10:52:54 AM	SiCl4 post valve closed
1/23/2012	10:52:54 AM	Bypass valve closed
1/23/2012	10:52:54 AM	Bubbler valve closed
1/23/2012	10:52:54 AM	Main Vac valve opened
1/23/2012	10:52:54 AM	Helium MFC set to  0.000000
1/23/2012	10:52:54 AM	H2 MFC set to  0.000000
1/23/2012	10:52:54 AM	BCl3 MFC set to  0.000000
1/23/2012	10:52:54 AM	PH3 MFC set to  0.000000
1/23/2012	10:52:54 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:52:54 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:52:54 AM	Tube furnace set to 150
1/23/2012	10:53:24 AM	H2 valve closed
1/23/2012	10:53:24 AM	BCl3 valve closed
1/23/2012	10:53:24 AM	PH3 valve closed
1/23/2012	10:53:24 AM	SiCl4 pre valve closed
1/23/2012	10:53:24 AM	SiCl4 post valve closed
1/23/2012	10:53:24 AM	Bypass valve closed
1/23/2012	10:53:24 AM	Bubbler valve closed
1/23/2012	10:53:24 AM	Helium valve opened
1/23/2012	10:53:24 AM	Main Vac valve opened
1/23/2012	10:53:24 AM	Helium MFC set to  20.000000
1/23/2012	10:53:24 AM	H2 MFC set to  0.000000
1/23/2012	10:53:24 AM	BCl3 MFC set to  0.000000
1/23/2012	10:53:24 AM	PH3 MFC set to  0.000000
1/23/2012	10:53:24 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:53:24 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:53:24 AM	Tube furnace set to 150
1/23/2012	10:53:54 AM	Helium valve closed
1/23/2012	10:53:54 AM	H2 valve closed
1/23/2012	10:53:54 AM	BCl3 valve closed
1/23/2012	10:53:54 AM	PH3 valve closed
1/23/2012	10:53:54 AM	SiCl4 pre valve closed
1/23/2012	10:53:54 AM	SiCl4 post valve closed
1/23/2012	10:53:54 AM	Bypass valve closed
1/23/2012	10:53:54 AM	Bubbler valve closed
1/23/2012	10:53:54 AM	Main Vac valve opened
1/23/2012	10:53:54 AM	Helium MFC set to  0.000000
1/23/2012	10:53:54 AM	H2 MFC set to  0.000000
1/23/2012	10:53:54 AM	BCl3 MFC set to  0.000000
1/23/2012	10:53:54 AM	PH3 MFC set to  0.000000
1/23/2012	10:53:54 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:53:54 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:53:55 AM	Tube furnace set to 150
1/23/2012	10:54:25 AM	H2 valve closed
1/23/2012	10:54:25 AM	BCl3 valve closed
1/23/2012	10:54:25 AM	PH3 valve closed
1/23/2012	10:54:25 AM	SiCl4 pre valve closed
1/23/2012	10:54:25 AM	SiCl4 post valve closed
1/23/2012	10:54:25 AM	Bypass valve closed
1/23/2012	10:54:25 AM	Bubbler valve closed
1/23/2012	10:54:25 AM	Helium valve opened
1/23/2012	10:54:25 AM	Main Vac valve opened
1/23/2012	10:54:25 AM	Helium MFC set to  20.000000
1/23/2012	10:54:25 AM	H2 MFC set to  0.000000
1/23/2012	10:54:25 AM	BCl3 MFC set to  0.000000
1/23/2012	10:54:25 AM	PH3 MFC set to  0.000000
1/23/2012	10:54:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:54:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:54:25 AM	Tube furnace set to 150
1/23/2012	10:54:55 AM	Helium valve closed
1/23/2012	10:54:55 AM	H2 valve closed
1/23/2012	10:54:55 AM	BCl3 valve closed
1/23/2012	10:54:55 AM	PH3 valve closed
1/23/2012	10:54:55 AM	SiCl4 pre valve closed
1/23/2012	10:54:55 AM	SiCl4 post valve closed
1/23/2012	10:54:55 AM	Bypass valve closed
1/23/2012	10:54:55 AM	Bubbler valve closed
1/23/2012	10:54:55 AM	Main Vac valve opened
1/23/2012	10:54:55 AM	Helium MFC set to  0.000000
1/23/2012	10:54:55 AM	H2 MFC set to  0.000000
1/23/2012	10:54:55 AM	BCl3 MFC set to  0.000000
1/23/2012	10:54:55 AM	PH3 MFC set to  0.000000
1/23/2012	10:54:55 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:54:55 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:54:55 AM	Tube furnace set to 150
1/23/2012	10:55:25 AM	H2 valve closed
1/23/2012	10:55:25 AM	BCl3 valve closed
1/23/2012	10:55:25 AM	PH3 valve closed
1/23/2012	10:55:25 AM	SiCl4 pre valve closed
1/23/2012	10:55:25 AM	SiCl4 post valve closed
1/23/2012	10:55:25 AM	Bypass valve closed
1/23/2012	10:55:25 AM	Bubbler valve closed
1/23/2012	10:55:25 AM	Helium valve opened
1/23/2012	10:55:25 AM	Main Vac valve opened
1/23/2012	10:55:25 AM	Helium MFC set to  20.000000
1/23/2012	10:55:25 AM	H2 MFC set to  0.000000
1/23/2012	10:55:25 AM	BCl3 MFC set to  0.000000
1/23/2012	10:55:25 AM	PH3 MFC set to  0.000000
1/23/2012	10:55:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:55:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:55:25 AM	Tube furnace set to 150
1/23/2012	10:55:55 AM	Helium valve closed
1/23/2012	10:55:55 AM	H2 valve closed
1/23/2012	10:55:55 AM	BCl3 valve closed
1/23/2012	10:55:55 AM	PH3 valve closed
1/23/2012	10:55:55 AM	SiCl4 pre valve closed
1/23/2012	10:55:55 AM	SiCl4 post valve closed
1/23/2012	10:55:55 AM	Bypass valve closed
1/23/2012	10:55:55 AM	Bubbler valve closed
1/23/2012	10:55:55 AM	Main Vac valve opened
1/23/2012	10:55:55 AM	Helium MFC set to  0.000000
1/23/2012	10:55:55 AM	H2 MFC set to  0.000000
1/23/2012	10:55:55 AM	BCl3 MFC set to  0.000000
1/23/2012	10:55:55 AM	PH3 MFC set to  0.000000
1/23/2012	10:55:55 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:55:55 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:55:55 AM	Tube furnace set to 150
1/23/2012	10:56:25 AM	H2 valve closed
1/23/2012	10:56:25 AM	BCl3 valve closed
1/23/2012	10:56:25 AM	PH3 valve closed
1/23/2012	10:56:25 AM	SiCl4 pre valve closed
1/23/2012	10:56:25 AM	SiCl4 post valve closed
1/23/2012	10:56:25 AM	Bypass valve closed
1/23/2012	10:56:25 AM	Bubbler valve closed
1/23/2012	10:56:25 AM	Helium valve opened
1/23/2012	10:56:25 AM	Main Vac valve opened
1/23/2012	10:56:25 AM	Helium MFC set to  20.000000
1/23/2012	10:56:25 AM	H2 MFC set to  0.000000
1/23/2012	10:56:25 AM	BCl3 MFC set to  0.000000
1/23/2012	10:56:25 AM	PH3 MFC set to  0.000000
1/23/2012	10:56:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:56:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:56:26 AM	Tube furnace set to 150
1/23/2012	10:56:56 AM	Helium valve closed
1/23/2012	10:56:56 AM	H2 valve closed
1/23/2012	10:56:56 AM	BCl3 valve closed
1/23/2012	10:56:56 AM	PH3 valve closed
1/23/2012	10:56:56 AM	SiCl4 pre valve closed
1/23/2012	10:56:56 AM	SiCl4 post valve closed
1/23/2012	10:56:56 AM	Bypass valve closed
1/23/2012	10:56:56 AM	Bubbler valve closed
1/23/2012	10:56:56 AM	Main Vac valve opened
1/23/2012	10:56:56 AM	Helium MFC set to  0.000000
1/23/2012	10:56:56 AM	H2 MFC set to  0.000000
1/23/2012	10:56:56 AM	BCl3 MFC set to  0.000000
1/23/2012	10:56:56 AM	PH3 MFC set to  0.000000
1/23/2012	10:56:56 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:56:56 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:56:56 AM	Tube furnace set to 150
1/23/2012	10:57:26 AM	H2 valve closed
1/23/2012	10:57:26 AM	BCl3 valve closed
1/23/2012	10:57:26 AM	PH3 valve closed
1/23/2012	10:57:26 AM	SiCl4 pre valve closed
1/23/2012	10:57:26 AM	SiCl4 post valve closed
1/23/2012	10:57:26 AM	Bypass valve closed
1/23/2012	10:57:26 AM	Bubbler valve closed
1/23/2012	10:57:26 AM	Helium valve opened
1/23/2012	10:57:26 AM	Main Vac valve opened
1/23/2012	10:57:26 AM	Helium MFC set to  20.000000
1/23/2012	10:57:26 AM	H2 MFC set to  0.000000
1/23/2012	10:57:26 AM	BCl3 MFC set to  0.000000
1/23/2012	10:57:26 AM	PH3 MFC set to  0.000000
1/23/2012	10:57:26 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:57:26 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:57:26 AM	Tube furnace set to 150
1/23/2012	10:57:56 AM	Helium valve closed
1/23/2012	10:57:56 AM	H2 valve closed
1/23/2012	10:57:56 AM	BCl3 valve closed
1/23/2012	10:57:56 AM	PH3 valve closed
1/23/2012	10:57:56 AM	SiCl4 pre valve closed
1/23/2012	10:57:56 AM	SiCl4 post valve closed
1/23/2012	10:57:56 AM	Bypass valve closed
1/23/2012	10:57:56 AM	Bubbler valve closed
1/23/2012	10:57:56 AM	Main Vac valve opened
1/23/2012	10:57:56 AM	Helium MFC set to  0.000000
1/23/2012	10:57:56 AM	H2 MFC set to  0.000000
1/23/2012	10:57:56 AM	BCl3 MFC set to  0.000000
1/23/2012	10:57:56 AM	PH3 MFC set to  0.000000
1/23/2012	10:57:56 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:57:56 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:57:56 AM	Tube furnace set to 150
1/23/2012	10:58:26 AM	H2 valve closed
1/23/2012	10:58:26 AM	BCl3 valve closed
1/23/2012	10:58:26 AM	PH3 valve closed
1/23/2012	10:58:26 AM	SiCl4 pre valve closed
1/23/2012	10:58:26 AM	SiCl4 post valve closed
1/23/2012	10:58:26 AM	Bypass valve closed
1/23/2012	10:58:26 AM	Bubbler valve closed
1/23/2012	10:58:26 AM	Helium valve opened
1/23/2012	10:58:26 AM	Main Vac valve opened
1/23/2012	10:58:26 AM	Helium MFC set to  20.000000
1/23/2012	10:58:26 AM	H2 MFC set to  0.000000
1/23/2012	10:58:26 AM	BCl3 MFC set to  0.000000
1/23/2012	10:58:26 AM	PH3 MFC set to  0.000000
1/23/2012	10:58:26 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:58:26 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:58:26 AM	Tube furnace set to 150
1/23/2012	10:58:56 AM	Helium valve closed
1/23/2012	10:58:56 AM	H2 valve closed
1/23/2012	10:58:56 AM	BCl3 valve closed
1/23/2012	10:58:56 AM	PH3 valve closed
1/23/2012	10:58:56 AM	SiCl4 pre valve closed
1/23/2012	10:58:56 AM	SiCl4 post valve closed
1/23/2012	10:58:56 AM	Bypass valve closed
1/23/2012	10:58:56 AM	Bubbler valve closed
1/23/2012	10:58:56 AM	Main Vac valve opened
1/23/2012	10:58:56 AM	Helium MFC set to  0.000000
1/23/2012	10:58:56 AM	H2 MFC set to  0.000000
1/23/2012	10:58:56 AM	BCl3 MFC set to  0.000000
1/23/2012	10:58:56 AM	PH3 MFC set to  0.000000
1/23/2012	10:58:56 AM	SiCl4 MFC set to  0.000000
1/23/2012	10:58:56 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	10:58:57 AM	Tube furnace set to 150
1/23/2012	10:58:58 AM	Run finished at 10:58 AM
1/23/2012	11:05:17 AM	Main Vac valve closed
1/23/2012	11:05:27 AM	Main Vac valve opened
1/23/2012	11:05:46 AM	Main Vac valve closed
1/23/2012	11:06:09 AM	Main Vac valve opened
1/23/2012	11:09:16 AM	Recipe started at 11:09 AM
1/23/2012	11:09:16 AM	Helium valve closed
1/23/2012	11:09:16 AM	H2 valve closed
1/23/2012	11:09:16 AM	BCl3 valve closed
1/23/2012	11:09:16 AM	PH3 valve closed
1/23/2012	11:09:16 AM	SiCl4 pre valve closed
1/23/2012	11:09:16 AM	SiCl4 post valve closed
1/23/2012	11:09:16 AM	Main Vac valve closed
1/23/2012	11:09:16 AM	Bypass valve closed
1/23/2012	11:09:16 AM	Bubbler valve closed
1/23/2012	11:09:16 AM	Helium MFC set to  0.000000
1/23/2012	11:09:16 AM	H2 MFC set to  0.000000
1/23/2012	11:09:16 AM	BCl3 MFC set to  0.000000
1/23/2012	11:09:16 AM	PH3 MFC set to  0.000000
1/23/2012	11:09:16 AM	SiCl4 MFC set to  0.000000
1/23/2012	11:09:16 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	11:09:16 AM	Tube furnace set to 0
1/23/2012	11:09:19 AM	Helium valve closed
1/23/2012	11:09:19 AM	BCl3 valve closed
1/23/2012	11:09:19 AM	PH3 valve closed
1/23/2012	11:09:19 AM	SiCl4 pre valve closed
1/23/2012	11:09:19 AM	SiCl4 post valve closed
1/23/2012	11:09:19 AM	Main Vac valve closed
1/23/2012	11:09:19 AM	Bypass valve closed
1/23/2012	11:09:19 AM	Bubbler valve closed
1/23/2012	11:09:19 AM	H2 valve opened
1/23/2012	11:09:19 AM	Helium MFC set to  0.000000
1/23/2012	11:09:19 AM	H2 MFC set to  500.000000
1/23/2012	11:09:19 AM	BCl3 MFC set to  0.000000
1/23/2012	11:09:19 AM	PH3 MFC set to  0.000000
1/23/2012	11:09:19 AM	SiCl4 MFC set to  0.000000
1/23/2012	11:09:19 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	11:09:19 AM	Tube furnace set to 0
1/23/2012	11:10:24 AM	Helium valve closed
1/23/2012	11:10:24 AM	BCl3 valve closed
1/23/2012	11:10:24 AM	PH3 valve closed
1/23/2012	11:10:24 AM	SiCl4 pre valve closed
1/23/2012	11:10:24 AM	SiCl4 post valve closed
1/23/2012	11:10:24 AM	Main Vac valve closed
1/23/2012	11:10:24 AM	Bypass valve closed
1/23/2012	11:10:24 AM	H2 valve opened
1/23/2012	11:10:24 AM	Bubbler valve opened
1/23/2012	11:10:24 AM	Helium MFC set to  0.000000
1/23/2012	11:10:24 AM	H2 MFC set to  500.000000
1/23/2012	11:10:24 AM	BCl3 MFC set to  0.000000
1/23/2012	11:10:24 AM	PH3 MFC set to  0.000000
1/23/2012	11:10:24 AM	SiCl4 MFC set to  0.000000
1/23/2012	11:10:24 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	11:10:24 AM	Tube furnace set to 0
1/23/2012	11:10:25 AM	Helium valve closed
1/23/2012	11:10:25 AM	BCl3 valve closed
1/23/2012	11:10:25 AM	PH3 valve closed
1/23/2012	11:10:25 AM	SiCl4 pre valve closed
1/23/2012	11:10:25 AM	SiCl4 post valve closed
1/23/2012	11:10:25 AM	Main Vac valve closed
1/23/2012	11:10:25 AM	Bypass valve closed
1/23/2012	11:10:25 AM	H2 valve opened
1/23/2012	11:10:25 AM	Bubbler valve opened
1/23/2012	11:10:25 AM	Helium MFC set to  0.000000
1/23/2012	11:10:25 AM	H2 MFC set to  500.000000
1/23/2012	11:10:25 AM	BCl3 MFC set to  0.000000
1/23/2012	11:10:25 AM	PH3 MFC set to  0.000000
1/23/2012	11:10:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	11:10:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	11:10:25 AM	Tube furnace set to 1000
1/23/2012	11:30:25 AM	Helium valve closed
1/23/2012	11:30:25 AM	BCl3 valve closed
1/23/2012	11:30:25 AM	Main Vac valve closed
1/23/2012	11:30:25 AM	Bypass valve closed
1/23/2012	11:30:25 AM	H2 valve opened
1/23/2012	11:30:25 AM	PH3 valve opened
1/23/2012	11:30:25 AM	SiCl4 pre valve opened
1/23/2012	11:30:25 AM	SiCl4 post valve opened
1/23/2012	11:30:25 AM	Bubbler valve opened
1/23/2012	11:30:25 AM	Helium MFC set to  0.000000
1/23/2012	11:30:25 AM	H2 MFC set to  500.000000
1/23/2012	11:30:25 AM	BCl3 MFC set to  0.000000
1/23/2012	11:30:25 AM	PH3 MFC set to  0.300000
1/23/2012	11:30:25 AM	SiCl4 MFC set to  25.000000
1/23/2012	11:30:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	11:30:25 AM	Tube furnace set to 1000
1/23/2012	11:58:25 AM	Helium valve closed
1/23/2012	11:58:25 AM	BCl3 valve closed
1/23/2012	11:58:25 AM	PH3 valve closed
1/23/2012	11:58:25 AM	SiCl4 pre valve closed
1/23/2012	11:58:25 AM	SiCl4 post valve closed
1/23/2012	11:58:25 AM	Main Vac valve closed
1/23/2012	11:58:25 AM	Bypass valve closed
1/23/2012	11:58:25 AM	H2 valve opened
1/23/2012	11:58:25 AM	Bubbler valve opened
1/23/2012	11:58:25 AM	Helium MFC set to  0.000000
1/23/2012	11:58:25 AM	H2 MFC set to  500.000000
1/23/2012	11:58:25 AM	BCl3 MFC set to  0.000000
1/23/2012	11:58:25 AM	PH3 MFC set to  0.000000
1/23/2012	11:58:25 AM	SiCl4 MFC set to  0.000000
1/23/2012	11:58:25 AM	Bypass solenoid MFC set to  0.000000
1/23/2012	11:58:26 AM	Tube furnace set to 750
1/23/2012	12:03:25 PM	H2 valve closed
1/23/2012	12:03:25 PM	BCl3 valve closed
1/23/2012	12:03:25 PM	PH3 valve closed
1/23/2012	12:03:25 PM	SiCl4 pre valve closed
1/23/2012	12:03:25 PM	SiCl4 post valve closed
1/23/2012	12:03:25 PM	Main Vac valve closed
1/23/2012	12:03:25 PM	Bypass valve closed
1/23/2012	12:03:25 PM	Helium valve opened
1/23/2012	12:03:25 PM	Bubbler valve opened
1/23/2012	12:03:25 PM	Helium MFC set to  500.000000
1/23/2012	12:03:25 PM	H2 MFC set to  0.000000
1/23/2012	12:03:25 PM	BCl3 MFC set to  0.000000
1/23/2012	12:03:25 PM	PH3 MFC set to  0.000000
1/23/2012	12:03:25 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:03:25 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:03:26 PM	Tube furnace set to 0
1/23/2012	12:23:26 PM	Helium valve closed
1/23/2012	12:23:26 PM	H2 valve closed
1/23/2012	12:23:26 PM	BCl3 valve closed
1/23/2012	12:23:26 PM	PH3 valve closed
1/23/2012	12:23:26 PM	SiCl4 pre valve closed
1/23/2012	12:23:26 PM	SiCl4 post valve closed
1/23/2012	12:23:26 PM	Main Vac valve closed
1/23/2012	12:23:26 PM	Bypass valve closed
1/23/2012	12:23:26 PM	Bubbler valve closed
1/23/2012	12:23:26 PM	Helium MFC set to  0.000000
1/23/2012	12:23:26 PM	H2 MFC set to  0.000000
1/23/2012	12:23:26 PM	BCl3 MFC set to  0.000000
1/23/2012	12:23:26 PM	PH3 MFC set to  0.000000
1/23/2012	12:23:26 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:23:26 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:23:26 PM	Tube furnace set to 0
1/23/2012	12:23:27 PM	Run finished at 12:23 PM
1/23/2012	12:28:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	12:28:17 PM	Recipe started at 12:28 PM
1/23/2012	12:28:17 PM	Helium valve closed
1/23/2012	12:28:17 PM	H2 valve closed
1/23/2012	12:28:17 PM	BCl3 valve closed
1/23/2012	12:28:17 PM	PH3 valve closed
1/23/2012	12:28:17 PM	SiCl4 pre valve closed
1/23/2012	12:28:17 PM	SiCl4 post valve closed
1/23/2012	12:28:17 PM	Main Vac valve closed
1/23/2012	12:28:17 PM	Bypass valve closed
1/23/2012	12:28:17 PM	Bubbler valve closed
1/23/2012	12:28:17 PM	Helium MFC set to  0.000000
1/23/2012	12:28:17 PM	H2 MFC set to  0.000000
1/23/2012	12:28:17 PM	BCl3 MFC set to  0.000000
1/23/2012	12:28:17 PM	PH3 MFC set to  0.000000
1/23/2012	12:28:17 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:28:17 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:28:18 PM	Tube furnace set to 0
1/23/2012	12:28:21 PM	H2 valve closed
1/23/2012	12:28:21 PM	BCl3 valve closed
1/23/2012	12:28:21 PM	PH3 valve closed
1/23/2012	12:28:21 PM	SiCl4 pre valve closed
1/23/2012	12:28:21 PM	SiCl4 post valve closed
1/23/2012	12:28:21 PM	Main Vac valve closed
1/23/2012	12:28:21 PM	Bypass valve closed
1/23/2012	12:28:21 PM	Bubbler valve closed
1/23/2012	12:28:21 PM	Helium valve opened
1/23/2012	12:28:21 PM	Helium MFC set to  500.000000
1/23/2012	12:28:21 PM	H2 MFC set to  0.000000
1/23/2012	12:28:21 PM	BCl3 MFC set to  0.000000
1/23/2012	12:28:21 PM	PH3 MFC set to  0.000000
1/23/2012	12:28:21 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:28:21 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:28:21 PM	Tube furnace set to 0
1/23/2012	12:28:22 PM	Helium valve closed
1/23/2012	12:28:22 PM	H2 valve closed
1/23/2012	12:28:22 PM	BCl3 valve closed
1/23/2012	12:28:22 PM	PH3 valve closed
1/23/2012	12:28:22 PM	SiCl4 pre valve closed
1/23/2012	12:28:22 PM	SiCl4 post valve closed
1/23/2012	12:28:22 PM	Main Vac valve closed
1/23/2012	12:28:22 PM	Bypass valve closed
1/23/2012	12:28:22 PM	Bubbler valve closed
1/23/2012	12:28:22 PM	Helium MFC set to  0.000000
1/23/2012	12:28:22 PM	H2 MFC set to  0.000000
1/23/2012	12:28:22 PM	BCl3 MFC set to  0.000000
1/23/2012	12:28:22 PM	PH3 MFC set to  0.000000
1/23/2012	12:28:22 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:28:22 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:28:22 PM	Tube furnace set to 0
1/23/2012	12:28:23 PM	Run finished at 12:28 PM
1/23/2012	12:28:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	12:31:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	12:31:33 PM	Recipe started at 12:31 PM
1/23/2012	12:31:33 PM	Helium valve closed
1/23/2012	12:31:33 PM	H2 valve closed
1/23/2012	12:31:33 PM	BCl3 valve closed
1/23/2012	12:31:33 PM	PH3 valve closed
1/23/2012	12:31:33 PM	SiCl4 pre valve closed
1/23/2012	12:31:33 PM	SiCl4 post valve closed
1/23/2012	12:31:33 PM	Main Vac valve closed
1/23/2012	12:31:33 PM	Bubbler valve closed
1/23/2012	12:31:33 PM	Bypass valve opened
1/23/2012	12:31:33 PM	Helium MFC set to  0.000000
1/23/2012	12:31:33 PM	H2 MFC set to  0.000000
1/23/2012	12:31:33 PM	BCl3 MFC set to  0.000000
1/23/2012	12:31:33 PM	PH3 MFC set to  0.000000
1/23/2012	12:31:33 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:31:33 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:31:33 PM	Tube furnace set to 0
1/23/2012	12:32:30 PM	Helium valve closed
1/23/2012	12:32:30 PM	H2 valve closed
1/23/2012	12:32:30 PM	BCl3 valve closed
1/23/2012	12:32:30 PM	PH3 valve closed
1/23/2012	12:32:30 PM	SiCl4 pre valve closed
1/23/2012	12:32:30 PM	SiCl4 post valve closed
1/23/2012	12:32:30 PM	Main Vac valve closed
1/23/2012	12:32:30 PM	Bubbler valve closed
1/23/2012	12:32:30 PM	Bypass valve opened
1/23/2012	12:32:30 PM	Helium MFC set to  0.000000
1/23/2012	12:32:30 PM	H2 MFC set to  0.000000
1/23/2012	12:32:30 PM	BCl3 MFC set to  0.000000
1/23/2012	12:32:30 PM	PH3 MFC set to  0.000000
1/23/2012	12:32:30 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:32:30 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:32:30 PM	Tube furnace set to 0
1/23/2012	12:33:30 PM	Helium valve closed
1/23/2012	12:33:30 PM	H2 valve closed
1/23/2012	12:33:30 PM	BCl3 valve closed
1/23/2012	12:33:30 PM	PH3 valve closed
1/23/2012	12:33:30 PM	SiCl4 pre valve closed
1/23/2012	12:33:30 PM	SiCl4 post valve closed
1/23/2012	12:33:30 PM	Bypass valve closed
1/23/2012	12:33:30 PM	Bubbler valve closed
1/23/2012	12:33:30 PM	Main Vac valve opened
1/23/2012	12:33:30 PM	Helium MFC set to  0.000000
1/23/2012	12:33:30 PM	H2 MFC set to  0.000000
1/23/2012	12:33:30 PM	BCl3 MFC set to  0.000000
1/23/2012	12:33:30 PM	PH3 MFC set to  0.000000
1/23/2012	12:33:30 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:33:30 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:33:30 PM	Tube furnace set to 0
1/23/2012	12:33:31 PM	Run finished at 12:33 PM
1/23/2012	12:33:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	12:48:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/23/2012	12:48:42 PM	Recipe started at 12:48 PM
1/23/2012	12:48:42 PM	Helium valve closed
1/23/2012	12:48:42 PM	H2 valve closed
1/23/2012	12:48:42 PM	BCl3 valve closed
1/23/2012	12:48:42 PM	PH3 valve closed
1/23/2012	12:48:42 PM	SiCl4 pre valve closed
1/23/2012	12:48:42 PM	SiCl4 post valve closed
1/23/2012	12:48:42 PM	Main Vac valve closed
1/23/2012	12:48:42 PM	Bubbler valve closed
1/23/2012	12:48:42 PM	Bypass valve opened
1/23/2012	12:48:42 PM	Helium MFC set to  0.000000
1/23/2012	12:48:42 PM	H2 MFC set to  0.000000
1/23/2012	12:48:42 PM	BCl3 MFC set to  0.000000
1/23/2012	12:48:42 PM	PH3 MFC set to  0.000000
1/23/2012	12:48:42 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:48:42 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:48:43 PM	Tube furnace set to 0
1/23/2012	12:48:43 PM	Helium valve closed
1/23/2012	12:48:43 PM	H2 valve closed
1/23/2012	12:48:43 PM	BCl3 valve closed
1/23/2012	12:48:43 PM	PH3 valve closed
1/23/2012	12:48:43 PM	SiCl4 pre valve closed
1/23/2012	12:48:43 PM	SiCl4 post valve closed
1/23/2012	12:48:43 PM	Main Vac valve closed
1/23/2012	12:48:43 PM	Bubbler valve closed
1/23/2012	12:48:43 PM	Bypass valve opened
1/23/2012	12:48:43 PM	Helium MFC set to  0.000000
1/23/2012	12:48:43 PM	H2 MFC set to  0.000000
1/23/2012	12:48:43 PM	BCl3 MFC set to  0.000000
1/23/2012	12:48:43 PM	PH3 MFC set to  0.000000
1/23/2012	12:48:43 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:48:43 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:48:43 PM	Tube furnace set to 0
1/23/2012	12:48:43 PM	Helium valve closed
1/23/2012	12:48:43 PM	H2 valve closed
1/23/2012	12:48:43 PM	BCl3 valve closed
1/23/2012	12:48:43 PM	PH3 valve closed
1/23/2012	12:48:43 PM	SiCl4 pre valve closed
1/23/2012	12:48:43 PM	SiCl4 post valve closed
1/23/2012	12:48:43 PM	Bypass valve closed
1/23/2012	12:48:43 PM	Bubbler valve closed
1/23/2012	12:48:43 PM	Main Vac valve opened
1/23/2012	12:48:43 PM	Helium MFC set to  0.000000
1/23/2012	12:48:43 PM	H2 MFC set to  0.000000
1/23/2012	12:48:43 PM	BCl3 MFC set to  0.000000
1/23/2012	12:48:43 PM	PH3 MFC set to  0.000000
1/23/2012	12:48:43 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:48:43 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:48:43 PM	Tube furnace set to 0
1/23/2012	12:48:44 PM	H2 valve closed
1/23/2012	12:48:44 PM	BCl3 valve closed
1/23/2012	12:48:44 PM	PH3 valve closed
1/23/2012	12:48:44 PM	SiCl4 pre valve closed
1/23/2012	12:48:44 PM	SiCl4 post valve closed
1/23/2012	12:48:44 PM	Bypass valve closed
1/23/2012	12:48:44 PM	Bubbler valve closed
1/23/2012	12:48:44 PM	Helium valve opened
1/23/2012	12:48:44 PM	Main Vac valve opened
1/23/2012	12:48:44 PM	Helium MFC set to  20.000000
1/23/2012	12:48:44 PM	H2 MFC set to  0.000000
1/23/2012	12:48:44 PM	BCl3 MFC set to  0.000000
1/23/2012	12:48:44 PM	PH3 MFC set to  0.000000
1/23/2012	12:48:44 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:48:44 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:48:44 PM	Tube furnace set to 0
1/23/2012	12:49:14 PM	Helium valve closed
1/23/2012	12:49:14 PM	H2 valve closed
1/23/2012	12:49:14 PM	BCl3 valve closed
1/23/2012	12:49:14 PM	PH3 valve closed
1/23/2012	12:49:14 PM	SiCl4 pre valve closed
1/23/2012	12:49:14 PM	SiCl4 post valve closed
1/23/2012	12:49:14 PM	Bypass valve closed
1/23/2012	12:49:14 PM	Bubbler valve closed
1/23/2012	12:49:14 PM	Main Vac valve opened
1/23/2012	12:49:14 PM	Helium MFC set to  0.000000
1/23/2012	12:49:14 PM	H2 MFC set to  0.000000
1/23/2012	12:49:14 PM	BCl3 MFC set to  0.000000
1/23/2012	12:49:14 PM	PH3 MFC set to  0.000000
1/23/2012	12:49:14 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:49:14 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:49:14 PM	Tube furnace set to 0
1/23/2012	12:49:44 PM	H2 valve closed
1/23/2012	12:49:44 PM	BCl3 valve closed
1/23/2012	12:49:44 PM	PH3 valve closed
1/23/2012	12:49:44 PM	SiCl4 pre valve closed
1/23/2012	12:49:44 PM	SiCl4 post valve closed
1/23/2012	12:49:44 PM	Bypass valve closed
1/23/2012	12:49:44 PM	Bubbler valve closed
1/23/2012	12:49:44 PM	Helium valve opened
1/23/2012	12:49:44 PM	Main Vac valve opened
1/23/2012	12:49:44 PM	Helium MFC set to  20.000000
1/23/2012	12:49:44 PM	H2 MFC set to  0.000000
1/23/2012	12:49:44 PM	BCl3 MFC set to  0.000000
1/23/2012	12:49:44 PM	PH3 MFC set to  0.000000
1/23/2012	12:49:44 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:49:44 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:49:44 PM	Tube furnace set to 0
1/23/2012	12:50:14 PM	Helium valve closed
1/23/2012	12:50:14 PM	H2 valve closed
1/23/2012	12:50:14 PM	BCl3 valve closed
1/23/2012	12:50:14 PM	PH3 valve closed
1/23/2012	12:50:14 PM	SiCl4 pre valve closed
1/23/2012	12:50:14 PM	SiCl4 post valve closed
1/23/2012	12:50:14 PM	Bypass valve closed
1/23/2012	12:50:14 PM	Bubbler valve closed
1/23/2012	12:50:14 PM	Main Vac valve opened
1/23/2012	12:50:14 PM	Helium MFC set to  0.000000
1/23/2012	12:50:14 PM	H2 MFC set to  0.000000
1/23/2012	12:50:14 PM	BCl3 MFC set to  0.000000
1/23/2012	12:50:14 PM	PH3 MFC set to  0.000000
1/23/2012	12:50:14 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:50:14 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:50:15 PM	Tube furnace set to 0
1/23/2012	12:50:45 PM	H2 valve closed
1/23/2012	12:50:45 PM	BCl3 valve closed
1/23/2012	12:50:45 PM	PH3 valve closed
1/23/2012	12:50:45 PM	SiCl4 pre valve closed
1/23/2012	12:50:45 PM	SiCl4 post valve closed
1/23/2012	12:50:45 PM	Bypass valve closed
1/23/2012	12:50:45 PM	Bubbler valve closed
1/23/2012	12:50:45 PM	Helium valve opened
1/23/2012	12:50:45 PM	Main Vac valve opened
1/23/2012	12:50:45 PM	Helium MFC set to  20.000000
1/23/2012	12:50:45 PM	H2 MFC set to  0.000000
1/23/2012	12:50:45 PM	BCl3 MFC set to  0.000000
1/23/2012	12:50:45 PM	PH3 MFC set to  0.000000
1/23/2012	12:50:45 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:50:45 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:50:45 PM	Tube furnace set to 0
1/23/2012	12:51:15 PM	Helium valve closed
1/23/2012	12:51:15 PM	H2 valve closed
1/23/2012	12:51:15 PM	BCl3 valve closed
1/23/2012	12:51:15 PM	PH3 valve closed
1/23/2012	12:51:15 PM	SiCl4 pre valve closed
1/23/2012	12:51:15 PM	SiCl4 post valve closed
1/23/2012	12:51:15 PM	Bypass valve closed
1/23/2012	12:51:15 PM	Bubbler valve closed
1/23/2012	12:51:15 PM	Main Vac valve opened
1/23/2012	12:51:15 PM	Helium MFC set to  0.000000
1/23/2012	12:51:15 PM	H2 MFC set to  0.000000
1/23/2012	12:51:15 PM	BCl3 MFC set to  0.000000
1/23/2012	12:51:15 PM	PH3 MFC set to  0.000000
1/23/2012	12:51:15 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:51:15 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:51:15 PM	Tube furnace set to 0
1/23/2012	12:51:45 PM	H2 valve closed
1/23/2012	12:51:45 PM	BCl3 valve closed
1/23/2012	12:51:45 PM	PH3 valve closed
1/23/2012	12:51:45 PM	SiCl4 pre valve closed
1/23/2012	12:51:45 PM	SiCl4 post valve closed
1/23/2012	12:51:45 PM	Bypass valve closed
1/23/2012	12:51:45 PM	Bubbler valve closed
1/23/2012	12:51:45 PM	Helium valve opened
1/23/2012	12:51:45 PM	Main Vac valve opened
1/23/2012	12:51:45 PM	Helium MFC set to  20.000000
1/23/2012	12:51:45 PM	H2 MFC set to  0.000000
1/23/2012	12:51:45 PM	BCl3 MFC set to  0.000000
1/23/2012	12:51:45 PM	PH3 MFC set to  0.000000
1/23/2012	12:51:45 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:51:45 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:51:45 PM	Tube furnace set to 0
1/23/2012	12:52:15 PM	Helium valve closed
1/23/2012	12:52:15 PM	H2 valve closed
1/23/2012	12:52:15 PM	BCl3 valve closed
1/23/2012	12:52:15 PM	PH3 valve closed
1/23/2012	12:52:15 PM	SiCl4 pre valve closed
1/23/2012	12:52:15 PM	SiCl4 post valve closed
1/23/2012	12:52:15 PM	Bypass valve closed
1/23/2012	12:52:15 PM	Bubbler valve closed
1/23/2012	12:52:15 PM	Main Vac valve opened
1/23/2012	12:52:15 PM	Helium MFC set to  0.000000
1/23/2012	12:52:15 PM	H2 MFC set to  0.000000
1/23/2012	12:52:15 PM	BCl3 MFC set to  0.000000
1/23/2012	12:52:15 PM	PH3 MFC set to  0.000000
1/23/2012	12:52:15 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:52:15 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:52:15 PM	Tube furnace set to 0
1/23/2012	12:52:45 PM	H2 valve closed
1/23/2012	12:52:45 PM	BCl3 valve closed
1/23/2012	12:52:45 PM	PH3 valve closed
1/23/2012	12:52:45 PM	SiCl4 pre valve closed
1/23/2012	12:52:45 PM	SiCl4 post valve closed
1/23/2012	12:52:45 PM	Bypass valve closed
1/23/2012	12:52:45 PM	Bubbler valve closed
1/23/2012	12:52:45 PM	Helium valve opened
1/23/2012	12:52:45 PM	Main Vac valve opened
1/23/2012	12:52:45 PM	Helium MFC set to  20.000000
1/23/2012	12:52:45 PM	H2 MFC set to  0.000000
1/23/2012	12:52:45 PM	BCl3 MFC set to  0.000000
1/23/2012	12:52:45 PM	PH3 MFC set to  0.000000
1/23/2012	12:52:45 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:52:45 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:52:46 PM	Tube furnace set to 0
1/23/2012	12:53:16 PM	Helium valve closed
1/23/2012	12:53:16 PM	H2 valve closed
1/23/2012	12:53:16 PM	BCl3 valve closed
1/23/2012	12:53:16 PM	PH3 valve closed
1/23/2012	12:53:16 PM	SiCl4 pre valve closed
1/23/2012	12:53:16 PM	SiCl4 post valve closed
1/23/2012	12:53:16 PM	Bypass valve closed
1/23/2012	12:53:16 PM	Bubbler valve closed
1/23/2012	12:53:16 PM	Main Vac valve opened
1/23/2012	12:53:16 PM	Helium MFC set to  0.000000
1/23/2012	12:53:16 PM	H2 MFC set to  0.000000
1/23/2012	12:53:16 PM	BCl3 MFC set to  0.000000
1/23/2012	12:53:16 PM	PH3 MFC set to  0.000000
1/23/2012	12:53:16 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:53:16 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:53:16 PM	Tube furnace set to 0
1/23/2012	12:53:46 PM	H2 valve closed
1/23/2012	12:53:46 PM	BCl3 valve closed
1/23/2012	12:53:46 PM	PH3 valve closed
1/23/2012	12:53:46 PM	SiCl4 pre valve closed
1/23/2012	12:53:46 PM	SiCl4 post valve closed
1/23/2012	12:53:46 PM	Bypass valve closed
1/23/2012	12:53:46 PM	Bubbler valve closed
1/23/2012	12:53:46 PM	Helium valve opened
1/23/2012	12:53:46 PM	Main Vac valve opened
1/23/2012	12:53:46 PM	Helium MFC set to  20.000000
1/23/2012	12:53:46 PM	H2 MFC set to  0.000000
1/23/2012	12:53:46 PM	BCl3 MFC set to  0.000000
1/23/2012	12:53:46 PM	PH3 MFC set to  0.000000
1/23/2012	12:53:46 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:53:46 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:53:46 PM	Tube furnace set to 0
1/23/2012	12:54:16 PM	Helium valve closed
1/23/2012	12:54:16 PM	H2 valve closed
1/23/2012	12:54:16 PM	BCl3 valve closed
1/23/2012	12:54:16 PM	PH3 valve closed
1/23/2012	12:54:16 PM	SiCl4 pre valve closed
1/23/2012	12:54:16 PM	SiCl4 post valve closed
1/23/2012	12:54:16 PM	Bypass valve closed
1/23/2012	12:54:16 PM	Bubbler valve closed
1/23/2012	12:54:16 PM	Main Vac valve opened
1/23/2012	12:54:16 PM	Helium MFC set to  0.000000
1/23/2012	12:54:16 PM	H2 MFC set to  0.000000
1/23/2012	12:54:16 PM	BCl3 MFC set to  0.000000
1/23/2012	12:54:16 PM	PH3 MFC set to  0.000000
1/23/2012	12:54:16 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:54:16 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:54:16 PM	Tube furnace set to 0
1/23/2012	12:54:46 PM	H2 valve closed
1/23/2012	12:54:46 PM	BCl3 valve closed
1/23/2012	12:54:46 PM	PH3 valve closed
1/23/2012	12:54:46 PM	SiCl4 pre valve closed
1/23/2012	12:54:46 PM	SiCl4 post valve closed
1/23/2012	12:54:46 PM	Bypass valve closed
1/23/2012	12:54:46 PM	Bubbler valve closed
1/23/2012	12:54:46 PM	Helium valve opened
1/23/2012	12:54:46 PM	Main Vac valve opened
1/23/2012	12:54:46 PM	Helium MFC set to  20.000000
1/23/2012	12:54:46 PM	H2 MFC set to  0.000000
1/23/2012	12:54:46 PM	BCl3 MFC set to  0.000000
1/23/2012	12:54:46 PM	PH3 MFC set to  0.000000
1/23/2012	12:54:46 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:54:46 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:54:46 PM	Tube furnace set to 0
1/23/2012	12:55:16 PM	Helium valve closed
1/23/2012	12:55:16 PM	H2 valve closed
1/23/2012	12:55:16 PM	BCl3 valve closed
1/23/2012	12:55:16 PM	PH3 valve closed
1/23/2012	12:55:16 PM	SiCl4 pre valve closed
1/23/2012	12:55:16 PM	SiCl4 post valve closed
1/23/2012	12:55:16 PM	Bypass valve closed
1/23/2012	12:55:16 PM	Bubbler valve closed
1/23/2012	12:55:16 PM	Main Vac valve opened
1/23/2012	12:55:16 PM	Helium MFC set to  0.000000
1/23/2012	12:55:16 PM	H2 MFC set to  0.000000
1/23/2012	12:55:16 PM	BCl3 MFC set to  0.000000
1/23/2012	12:55:16 PM	PH3 MFC set to  0.000000
1/23/2012	12:55:16 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:55:16 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:55:17 PM	Tube furnace set to 0
1/23/2012	12:55:47 PM	H2 valve closed
1/23/2012	12:55:47 PM	BCl3 valve closed
1/23/2012	12:55:47 PM	PH3 valve closed
1/23/2012	12:55:47 PM	SiCl4 pre valve closed
1/23/2012	12:55:47 PM	SiCl4 post valve closed
1/23/2012	12:55:47 PM	Bypass valve closed
1/23/2012	12:55:47 PM	Bubbler valve closed
1/23/2012	12:55:47 PM	Helium valve opened
1/23/2012	12:55:47 PM	Main Vac valve opened
1/23/2012	12:55:47 PM	Helium MFC set to  20.000000
1/23/2012	12:55:47 PM	H2 MFC set to  0.000000
1/23/2012	12:55:47 PM	BCl3 MFC set to  0.000000
1/23/2012	12:55:47 PM	PH3 MFC set to  0.000000
1/23/2012	12:55:47 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:55:47 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:55:47 PM	Tube furnace set to 0
1/23/2012	12:56:17 PM	Helium valve closed
1/23/2012	12:56:17 PM	H2 valve closed
1/23/2012	12:56:17 PM	BCl3 valve closed
1/23/2012	12:56:17 PM	PH3 valve closed
1/23/2012	12:56:17 PM	SiCl4 pre valve closed
1/23/2012	12:56:17 PM	SiCl4 post valve closed
1/23/2012	12:56:17 PM	Bypass valve closed
1/23/2012	12:56:17 PM	Bubbler valve closed
1/23/2012	12:56:17 PM	Main Vac valve opened
1/23/2012	12:56:17 PM	Helium MFC set to  0.000000
1/23/2012	12:56:17 PM	H2 MFC set to  0.000000
1/23/2012	12:56:17 PM	BCl3 MFC set to  0.000000
1/23/2012	12:56:17 PM	PH3 MFC set to  0.000000
1/23/2012	12:56:17 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:56:17 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:56:17 PM	Tube furnace set to 0
1/23/2012	12:56:47 PM	H2 valve closed
1/23/2012	12:56:47 PM	BCl3 valve closed
1/23/2012	12:56:47 PM	PH3 valve closed
1/23/2012	12:56:47 PM	SiCl4 pre valve closed
1/23/2012	12:56:47 PM	SiCl4 post valve closed
1/23/2012	12:56:47 PM	Bypass valve closed
1/23/2012	12:56:47 PM	Bubbler valve closed
1/23/2012	12:56:47 PM	Helium valve opened
1/23/2012	12:56:47 PM	Main Vac valve opened
1/23/2012	12:56:47 PM	Helium MFC set to  20.000000
1/23/2012	12:56:47 PM	H2 MFC set to  0.000000
1/23/2012	12:56:47 PM	BCl3 MFC set to  0.000000
1/23/2012	12:56:47 PM	PH3 MFC set to  0.000000
1/23/2012	12:56:47 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:56:47 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:56:47 PM	Tube furnace set to 0
1/23/2012	12:57:17 PM	Helium valve closed
1/23/2012	12:57:17 PM	H2 valve closed
1/23/2012	12:57:17 PM	BCl3 valve closed
1/23/2012	12:57:17 PM	PH3 valve closed
1/23/2012	12:57:17 PM	SiCl4 pre valve closed
1/23/2012	12:57:17 PM	SiCl4 post valve closed
1/23/2012	12:57:17 PM	Bypass valve closed
1/23/2012	12:57:17 PM	Bubbler valve closed
1/23/2012	12:57:17 PM	Main Vac valve opened
1/23/2012	12:57:17 PM	Helium MFC set to  0.000000
1/23/2012	12:57:17 PM	H2 MFC set to  0.000000
1/23/2012	12:57:17 PM	BCl3 MFC set to  0.000000
1/23/2012	12:57:17 PM	PH3 MFC set to  0.000000
1/23/2012	12:57:17 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:57:17 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:57:17 PM	Tube furnace set to 0
1/23/2012	12:57:47 PM	H2 valve closed
1/23/2012	12:57:47 PM	BCl3 valve closed
1/23/2012	12:57:47 PM	PH3 valve closed
1/23/2012	12:57:47 PM	SiCl4 pre valve closed
1/23/2012	12:57:47 PM	SiCl4 post valve closed
1/23/2012	12:57:47 PM	Bypass valve closed
1/23/2012	12:57:47 PM	Bubbler valve closed
1/23/2012	12:57:47 PM	Helium valve opened
1/23/2012	12:57:47 PM	Main Vac valve opened
1/23/2012	12:57:47 PM	Helium MFC set to  20.000000
1/23/2012	12:57:47 PM	H2 MFC set to  0.000000
1/23/2012	12:57:47 PM	BCl3 MFC set to  0.000000
1/23/2012	12:57:47 PM	PH3 MFC set to  0.000000
1/23/2012	12:57:47 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:57:47 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:57:48 PM	Tube furnace set to 0
1/23/2012	12:58:18 PM	Helium valve closed
1/23/2012	12:58:18 PM	H2 valve closed
1/23/2012	12:58:18 PM	BCl3 valve closed
1/23/2012	12:58:18 PM	PH3 valve closed
1/23/2012	12:58:18 PM	SiCl4 pre valve closed
1/23/2012	12:58:18 PM	SiCl4 post valve closed
1/23/2012	12:58:18 PM	Bypass valve closed
1/23/2012	12:58:18 PM	Bubbler valve closed
1/23/2012	12:58:18 PM	Main Vac valve opened
1/23/2012	12:58:18 PM	Helium MFC set to  0.000000
1/23/2012	12:58:18 PM	H2 MFC set to  0.000000
1/23/2012	12:58:18 PM	BCl3 MFC set to  0.000000
1/23/2012	12:58:18 PM	PH3 MFC set to  0.000000
1/23/2012	12:58:18 PM	SiCl4 MFC set to  0.000000
1/23/2012	12:58:18 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	12:58:18 PM	Tube furnace set to 0
1/23/2012	12:58:19 PM	Run finished at 12:58 PM
1/23/2012	12:58:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/23/2012	12:59:45 PM	Main Vac valve closed
1/23/2012	12:59:55 PM	Main Vac valve opened
1/23/2012	1:00:24 PM	Recipe started at 1:00 PM
1/23/2012	1:00:24 PM	Helium valve closed
1/23/2012	1:00:24 PM	H2 valve closed
1/23/2012	1:00:24 PM	BCl3 valve closed
1/23/2012	1:00:24 PM	PH3 valve closed
1/23/2012	1:00:24 PM	SiCl4 pre valve closed
1/23/2012	1:00:24 PM	SiCl4 post valve closed
1/23/2012	1:00:24 PM	Bypass valve closed
1/23/2012	1:00:24 PM	Bubbler valve closed
1/23/2012	1:00:24 PM	Main Vac valve opened
1/23/2012	1:00:24 PM	Helium MFC set to  0.000000
1/23/2012	1:00:24 PM	H2 MFC set to  0.000000
1/23/2012	1:00:24 PM	BCl3 MFC set to  0.000000
1/23/2012	1:00:24 PM	PH3 MFC set to  0.000000
1/23/2012	1:00:24 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:00:24 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:00:24 PM	Tube furnace set to 150
1/23/2012	1:00:54 PM	H2 valve closed
1/23/2012	1:00:54 PM	BCl3 valve closed
1/23/2012	1:00:54 PM	PH3 valve closed
1/23/2012	1:00:54 PM	SiCl4 pre valve closed
1/23/2012	1:00:54 PM	SiCl4 post valve closed
1/23/2012	1:00:54 PM	Bypass valve closed
1/23/2012	1:00:54 PM	Bubbler valve closed
1/23/2012	1:00:54 PM	Helium valve opened
1/23/2012	1:00:54 PM	Main Vac valve opened
1/23/2012	1:00:54 PM	Helium MFC set to  20.000000
1/23/2012	1:00:54 PM	H2 MFC set to  0.000000
1/23/2012	1:00:54 PM	BCl3 MFC set to  0.000000
1/23/2012	1:00:54 PM	PH3 MFC set to  0.000000
1/23/2012	1:00:54 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:00:54 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:00:54 PM	Tube furnace set to 150
1/23/2012	1:01:24 PM	Helium valve closed
1/23/2012	1:01:24 PM	H2 valve closed
1/23/2012	1:01:24 PM	BCl3 valve closed
1/23/2012	1:01:24 PM	PH3 valve closed
1/23/2012	1:01:24 PM	SiCl4 pre valve closed
1/23/2012	1:01:24 PM	SiCl4 post valve closed
1/23/2012	1:01:24 PM	Bypass valve closed
1/23/2012	1:01:24 PM	Bubbler valve closed
1/23/2012	1:01:24 PM	Main Vac valve opened
1/23/2012	1:01:24 PM	Helium MFC set to  0.000000
1/23/2012	1:01:24 PM	H2 MFC set to  0.000000
1/23/2012	1:01:24 PM	BCl3 MFC set to  0.000000
1/23/2012	1:01:24 PM	PH3 MFC set to  0.000000
1/23/2012	1:01:24 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:01:24 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:01:24 PM	Tube furnace set to 150
1/23/2012	1:01:54 PM	H2 valve closed
1/23/2012	1:01:54 PM	BCl3 valve closed
1/23/2012	1:01:54 PM	PH3 valve closed
1/23/2012	1:01:54 PM	SiCl4 pre valve closed
1/23/2012	1:01:54 PM	SiCl4 post valve closed
1/23/2012	1:01:54 PM	Bypass valve closed
1/23/2012	1:01:54 PM	Bubbler valve closed
1/23/2012	1:01:54 PM	Helium valve opened
1/23/2012	1:01:54 PM	Main Vac valve opened
1/23/2012	1:01:54 PM	Helium MFC set to  20.000000
1/23/2012	1:01:54 PM	H2 MFC set to  0.000000
1/23/2012	1:01:54 PM	BCl3 MFC set to  0.000000
1/23/2012	1:01:54 PM	PH3 MFC set to  0.000000
1/23/2012	1:01:54 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:01:54 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:01:54 PM	Tube furnace set to 150
1/23/2012	1:02:24 PM	Helium valve closed
1/23/2012	1:02:24 PM	H2 valve closed
1/23/2012	1:02:24 PM	BCl3 valve closed
1/23/2012	1:02:25 PM	PH3 valve closed
1/23/2012	1:02:25 PM	SiCl4 pre valve closed
1/23/2012	1:02:25 PM	SiCl4 post valve closed
1/23/2012	1:02:25 PM	Bypass valve closed
1/23/2012	1:02:25 PM	Bubbler valve closed
1/23/2012	1:02:25 PM	Main Vac valve opened
1/23/2012	1:02:25 PM	Helium MFC set to  0.000000
1/23/2012	1:02:25 PM	H2 MFC set to  0.000000
1/23/2012	1:02:25 PM	BCl3 MFC set to  0.000000
1/23/2012	1:02:25 PM	PH3 MFC set to  0.000000
1/23/2012	1:02:25 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:02:25 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:02:25 PM	Tube furnace set to 150
1/23/2012	1:02:55 PM	H2 valve closed
1/23/2012	1:02:55 PM	BCl3 valve closed
1/23/2012	1:02:55 PM	PH3 valve closed
1/23/2012	1:02:55 PM	SiCl4 pre valve closed
1/23/2012	1:02:55 PM	SiCl4 post valve closed
1/23/2012	1:02:55 PM	Bypass valve closed
1/23/2012	1:02:55 PM	Bubbler valve closed
1/23/2012	1:02:55 PM	Helium valve opened
1/23/2012	1:02:55 PM	Main Vac valve opened
1/23/2012	1:02:55 PM	Helium MFC set to  20.000000
1/23/2012	1:02:55 PM	H2 MFC set to  0.000000
1/23/2012	1:02:55 PM	BCl3 MFC set to  0.000000
1/23/2012	1:02:55 PM	PH3 MFC set to  0.000000
1/23/2012	1:02:55 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:02:55 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:02:55 PM	Tube furnace set to 150
1/23/2012	1:03:25 PM	Helium valve closed
1/23/2012	1:03:25 PM	H2 valve closed
1/23/2012	1:03:25 PM	BCl3 valve closed
1/23/2012	1:03:25 PM	PH3 valve closed
1/23/2012	1:03:25 PM	SiCl4 pre valve closed
1/23/2012	1:03:25 PM	SiCl4 post valve closed
1/23/2012	1:03:25 PM	Bypass valve closed
1/23/2012	1:03:25 PM	Bubbler valve closed
1/23/2012	1:03:25 PM	Main Vac valve opened
1/23/2012	1:03:25 PM	Helium MFC set to  0.000000
1/23/2012	1:03:25 PM	H2 MFC set to  0.000000
1/23/2012	1:03:25 PM	BCl3 MFC set to  0.000000
1/23/2012	1:03:25 PM	PH3 MFC set to  0.000000
1/23/2012	1:03:25 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:03:25 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:03:25 PM	Tube furnace set to 150
1/23/2012	1:03:55 PM	H2 valve closed
1/23/2012	1:03:55 PM	BCl3 valve closed
1/23/2012	1:03:55 PM	PH3 valve closed
1/23/2012	1:03:55 PM	SiCl4 pre valve closed
1/23/2012	1:03:55 PM	SiCl4 post valve closed
1/23/2012	1:03:55 PM	Bypass valve closed
1/23/2012	1:03:55 PM	Bubbler valve closed
1/23/2012	1:03:55 PM	Helium valve opened
1/23/2012	1:03:55 PM	Main Vac valve opened
1/23/2012	1:03:55 PM	Helium MFC set to  20.000000
1/23/2012	1:03:55 PM	H2 MFC set to  0.000000
1/23/2012	1:03:55 PM	BCl3 MFC set to  0.000000
1/23/2012	1:03:55 PM	PH3 MFC set to  0.000000
1/23/2012	1:03:55 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:03:55 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:03:55 PM	Tube furnace set to 150
1/23/2012	1:04:25 PM	Helium valve closed
1/23/2012	1:04:25 PM	H2 valve closed
1/23/2012	1:04:25 PM	BCl3 valve closed
1/23/2012	1:04:25 PM	PH3 valve closed
1/23/2012	1:04:25 PM	SiCl4 pre valve closed
1/23/2012	1:04:25 PM	SiCl4 post valve closed
1/23/2012	1:04:25 PM	Bypass valve closed
1/23/2012	1:04:25 PM	Bubbler valve closed
1/23/2012	1:04:25 PM	Main Vac valve opened
1/23/2012	1:04:25 PM	Helium MFC set to  0.000000
1/23/2012	1:04:25 PM	H2 MFC set to  0.000000
1/23/2012	1:04:25 PM	BCl3 MFC set to  0.000000
1/23/2012	1:04:25 PM	PH3 MFC set to  0.000000
1/23/2012	1:04:25 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:04:25 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:04:25 PM	Tube furnace set to 150
1/23/2012	1:04:56 PM	H2 valve closed
1/23/2012	1:04:56 PM	BCl3 valve closed
1/23/2012	1:04:56 PM	PH3 valve closed
1/23/2012	1:04:56 PM	SiCl4 pre valve closed
1/23/2012	1:04:56 PM	SiCl4 post valve closed
1/23/2012	1:04:56 PM	Bypass valve closed
1/23/2012	1:04:56 PM	Bubbler valve closed
1/23/2012	1:04:56 PM	Helium valve opened
1/23/2012	1:04:56 PM	Main Vac valve opened
1/23/2012	1:04:56 PM	Helium MFC set to  20.000000
1/23/2012	1:04:56 PM	H2 MFC set to  0.000000
1/23/2012	1:04:56 PM	BCl3 MFC set to  0.000000
1/23/2012	1:04:56 PM	PH3 MFC set to  0.000000
1/23/2012	1:04:56 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:04:56 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:04:56 PM	Tube furnace set to 150
1/23/2012	1:05:26 PM	Helium valve closed
1/23/2012	1:05:26 PM	H2 valve closed
1/23/2012	1:05:26 PM	BCl3 valve closed
1/23/2012	1:05:26 PM	PH3 valve closed
1/23/2012	1:05:26 PM	SiCl4 pre valve closed
1/23/2012	1:05:26 PM	SiCl4 post valve closed
1/23/2012	1:05:26 PM	Bypass valve closed
1/23/2012	1:05:26 PM	Bubbler valve closed
1/23/2012	1:05:26 PM	Main Vac valve opened
1/23/2012	1:05:26 PM	Helium MFC set to  0.000000
1/23/2012	1:05:26 PM	H2 MFC set to  0.000000
1/23/2012	1:05:26 PM	BCl3 MFC set to  0.000000
1/23/2012	1:05:26 PM	PH3 MFC set to  0.000000
1/23/2012	1:05:26 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:05:26 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:05:26 PM	Tube furnace set to 150
1/23/2012	1:05:56 PM	H2 valve closed
1/23/2012	1:05:56 PM	BCl3 valve closed
1/23/2012	1:05:56 PM	PH3 valve closed
1/23/2012	1:05:56 PM	SiCl4 pre valve closed
1/23/2012	1:05:56 PM	SiCl4 post valve closed
1/23/2012	1:05:56 PM	Bypass valve closed
1/23/2012	1:05:56 PM	Bubbler valve closed
1/23/2012	1:05:56 PM	Helium valve opened
1/23/2012	1:05:56 PM	Main Vac valve opened
1/23/2012	1:05:56 PM	Helium MFC set to  20.000000
1/23/2012	1:05:56 PM	H2 MFC set to  0.000000
1/23/2012	1:05:56 PM	BCl3 MFC set to  0.000000
1/23/2012	1:05:56 PM	PH3 MFC set to  0.000000
1/23/2012	1:05:56 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:05:56 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:05:56 PM	Tube furnace set to 150
1/23/2012	1:06:26 PM	Helium valve closed
1/23/2012	1:06:26 PM	H2 valve closed
1/23/2012	1:06:26 PM	BCl3 valve closed
1/23/2012	1:06:26 PM	PH3 valve closed
1/23/2012	1:06:26 PM	SiCl4 pre valve closed
1/23/2012	1:06:26 PM	SiCl4 post valve closed
1/23/2012	1:06:26 PM	Bypass valve closed
1/23/2012	1:06:26 PM	Bubbler valve closed
1/23/2012	1:06:26 PM	Main Vac valve opened
1/23/2012	1:06:26 PM	Helium MFC set to  0.000000
1/23/2012	1:06:26 PM	H2 MFC set to  0.000000
1/23/2012	1:06:26 PM	BCl3 MFC set to  0.000000
1/23/2012	1:06:26 PM	PH3 MFC set to  0.000000
1/23/2012	1:06:26 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:06:26 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:06:26 PM	Tube furnace set to 150
1/23/2012	1:06:56 PM	H2 valve closed
1/23/2012	1:06:56 PM	BCl3 valve closed
1/23/2012	1:06:56 PM	PH3 valve closed
1/23/2012	1:06:56 PM	SiCl4 pre valve closed
1/23/2012	1:06:56 PM	SiCl4 post valve closed
1/23/2012	1:06:56 PM	Bypass valve closed
1/23/2012	1:06:56 PM	Bubbler valve closed
1/23/2012	1:06:56 PM	Helium valve opened
1/23/2012	1:06:56 PM	Main Vac valve opened
1/23/2012	1:06:56 PM	Helium MFC set to  20.000000
1/23/2012	1:06:56 PM	H2 MFC set to  0.000000
1/23/2012	1:06:56 PM	BCl3 MFC set to  0.000000
1/23/2012	1:06:56 PM	PH3 MFC set to  0.000000
1/23/2012	1:06:56 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:06:56 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:06:56 PM	Tube furnace set to 150
1/23/2012	1:07:27 PM	Helium valve closed
1/23/2012	1:07:27 PM	H2 valve closed
1/23/2012	1:07:27 PM	BCl3 valve closed
1/23/2012	1:07:27 PM	PH3 valve closed
1/23/2012	1:07:27 PM	SiCl4 pre valve closed
1/23/2012	1:07:27 PM	SiCl4 post valve closed
1/23/2012	1:07:27 PM	Bypass valve closed
1/23/2012	1:07:27 PM	Bubbler valve closed
1/23/2012	1:07:27 PM	Main Vac valve opened
1/23/2012	1:07:27 PM	Helium MFC set to  0.000000
1/23/2012	1:07:27 PM	H2 MFC set to  0.000000
1/23/2012	1:07:27 PM	BCl3 MFC set to  0.000000
1/23/2012	1:07:27 PM	PH3 MFC set to  0.000000
1/23/2012	1:07:27 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:07:27 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:07:27 PM	Tube furnace set to 150
1/23/2012	1:07:57 PM	H2 valve closed
1/23/2012	1:07:57 PM	BCl3 valve closed
1/23/2012	1:07:57 PM	PH3 valve closed
1/23/2012	1:07:57 PM	SiCl4 pre valve closed
1/23/2012	1:07:57 PM	SiCl4 post valve closed
1/23/2012	1:07:57 PM	Bypass valve closed
1/23/2012	1:07:57 PM	Bubbler valve closed
1/23/2012	1:07:57 PM	Helium valve opened
1/23/2012	1:07:57 PM	Main Vac valve opened
1/23/2012	1:07:57 PM	Helium MFC set to  20.000000
1/23/2012	1:07:57 PM	H2 MFC set to  0.000000
1/23/2012	1:07:57 PM	BCl3 MFC set to  0.000000
1/23/2012	1:07:57 PM	PH3 MFC set to  0.000000
1/23/2012	1:07:57 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:07:57 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:07:57 PM	Tube furnace set to 150
1/23/2012	1:08:27 PM	Helium valve closed
1/23/2012	1:08:27 PM	H2 valve closed
1/23/2012	1:08:27 PM	BCl3 valve closed
1/23/2012	1:08:27 PM	PH3 valve closed
1/23/2012	1:08:27 PM	SiCl4 pre valve closed
1/23/2012	1:08:27 PM	SiCl4 post valve closed
1/23/2012	1:08:27 PM	Bypass valve closed
1/23/2012	1:08:27 PM	Bubbler valve closed
1/23/2012	1:08:27 PM	Main Vac valve opened
1/23/2012	1:08:27 PM	Helium MFC set to  0.000000
1/23/2012	1:08:27 PM	H2 MFC set to  0.000000
1/23/2012	1:08:27 PM	BCl3 MFC set to  0.000000
1/23/2012	1:08:27 PM	PH3 MFC set to  0.000000
1/23/2012	1:08:27 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:08:27 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:08:27 PM	Tube furnace set to 150
1/23/2012	1:08:57 PM	H2 valve closed
1/23/2012	1:08:57 PM	BCl3 valve closed
1/23/2012	1:08:57 PM	PH3 valve closed
1/23/2012	1:08:57 PM	SiCl4 pre valve closed
1/23/2012	1:08:57 PM	SiCl4 post valve closed
1/23/2012	1:08:57 PM	Bypass valve closed
1/23/2012	1:08:57 PM	Bubbler valve closed
1/23/2012	1:08:57 PM	Helium valve opened
1/23/2012	1:08:57 PM	Main Vac valve opened
1/23/2012	1:08:57 PM	Helium MFC set to  20.000000
1/23/2012	1:08:57 PM	H2 MFC set to  0.000000
1/23/2012	1:08:57 PM	BCl3 MFC set to  0.000000
1/23/2012	1:08:57 PM	PH3 MFC set to  0.000000
1/23/2012	1:08:57 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:08:57 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:08:57 PM	Tube furnace set to 150
1/23/2012	1:09:27 PM	Helium valve closed
1/23/2012	1:09:27 PM	H2 valve closed
1/23/2012	1:09:27 PM	BCl3 valve closed
1/23/2012	1:09:27 PM	PH3 valve closed
1/23/2012	1:09:27 PM	SiCl4 pre valve closed
1/23/2012	1:09:27 PM	SiCl4 post valve closed
1/23/2012	1:09:27 PM	Bypass valve closed
1/23/2012	1:09:27 PM	Bubbler valve closed
1/23/2012	1:09:27 PM	Main Vac valve opened
1/23/2012	1:09:27 PM	Helium MFC set to  0.000000
1/23/2012	1:09:27 PM	H2 MFC set to  0.000000
1/23/2012	1:09:27 PM	BCl3 MFC set to  0.000000
1/23/2012	1:09:27 PM	PH3 MFC set to  0.000000
1/23/2012	1:09:27 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:09:27 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:09:28 PM	Tube furnace set to 150
1/23/2012	1:09:58 PM	H2 valve closed
1/23/2012	1:09:58 PM	BCl3 valve closed
1/23/2012	1:09:58 PM	PH3 valve closed
1/23/2012	1:09:58 PM	SiCl4 pre valve closed
1/23/2012	1:09:58 PM	SiCl4 post valve closed
1/23/2012	1:09:58 PM	Bypass valve closed
1/23/2012	1:09:58 PM	Bubbler valve closed
1/23/2012	1:09:58 PM	Helium valve opened
1/23/2012	1:09:58 PM	Main Vac valve opened
1/23/2012	1:09:58 PM	Helium MFC set to  20.000000
1/23/2012	1:09:58 PM	H2 MFC set to  0.000000
1/23/2012	1:09:58 PM	BCl3 MFC set to  0.000000
1/23/2012	1:09:58 PM	PH3 MFC set to  0.000000
1/23/2012	1:09:58 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:09:58 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:09:58 PM	Tube furnace set to 150
1/23/2012	1:10:28 PM	Helium valve closed
1/23/2012	1:10:28 PM	H2 valve closed
1/23/2012	1:10:28 PM	BCl3 valve closed
1/23/2012	1:10:28 PM	PH3 valve closed
1/23/2012	1:10:28 PM	SiCl4 pre valve closed
1/23/2012	1:10:28 PM	SiCl4 post valve closed
1/23/2012	1:10:28 PM	Bypass valve closed
1/23/2012	1:10:28 PM	Bubbler valve closed
1/23/2012	1:10:28 PM	Main Vac valve opened
1/23/2012	1:10:28 PM	Helium MFC set to  0.000000
1/23/2012	1:10:28 PM	H2 MFC set to  0.000000
1/23/2012	1:10:28 PM	BCl3 MFC set to  0.000000
1/23/2012	1:10:28 PM	PH3 MFC set to  0.000000
1/23/2012	1:10:28 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:10:28 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:10:28 PM	Tube furnace set to 150
1/23/2012	1:10:29 PM	Run finished at 1:10 PM
1/23/2012	1:15:25 PM	Main Vac valve closed
1/23/2012	1:15:57 PM	Main Vac valve opened
1/23/2012	1:16:57 PM	Recipe started at 1:16 PM
1/23/2012	1:16:57 PM	Helium valve closed
1/23/2012	1:16:57 PM	H2 valve closed
1/23/2012	1:16:57 PM	BCl3 valve closed
1/23/2012	1:16:57 PM	PH3 valve closed
1/23/2012	1:16:57 PM	SiCl4 pre valve closed
1/23/2012	1:16:57 PM	SiCl4 post valve closed
1/23/2012	1:16:57 PM	Main Vac valve closed
1/23/2012	1:16:57 PM	Bypass valve closed
1/23/2012	1:16:57 PM	Bubbler valve closed
1/23/2012	1:16:57 PM	Helium MFC set to  0.000000
1/23/2012	1:16:57 PM	H2 MFC set to  0.000000
1/23/2012	1:16:57 PM	BCl3 MFC set to  0.000000
1/23/2012	1:16:57 PM	PH3 MFC set to  0.000000
1/23/2012	1:16:57 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:16:57 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:16:57 PM	Tube furnace set to 0
1/23/2012	1:17:00 PM	Helium valve closed
1/23/2012	1:17:00 PM	BCl3 valve closed
1/23/2012	1:17:00 PM	PH3 valve closed
1/23/2012	1:17:00 PM	SiCl4 pre valve closed
1/23/2012	1:17:00 PM	SiCl4 post valve closed
1/23/2012	1:17:00 PM	Main Vac valve closed
1/23/2012	1:17:00 PM	Bypass valve closed
1/23/2012	1:17:00 PM	Bubbler valve closed
1/23/2012	1:17:00 PM	H2 valve opened
1/23/2012	1:17:00 PM	Helium MFC set to  0.000000
1/23/2012	1:17:00 PM	H2 MFC set to  500.000000
1/23/2012	1:17:00 PM	BCl3 MFC set to  0.000000
1/23/2012	1:17:00 PM	PH3 MFC set to  0.000000
1/23/2012	1:17:00 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:17:00 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:17:00 PM	Tube furnace set to 0
1/23/2012	1:18:05 PM	Helium valve closed
1/23/2012	1:18:05 PM	BCl3 valve closed
1/23/2012	1:18:05 PM	PH3 valve closed
1/23/2012	1:18:05 PM	SiCl4 pre valve closed
1/23/2012	1:18:05 PM	SiCl4 post valve closed
1/23/2012	1:18:05 PM	Main Vac valve closed
1/23/2012	1:18:05 PM	Bypass valve closed
1/23/2012	1:18:05 PM	H2 valve opened
1/23/2012	1:18:05 PM	Bubbler valve opened
1/23/2012	1:18:05 PM	Helium MFC set to  0.000000
1/23/2012	1:18:05 PM	H2 MFC set to  500.000000
1/23/2012	1:18:05 PM	BCl3 MFC set to  0.000000
1/23/2012	1:18:05 PM	PH3 MFC set to  0.000000
1/23/2012	1:18:05 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:18:05 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:18:05 PM	Tube furnace set to 0
1/23/2012	1:18:06 PM	Helium valve closed
1/23/2012	1:18:06 PM	BCl3 valve closed
1/23/2012	1:18:06 PM	PH3 valve closed
1/23/2012	1:18:06 PM	SiCl4 pre valve closed
1/23/2012	1:18:06 PM	SiCl4 post valve closed
1/23/2012	1:18:06 PM	Main Vac valve closed
1/23/2012	1:18:06 PM	Bypass valve closed
1/23/2012	1:18:06 PM	H2 valve opened
1/23/2012	1:18:06 PM	Bubbler valve opened
1/23/2012	1:18:06 PM	Helium MFC set to  0.000000
1/23/2012	1:18:06 PM	H2 MFC set to  500.000000
1/23/2012	1:18:06 PM	BCl3 MFC set to  0.000000
1/23/2012	1:18:06 PM	PH3 MFC set to  0.000000
1/23/2012	1:18:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	1:18:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:18:07 PM	Tube furnace set to 1000
1/23/2012	1:38:06 PM	Helium valve closed
1/23/2012	1:38:06 PM	BCl3 valve closed
1/23/2012	1:38:06 PM	Main Vac valve closed
1/23/2012	1:38:06 PM	Bypass valve closed
1/23/2012	1:38:06 PM	H2 valve opened
1/23/2012	1:38:06 PM	PH3 valve opened
1/23/2012	1:38:06 PM	SiCl4 pre valve opened
1/23/2012	1:38:06 PM	SiCl4 post valve opened
1/23/2012	1:38:06 PM	Bubbler valve opened
1/23/2012	1:38:06 PM	Helium MFC set to  0.000000
1/23/2012	1:38:06 PM	H2 MFC set to  500.000000
1/23/2012	1:38:06 PM	BCl3 MFC set to  0.000000
1/23/2012	1:38:06 PM	PH3 MFC set to  0.300000
1/23/2012	1:38:06 PM	SiCl4 MFC set to  25.000000
1/23/2012	1:38:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	1:38:07 PM	Tube furnace set to 1000
1/23/2012	2:03:07 PM	Helium valve closed
1/23/2012	2:03:07 PM	BCl3 valve closed
1/23/2012	2:03:07 PM	PH3 valve closed
1/23/2012	2:03:07 PM	SiCl4 pre valve closed
1/23/2012	2:03:07 PM	SiCl4 post valve closed
1/23/2012	2:03:07 PM	Main Vac valve closed
1/23/2012	2:03:07 PM	Bypass valve closed
1/23/2012	2:03:07 PM	H2 valve opened
1/23/2012	2:03:07 PM	Bubbler valve opened
1/23/2012	2:03:07 PM	Helium MFC set to  0.000000
1/23/2012	2:03:07 PM	H2 MFC set to  500.000000
1/23/2012	2:03:07 PM	BCl3 MFC set to  0.000000
1/23/2012	2:03:07 PM	PH3 MFC set to  0.000000
1/23/2012	2:03:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	2:03:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	2:03:07 PM	Tube furnace set to 750
1/23/2012	2:08:07 PM	H2 valve closed
1/23/2012	2:08:07 PM	BCl3 valve closed
1/23/2012	2:08:07 PM	PH3 valve closed
1/23/2012	2:08:07 PM	SiCl4 pre valve closed
1/23/2012	2:08:07 PM	SiCl4 post valve closed
1/23/2012	2:08:07 PM	Main Vac valve closed
1/23/2012	2:08:07 PM	Bypass valve closed
1/23/2012	2:08:07 PM	Helium valve opened
1/23/2012	2:08:07 PM	Bubbler valve opened
1/23/2012	2:08:07 PM	Helium MFC set to  500.000000
1/23/2012	2:08:07 PM	H2 MFC set to  0.000000
1/23/2012	2:08:07 PM	BCl3 MFC set to  0.000000
1/23/2012	2:08:07 PM	PH3 MFC set to  0.000000
1/23/2012	2:08:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	2:08:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	2:08:07 PM	Tube furnace set to 0
1/23/2012	2:28:07 PM	Helium valve closed
1/23/2012	2:28:07 PM	H2 valve closed
1/23/2012	2:28:07 PM	BCl3 valve closed
1/23/2012	2:28:07 PM	PH3 valve closed
1/23/2012	2:28:07 PM	SiCl4 pre valve closed
1/23/2012	2:28:07 PM	SiCl4 post valve closed
1/23/2012	2:28:07 PM	Main Vac valve closed
1/23/2012	2:28:07 PM	Bypass valve closed
1/23/2012	2:28:07 PM	Bubbler valve closed
1/23/2012	2:28:07 PM	Helium MFC set to  0.000000
1/23/2012	2:28:07 PM	H2 MFC set to  0.000000
1/23/2012	2:28:07 PM	BCl3 MFC set to  0.000000
1/23/2012	2:28:07 PM	PH3 MFC set to  0.000000
1/23/2012	2:28:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	2:28:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	2:28:07 PM	Tube furnace set to 0
1/23/2012	2:28:08 PM	Run finished at 2:28 PM
1/23/2012	3:08:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	3:08:56 PM	Recipe started at 3:08 PM
1/23/2012	3:08:56 PM	Helium valve closed
1/23/2012	3:08:56 PM	H2 valve closed
1/23/2012	3:08:56 PM	BCl3 valve closed
1/23/2012	3:08:56 PM	PH3 valve closed
1/23/2012	3:08:56 PM	SiCl4 pre valve closed
1/23/2012	3:08:56 PM	SiCl4 post valve closed
1/23/2012	3:08:56 PM	Main Vac valve closed
1/23/2012	3:08:56 PM	Bypass valve closed
1/23/2012	3:08:56 PM	Bubbler valve closed
1/23/2012	3:08:56 PM	Helium MFC set to  0.000000
1/23/2012	3:08:56 PM	H2 MFC set to  0.000000
1/23/2012	3:08:56 PM	BCl3 MFC set to  0.000000
1/23/2012	3:08:56 PM	PH3 MFC set to  0.000000
1/23/2012	3:08:56 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:08:56 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:08:56 PM	Tube furnace set to 0
1/23/2012	3:08:59 PM	H2 valve closed
1/23/2012	3:08:59 PM	BCl3 valve closed
1/23/2012	3:08:59 PM	PH3 valve closed
1/23/2012	3:08:59 PM	SiCl4 pre valve closed
1/23/2012	3:08:59 PM	SiCl4 post valve closed
1/23/2012	3:08:59 PM	Main Vac valve closed
1/23/2012	3:08:59 PM	Bypass valve closed
1/23/2012	3:08:59 PM	Bubbler valve closed
1/23/2012	3:08:59 PM	Helium valve opened
1/23/2012	3:08:59 PM	Helium MFC set to  500.000000
1/23/2012	3:08:59 PM	H2 MFC set to  0.000000
1/23/2012	3:08:59 PM	BCl3 MFC set to  0.000000
1/23/2012	3:08:59 PM	PH3 MFC set to  0.000000
1/23/2012	3:08:59 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:08:59 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:08:59 PM	Tube furnace set to 0
1/23/2012	3:09:06 PM	Helium valve closed
1/23/2012	3:09:06 PM	H2 valve closed
1/23/2012	3:09:06 PM	BCl3 valve closed
1/23/2012	3:09:06 PM	PH3 valve closed
1/23/2012	3:09:06 PM	SiCl4 pre valve closed
1/23/2012	3:09:06 PM	SiCl4 post valve closed
1/23/2012	3:09:06 PM	Main Vac valve closed
1/23/2012	3:09:06 PM	Bypass valve closed
1/23/2012	3:09:06 PM	Bubbler valve closed
1/23/2012	3:09:06 PM	Helium MFC set to  0.000000
1/23/2012	3:09:06 PM	H2 MFC set to  0.000000
1/23/2012	3:09:06 PM	BCl3 MFC set to  0.000000
1/23/2012	3:09:06 PM	PH3 MFC set to  0.000000
1/23/2012	3:09:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:09:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:09:06 PM	Tube furnace set to 0
1/23/2012	3:09:07 PM	Run finished at 3:09 PM
1/23/2012	3:09:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/23/2012	3:13:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	3:13:51 PM	Recipe started at 3:13 PM
1/23/2012	3:13:51 PM	Helium valve closed
1/23/2012	3:13:51 PM	H2 valve closed
1/23/2012	3:13:51 PM	BCl3 valve closed
1/23/2012	3:13:51 PM	PH3 valve closed
1/23/2012	3:13:51 PM	SiCl4 pre valve closed
1/23/2012	3:13:51 PM	SiCl4 post valve closed
1/23/2012	3:13:51 PM	Main Vac valve closed
1/23/2012	3:13:51 PM	Bubbler valve closed
1/23/2012	3:13:51 PM	Bypass valve opened
1/23/2012	3:13:51 PM	Helium MFC set to  0.000000
1/23/2012	3:13:51 PM	H2 MFC set to  0.000000
1/23/2012	3:13:51 PM	BCl3 MFC set to  0.000000
1/23/2012	3:13:51 PM	PH3 MFC set to  0.000000
1/23/2012	3:13:51 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:13:51 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:13:51 PM	Tube furnace set to 0
1/23/2012	3:14:51 PM	Helium valve closed
1/23/2012	3:14:51 PM	H2 valve closed
1/23/2012	3:14:51 PM	BCl3 valve closed
1/23/2012	3:14:51 PM	PH3 valve closed
1/23/2012	3:14:51 PM	SiCl4 pre valve closed
1/23/2012	3:14:51 PM	SiCl4 post valve closed
1/23/2012	3:14:51 PM	Main Vac valve closed
1/23/2012	3:14:51 PM	Bubbler valve closed
1/23/2012	3:14:51 PM	Bypass valve opened
1/23/2012	3:14:51 PM	Helium MFC set to  0.000000
1/23/2012	3:14:51 PM	H2 MFC set to  0.000000
1/23/2012	3:14:51 PM	BCl3 MFC set to  0.000000
1/23/2012	3:14:51 PM	PH3 MFC set to  0.000000
1/23/2012	3:14:51 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:14:51 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:14:51 PM	Tube furnace set to 0
1/23/2012	3:15:51 PM	Helium valve closed
1/23/2012	3:15:51 PM	H2 valve closed
1/23/2012	3:15:51 PM	BCl3 valve closed
1/23/2012	3:15:51 PM	PH3 valve closed
1/23/2012	3:15:51 PM	SiCl4 pre valve closed
1/23/2012	3:15:51 PM	SiCl4 post valve closed
1/23/2012	3:15:51 PM	Bypass valve closed
1/23/2012	3:15:51 PM	Bubbler valve closed
1/23/2012	3:15:51 PM	Main Vac valve opened
1/23/2012	3:15:51 PM	Helium MFC set to  0.000000
1/23/2012	3:15:51 PM	H2 MFC set to  0.000000
1/23/2012	3:15:51 PM	BCl3 MFC set to  0.000000
1/23/2012	3:15:51 PM	PH3 MFC set to  0.000000
1/23/2012	3:15:51 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:15:51 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:15:51 PM	Tube furnace set to 0
1/23/2012	3:15:52 PM	Run finished at 3:15 PM
1/23/2012	3:15:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	3:33:04 PM	Recipe started at 3:32 PM
1/23/2012	3:33:04 PM	Helium valve closed
1/23/2012	3:33:04 PM	H2 valve closed
1/23/2012	3:33:04 PM	BCl3 valve closed
1/23/2012	3:33:04 PM	PH3 valve closed
1/23/2012	3:33:04 PM	SiCl4 pre valve closed
1/23/2012	3:33:04 PM	SiCl4 post valve closed
1/23/2012	3:33:04 PM	Bypass valve closed
1/23/2012	3:33:04 PM	Bubbler valve closed
1/23/2012	3:33:04 PM	Main Vac valve opened
1/23/2012	3:33:04 PM	Helium MFC set to  0.000000
1/23/2012	3:33:04 PM	H2 MFC set to  0.000000
1/23/2012	3:33:04 PM	BCl3 MFC set to  0.000000
1/23/2012	3:33:04 PM	PH3 MFC set to  0.000000
1/23/2012	3:33:04 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:33:04 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:33:04 PM	Tube furnace set to 150
1/23/2012	3:33:34 PM	H2 valve closed
1/23/2012	3:33:34 PM	BCl3 valve closed
1/23/2012	3:33:34 PM	PH3 valve closed
1/23/2012	3:33:34 PM	SiCl4 pre valve closed
1/23/2012	3:33:34 PM	SiCl4 post valve closed
1/23/2012	3:33:34 PM	Bypass valve closed
1/23/2012	3:33:34 PM	Bubbler valve closed
1/23/2012	3:33:34 PM	Helium valve opened
1/23/2012	3:33:34 PM	Main Vac valve opened
1/23/2012	3:33:34 PM	Helium MFC set to  20.000000
1/23/2012	3:33:34 PM	H2 MFC set to  0.000000
1/23/2012	3:33:34 PM	BCl3 MFC set to  0.000000
1/23/2012	3:33:34 PM	PH3 MFC set to  0.000000
1/23/2012	3:33:34 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:33:34 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:33:34 PM	Tube furnace set to 150
1/23/2012	3:34:04 PM	Helium valve closed
1/23/2012	3:34:04 PM	H2 valve closed
1/23/2012	3:34:04 PM	BCl3 valve closed
1/23/2012	3:34:04 PM	PH3 valve closed
1/23/2012	3:34:04 PM	SiCl4 pre valve closed
1/23/2012	3:34:04 PM	SiCl4 post valve closed
1/23/2012	3:34:04 PM	Bypass valve closed
1/23/2012	3:34:04 PM	Bubbler valve closed
1/23/2012	3:34:04 PM	Main Vac valve opened
1/23/2012	3:34:04 PM	Helium MFC set to  0.000000
1/23/2012	3:34:04 PM	H2 MFC set to  0.000000
1/23/2012	3:34:04 PM	BCl3 MFC set to  0.000000
1/23/2012	3:34:04 PM	PH3 MFC set to  0.000000
1/23/2012	3:34:04 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:34:04 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:34:05 PM	Tube furnace set to 150
1/23/2012	3:34:35 PM	H2 valve closed
1/23/2012	3:34:35 PM	BCl3 valve closed
1/23/2012	3:34:35 PM	PH3 valve closed
1/23/2012	3:34:35 PM	SiCl4 pre valve closed
1/23/2012	3:34:35 PM	SiCl4 post valve closed
1/23/2012	3:34:35 PM	Bypass valve closed
1/23/2012	3:34:35 PM	Bubbler valve closed
1/23/2012	3:34:35 PM	Helium valve opened
1/23/2012	3:34:35 PM	Main Vac valve opened
1/23/2012	3:34:35 PM	Helium MFC set to  20.000000
1/23/2012	3:34:35 PM	H2 MFC set to  0.000000
1/23/2012	3:34:35 PM	BCl3 MFC set to  0.000000
1/23/2012	3:34:35 PM	PH3 MFC set to  0.000000
1/23/2012	3:34:35 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:34:35 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:34:35 PM	Tube furnace set to 150
1/23/2012	3:35:05 PM	Helium valve closed
1/23/2012	3:35:05 PM	H2 valve closed
1/23/2012	3:35:05 PM	BCl3 valve closed
1/23/2012	3:35:05 PM	PH3 valve closed
1/23/2012	3:35:05 PM	SiCl4 pre valve closed
1/23/2012	3:35:05 PM	SiCl4 post valve closed
1/23/2012	3:35:05 PM	Bypass valve closed
1/23/2012	3:35:05 PM	Bubbler valve closed
1/23/2012	3:35:05 PM	Main Vac valve opened
1/23/2012	3:35:05 PM	Helium MFC set to  0.000000
1/23/2012	3:35:05 PM	H2 MFC set to  0.000000
1/23/2012	3:35:05 PM	BCl3 MFC set to  0.000000
1/23/2012	3:35:05 PM	PH3 MFC set to  0.000000
1/23/2012	3:35:05 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:35:05 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:35:05 PM	Tube furnace set to 150
1/23/2012	3:35:35 PM	H2 valve closed
1/23/2012	3:35:35 PM	BCl3 valve closed
1/23/2012	3:35:35 PM	PH3 valve closed
1/23/2012	3:35:35 PM	SiCl4 pre valve closed
1/23/2012	3:35:35 PM	SiCl4 post valve closed
1/23/2012	3:35:35 PM	Bypass valve closed
1/23/2012	3:35:35 PM	Bubbler valve closed
1/23/2012	3:35:35 PM	Helium valve opened
1/23/2012	3:35:35 PM	Main Vac valve opened
1/23/2012	3:35:35 PM	Helium MFC set to  20.000000
1/23/2012	3:35:35 PM	H2 MFC set to  0.000000
1/23/2012	3:35:35 PM	BCl3 MFC set to  0.000000
1/23/2012	3:35:35 PM	PH3 MFC set to  0.000000
1/23/2012	3:35:35 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:35:35 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:35:35 PM	Tube furnace set to 150
1/23/2012	3:36:05 PM	Helium valve closed
1/23/2012	3:36:05 PM	H2 valve closed
1/23/2012	3:36:05 PM	BCl3 valve closed
1/23/2012	3:36:05 PM	PH3 valve closed
1/23/2012	3:36:05 PM	SiCl4 pre valve closed
1/23/2012	3:36:05 PM	SiCl4 post valve closed
1/23/2012	3:36:05 PM	Bypass valve closed
1/23/2012	3:36:05 PM	Bubbler valve closed
1/23/2012	3:36:05 PM	Main Vac valve opened
1/23/2012	3:36:05 PM	Helium MFC set to  0.000000
1/23/2012	3:36:05 PM	H2 MFC set to  0.000000
1/23/2012	3:36:05 PM	BCl3 MFC set to  0.000000
1/23/2012	3:36:05 PM	PH3 MFC set to  0.000000
1/23/2012	3:36:05 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:36:05 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:36:05 PM	Tube furnace set to 150
1/23/2012	3:36:35 PM	H2 valve closed
1/23/2012	3:36:35 PM	BCl3 valve closed
1/23/2012	3:36:35 PM	PH3 valve closed
1/23/2012	3:36:35 PM	SiCl4 pre valve closed
1/23/2012	3:36:35 PM	SiCl4 post valve closed
1/23/2012	3:36:35 PM	Bypass valve closed
1/23/2012	3:36:35 PM	Bubbler valve closed
1/23/2012	3:36:35 PM	Helium valve opened
1/23/2012	3:36:35 PM	Main Vac valve opened
1/23/2012	3:36:35 PM	Helium MFC set to  20.000000
1/23/2012	3:36:35 PM	H2 MFC set to  0.000000
1/23/2012	3:36:35 PM	BCl3 MFC set to  0.000000
1/23/2012	3:36:35 PM	PH3 MFC set to  0.000000
1/23/2012	3:36:35 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:36:35 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:36:36 PM	Tube furnace set to 150
1/23/2012	3:37:06 PM	Helium valve closed
1/23/2012	3:37:06 PM	H2 valve closed
1/23/2012	3:37:06 PM	BCl3 valve closed
1/23/2012	3:37:06 PM	PH3 valve closed
1/23/2012	3:37:06 PM	SiCl4 pre valve closed
1/23/2012	3:37:06 PM	SiCl4 post valve closed
1/23/2012	3:37:06 PM	Bypass valve closed
1/23/2012	3:37:06 PM	Bubbler valve closed
1/23/2012	3:37:06 PM	Main Vac valve opened
1/23/2012	3:37:06 PM	Helium MFC set to  0.000000
1/23/2012	3:37:06 PM	H2 MFC set to  0.000000
1/23/2012	3:37:06 PM	BCl3 MFC set to  0.000000
1/23/2012	3:37:06 PM	PH3 MFC set to  0.000000
1/23/2012	3:37:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:37:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:37:06 PM	Tube furnace set to 150
1/23/2012	3:37:36 PM	H2 valve closed
1/23/2012	3:37:36 PM	BCl3 valve closed
1/23/2012	3:37:36 PM	PH3 valve closed
1/23/2012	3:37:36 PM	SiCl4 pre valve closed
1/23/2012	3:37:36 PM	SiCl4 post valve closed
1/23/2012	3:37:36 PM	Bypass valve closed
1/23/2012	3:37:36 PM	Bubbler valve closed
1/23/2012	3:37:36 PM	Helium valve opened
1/23/2012	3:37:36 PM	Main Vac valve opened
1/23/2012	3:37:36 PM	Helium MFC set to  20.000000
1/23/2012	3:37:36 PM	H2 MFC set to  0.000000
1/23/2012	3:37:36 PM	BCl3 MFC set to  0.000000
1/23/2012	3:37:36 PM	PH3 MFC set to  0.000000
1/23/2012	3:37:36 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:37:36 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:37:36 PM	Tube furnace set to 150
1/23/2012	3:38:06 PM	Helium valve closed
1/23/2012	3:38:06 PM	H2 valve closed
1/23/2012	3:38:06 PM	BCl3 valve closed
1/23/2012	3:38:06 PM	PH3 valve closed
1/23/2012	3:38:06 PM	SiCl4 pre valve closed
1/23/2012	3:38:06 PM	SiCl4 post valve closed
1/23/2012	3:38:06 PM	Bypass valve closed
1/23/2012	3:38:06 PM	Bubbler valve closed
1/23/2012	3:38:06 PM	Main Vac valve opened
1/23/2012	3:38:06 PM	Helium MFC set to  0.000000
1/23/2012	3:38:06 PM	H2 MFC set to  0.000000
1/23/2012	3:38:06 PM	BCl3 MFC set to  0.000000
1/23/2012	3:38:06 PM	PH3 MFC set to  0.000000
1/23/2012	3:38:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:38:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:38:06 PM	Tube furnace set to 150
1/23/2012	3:38:36 PM	H2 valve closed
1/23/2012	3:38:36 PM	BCl3 valve closed
1/23/2012	3:38:36 PM	PH3 valve closed
1/23/2012	3:38:36 PM	SiCl4 pre valve closed
1/23/2012	3:38:36 PM	SiCl4 post valve closed
1/23/2012	3:38:36 PM	Bypass valve closed
1/23/2012	3:38:36 PM	Bubbler valve closed
1/23/2012	3:38:36 PM	Helium valve opened
1/23/2012	3:38:36 PM	Main Vac valve opened
1/23/2012	3:38:36 PM	Helium MFC set to  20.000000
1/23/2012	3:38:36 PM	H2 MFC set to  0.000000
1/23/2012	3:38:36 PM	BCl3 MFC set to  0.000000
1/23/2012	3:38:36 PM	PH3 MFC set to  0.000000
1/23/2012	3:38:36 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:38:36 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:38:36 PM	Tube furnace set to 150
1/23/2012	3:39:06 PM	Helium valve closed
1/23/2012	3:39:06 PM	H2 valve closed
1/23/2012	3:39:06 PM	BCl3 valve closed
1/23/2012	3:39:06 PM	PH3 valve closed
1/23/2012	3:39:06 PM	SiCl4 pre valve closed
1/23/2012	3:39:06 PM	SiCl4 post valve closed
1/23/2012	3:39:06 PM	Bypass valve closed
1/23/2012	3:39:06 PM	Bubbler valve closed
1/23/2012	3:39:06 PM	Main Vac valve opened
1/23/2012	3:39:06 PM	Helium MFC set to  0.000000
1/23/2012	3:39:06 PM	H2 MFC set to  0.000000
1/23/2012	3:39:06 PM	BCl3 MFC set to  0.000000
1/23/2012	3:39:06 PM	PH3 MFC set to  0.000000
1/23/2012	3:39:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:39:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:39:07 PM	Tube furnace set to 150
1/23/2012	3:39:37 PM	H2 valve closed
1/23/2012	3:39:37 PM	BCl3 valve closed
1/23/2012	3:39:37 PM	PH3 valve closed
1/23/2012	3:39:37 PM	SiCl4 pre valve closed
1/23/2012	3:39:37 PM	SiCl4 post valve closed
1/23/2012	3:39:37 PM	Bypass valve closed
1/23/2012	3:39:37 PM	Bubbler valve closed
1/23/2012	3:39:37 PM	Helium valve opened
1/23/2012	3:39:37 PM	Main Vac valve opened
1/23/2012	3:39:37 PM	Helium MFC set to  20.000000
1/23/2012	3:39:37 PM	H2 MFC set to  0.000000
1/23/2012	3:39:37 PM	BCl3 MFC set to  0.000000
1/23/2012	3:39:37 PM	PH3 MFC set to  0.000000
1/23/2012	3:39:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:39:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:39:37 PM	Tube furnace set to 150
1/23/2012	3:40:07 PM	Helium valve closed
1/23/2012	3:40:07 PM	H2 valve closed
1/23/2012	3:40:07 PM	BCl3 valve closed
1/23/2012	3:40:07 PM	PH3 valve closed
1/23/2012	3:40:07 PM	SiCl4 pre valve closed
1/23/2012	3:40:07 PM	SiCl4 post valve closed
1/23/2012	3:40:07 PM	Bypass valve closed
1/23/2012	3:40:07 PM	Bubbler valve closed
1/23/2012	3:40:07 PM	Main Vac valve opened
1/23/2012	3:40:07 PM	Helium MFC set to  0.000000
1/23/2012	3:40:07 PM	H2 MFC set to  0.000000
1/23/2012	3:40:07 PM	BCl3 MFC set to  0.000000
1/23/2012	3:40:07 PM	PH3 MFC set to  0.000000
1/23/2012	3:40:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:40:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:40:07 PM	Tube furnace set to 150
1/23/2012	3:40:37 PM	H2 valve closed
1/23/2012	3:40:37 PM	BCl3 valve closed
1/23/2012	3:40:37 PM	PH3 valve closed
1/23/2012	3:40:37 PM	SiCl4 pre valve closed
1/23/2012	3:40:37 PM	SiCl4 post valve closed
1/23/2012	3:40:37 PM	Bypass valve closed
1/23/2012	3:40:37 PM	Bubbler valve closed
1/23/2012	3:40:37 PM	Helium valve opened
1/23/2012	3:40:37 PM	Main Vac valve opened
1/23/2012	3:40:37 PM	Helium MFC set to  20.000000
1/23/2012	3:40:37 PM	H2 MFC set to  0.000000
1/23/2012	3:40:37 PM	BCl3 MFC set to  0.000000
1/23/2012	3:40:37 PM	PH3 MFC set to  0.000000
1/23/2012	3:40:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:40:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:40:37 PM	Tube furnace set to 150
1/23/2012	3:41:07 PM	Helium valve closed
1/23/2012	3:41:07 PM	H2 valve closed
1/23/2012	3:41:07 PM	BCl3 valve closed
1/23/2012	3:41:07 PM	PH3 valve closed
1/23/2012	3:41:07 PM	SiCl4 pre valve closed
1/23/2012	3:41:07 PM	SiCl4 post valve closed
1/23/2012	3:41:07 PM	Bypass valve closed
1/23/2012	3:41:07 PM	Bubbler valve closed
1/23/2012	3:41:07 PM	Main Vac valve opened
1/23/2012	3:41:07 PM	Helium MFC set to  0.000000
1/23/2012	3:41:07 PM	H2 MFC set to  0.000000
1/23/2012	3:41:07 PM	BCl3 MFC set to  0.000000
1/23/2012	3:41:07 PM	PH3 MFC set to  0.000000
1/23/2012	3:41:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:41:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:41:07 PM	Tube furnace set to 150
1/23/2012	3:41:37 PM	H2 valve closed
1/23/2012	3:41:37 PM	BCl3 valve closed
1/23/2012	3:41:37 PM	PH3 valve closed
1/23/2012	3:41:37 PM	SiCl4 pre valve closed
1/23/2012	3:41:37 PM	SiCl4 post valve closed
1/23/2012	3:41:37 PM	Bypass valve closed
1/23/2012	3:41:37 PM	Bubbler valve closed
1/23/2012	3:41:37 PM	Helium valve opened
1/23/2012	3:41:37 PM	Main Vac valve opened
1/23/2012	3:41:37 PM	Helium MFC set to  20.000000
1/23/2012	3:41:37 PM	H2 MFC set to  0.000000
1/23/2012	3:41:37 PM	BCl3 MFC set to  0.000000
1/23/2012	3:41:37 PM	PH3 MFC set to  0.000000
1/23/2012	3:41:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:41:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:41:38 PM	Tube furnace set to 150
1/23/2012	3:42:08 PM	Helium valve closed
1/23/2012	3:42:08 PM	H2 valve closed
1/23/2012	3:42:08 PM	BCl3 valve closed
1/23/2012	3:42:08 PM	PH3 valve closed
1/23/2012	3:42:08 PM	SiCl4 pre valve closed
1/23/2012	3:42:08 PM	SiCl4 post valve closed
1/23/2012	3:42:08 PM	Bypass valve closed
1/23/2012	3:42:08 PM	Bubbler valve closed
1/23/2012	3:42:08 PM	Main Vac valve opened
1/23/2012	3:42:08 PM	Helium MFC set to  0.000000
1/23/2012	3:42:08 PM	H2 MFC set to  0.000000
1/23/2012	3:42:08 PM	BCl3 MFC set to  0.000000
1/23/2012	3:42:08 PM	PH3 MFC set to  0.000000
1/23/2012	3:42:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:42:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:42:08 PM	Tube furnace set to 150
1/23/2012	3:42:38 PM	H2 valve closed
1/23/2012	3:42:38 PM	BCl3 valve closed
1/23/2012	3:42:38 PM	PH3 valve closed
1/23/2012	3:42:38 PM	SiCl4 pre valve closed
1/23/2012	3:42:38 PM	SiCl4 post valve closed
1/23/2012	3:42:38 PM	Bypass valve closed
1/23/2012	3:42:38 PM	Bubbler valve closed
1/23/2012	3:42:38 PM	Helium valve opened
1/23/2012	3:42:38 PM	Main Vac valve opened
1/23/2012	3:42:38 PM	Helium MFC set to  20.000000
1/23/2012	3:42:38 PM	H2 MFC set to  0.000000
1/23/2012	3:42:38 PM	BCl3 MFC set to  0.000000
1/23/2012	3:42:38 PM	PH3 MFC set to  0.000000
1/23/2012	3:42:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:42:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:42:38 PM	Tube furnace set to 150
1/23/2012	3:43:08 PM	Helium valve closed
1/23/2012	3:43:08 PM	H2 valve closed
1/23/2012	3:43:08 PM	BCl3 valve closed
1/23/2012	3:43:08 PM	PH3 valve closed
1/23/2012	3:43:08 PM	SiCl4 pre valve closed
1/23/2012	3:43:08 PM	SiCl4 post valve closed
1/23/2012	3:43:08 PM	Bypass valve closed
1/23/2012	3:43:08 PM	Bubbler valve closed
1/23/2012	3:43:08 PM	Main Vac valve opened
1/23/2012	3:43:08 PM	Helium MFC set to  0.000000
1/23/2012	3:43:08 PM	H2 MFC set to  0.000000
1/23/2012	3:43:08 PM	BCl3 MFC set to  0.000000
1/23/2012	3:43:08 PM	PH3 MFC set to  0.000000
1/23/2012	3:43:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:43:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:43:08 PM	Tube furnace set to 150
1/23/2012	3:43:09 PM	Run finished at 3:43 PM
1/23/2012	3:46:19 PM	Main Vac valve closed
1/23/2012	3:46:27 PM	Main Vac valve opened
1/23/2012	3:46:36 PM	Recipe started at 3:46 PM
1/23/2012	3:46:36 PM	Helium valve closed
1/23/2012	3:46:36 PM	H2 valve closed
1/23/2012	3:46:36 PM	BCl3 valve closed
1/23/2012	3:46:36 PM	PH3 valve closed
1/23/2012	3:46:36 PM	SiCl4 pre valve closed
1/23/2012	3:46:36 PM	SiCl4 post valve closed
1/23/2012	3:46:36 PM	Bypass valve closed
1/23/2012	3:46:36 PM	Bubbler valve closed
1/23/2012	3:46:36 PM	Main Vac valve opened
1/23/2012	3:46:36 PM	Helium MFC set to  0.000000
1/23/2012	3:46:36 PM	H2 MFC set to  0.000000
1/23/2012	3:46:36 PM	BCl3 MFC set to  0.000000
1/23/2012	3:46:36 PM	PH3 MFC set to  0.000000
1/23/2012	3:46:36 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:46:36 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:46:36 PM	Tube furnace set to 150
1/23/2012	3:47:06 PM	H2 valve closed
1/23/2012	3:47:06 PM	BCl3 valve closed
1/23/2012	3:47:06 PM	PH3 valve closed
1/23/2012	3:47:06 PM	SiCl4 pre valve closed
1/23/2012	3:47:06 PM	SiCl4 post valve closed
1/23/2012	3:47:06 PM	Bypass valve closed
1/23/2012	3:47:06 PM	Bubbler valve closed
1/23/2012	3:47:06 PM	Helium valve opened
1/23/2012	3:47:06 PM	Main Vac valve opened
1/23/2012	3:47:06 PM	Helium MFC set to  20.000000
1/23/2012	3:47:06 PM	H2 MFC set to  0.000000
1/23/2012	3:47:06 PM	BCl3 MFC set to  0.000000
1/23/2012	3:47:06 PM	PH3 MFC set to  0.000000
1/23/2012	3:47:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:47:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:47:06 PM	Tube furnace set to 150
1/23/2012	3:47:36 PM	Helium valve closed
1/23/2012	3:47:36 PM	H2 valve closed
1/23/2012	3:47:36 PM	BCl3 valve closed
1/23/2012	3:47:36 PM	PH3 valve closed
1/23/2012	3:47:36 PM	SiCl4 pre valve closed
1/23/2012	3:47:36 PM	SiCl4 post valve closed
1/23/2012	3:47:36 PM	Bypass valve closed
1/23/2012	3:47:36 PM	Bubbler valve closed
1/23/2012	3:47:36 PM	Main Vac valve opened
1/23/2012	3:47:36 PM	Helium MFC set to  0.000000
1/23/2012	3:47:36 PM	H2 MFC set to  0.000000
1/23/2012	3:47:36 PM	BCl3 MFC set to  0.000000
1/23/2012	3:47:36 PM	PH3 MFC set to  0.000000
1/23/2012	3:47:36 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:47:36 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:47:36 PM	Tube furnace set to 150
1/23/2012	3:48:06 PM	H2 valve closed
1/23/2012	3:48:06 PM	BCl3 valve closed
1/23/2012	3:48:06 PM	PH3 valve closed
1/23/2012	3:48:06 PM	SiCl4 pre valve closed
1/23/2012	3:48:06 PM	SiCl4 post valve closed
1/23/2012	3:48:06 PM	Bypass valve closed
1/23/2012	3:48:06 PM	Bubbler valve closed
1/23/2012	3:48:06 PM	Helium valve opened
1/23/2012	3:48:06 PM	Main Vac valve opened
1/23/2012	3:48:06 PM	Helium MFC set to  20.000000
1/23/2012	3:48:06 PM	H2 MFC set to  0.000000
1/23/2012	3:48:06 PM	BCl3 MFC set to  0.000000
1/23/2012	3:48:06 PM	PH3 MFC set to  0.000000
1/23/2012	3:48:06 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:48:06 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:48:06 PM	Tube furnace set to 150
1/23/2012	3:48:36 PM	Helium valve closed
1/23/2012	3:48:36 PM	H2 valve closed
1/23/2012	3:48:36 PM	BCl3 valve closed
1/23/2012	3:48:36 PM	PH3 valve closed
1/23/2012	3:48:36 PM	SiCl4 pre valve closed
1/23/2012	3:48:36 PM	SiCl4 post valve closed
1/23/2012	3:48:36 PM	Bypass valve closed
1/23/2012	3:48:36 PM	Bubbler valve closed
1/23/2012	3:48:36 PM	Main Vac valve opened
1/23/2012	3:48:36 PM	Helium MFC set to  0.000000
1/23/2012	3:48:36 PM	H2 MFC set to  0.000000
1/23/2012	3:48:36 PM	BCl3 MFC set to  0.000000
1/23/2012	3:48:36 PM	PH3 MFC set to  0.000000
1/23/2012	3:48:36 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:48:36 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:48:37 PM	Tube furnace set to 150
1/23/2012	3:49:07 PM	H2 valve closed
1/23/2012	3:49:07 PM	BCl3 valve closed
1/23/2012	3:49:07 PM	PH3 valve closed
1/23/2012	3:49:07 PM	SiCl4 pre valve closed
1/23/2012	3:49:07 PM	SiCl4 post valve closed
1/23/2012	3:49:07 PM	Bypass valve closed
1/23/2012	3:49:07 PM	Bubbler valve closed
1/23/2012	3:49:07 PM	Helium valve opened
1/23/2012	3:49:07 PM	Main Vac valve opened
1/23/2012	3:49:07 PM	Helium MFC set to  20.000000
1/23/2012	3:49:07 PM	H2 MFC set to  0.000000
1/23/2012	3:49:07 PM	BCl3 MFC set to  0.000000
1/23/2012	3:49:07 PM	PH3 MFC set to  0.000000
1/23/2012	3:49:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:49:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:49:07 PM	Tube furnace set to 150
1/23/2012	3:49:37 PM	Helium valve closed
1/23/2012	3:49:37 PM	H2 valve closed
1/23/2012	3:49:37 PM	BCl3 valve closed
1/23/2012	3:49:37 PM	PH3 valve closed
1/23/2012	3:49:37 PM	SiCl4 pre valve closed
1/23/2012	3:49:37 PM	SiCl4 post valve closed
1/23/2012	3:49:37 PM	Bypass valve closed
1/23/2012	3:49:37 PM	Bubbler valve closed
1/23/2012	3:49:37 PM	Main Vac valve opened
1/23/2012	3:49:37 PM	Helium MFC set to  0.000000
1/23/2012	3:49:37 PM	H2 MFC set to  0.000000
1/23/2012	3:49:37 PM	BCl3 MFC set to  0.000000
1/23/2012	3:49:37 PM	PH3 MFC set to  0.000000
1/23/2012	3:49:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:49:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:49:37 PM	Tube furnace set to 150
1/23/2012	3:50:07 PM	H2 valve closed
1/23/2012	3:50:07 PM	BCl3 valve closed
1/23/2012	3:50:07 PM	PH3 valve closed
1/23/2012	3:50:07 PM	SiCl4 pre valve closed
1/23/2012	3:50:07 PM	SiCl4 post valve closed
1/23/2012	3:50:07 PM	Bypass valve closed
1/23/2012	3:50:07 PM	Bubbler valve closed
1/23/2012	3:50:07 PM	Helium valve opened
1/23/2012	3:50:07 PM	Main Vac valve opened
1/23/2012	3:50:07 PM	Helium MFC set to  20.000000
1/23/2012	3:50:07 PM	H2 MFC set to  0.000000
1/23/2012	3:50:07 PM	BCl3 MFC set to  0.000000
1/23/2012	3:50:07 PM	PH3 MFC set to  0.000000
1/23/2012	3:50:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:50:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:50:07 PM	Tube furnace set to 150
1/23/2012	3:50:37 PM	Helium valve closed
1/23/2012	3:50:37 PM	H2 valve closed
1/23/2012	3:50:37 PM	BCl3 valve closed
1/23/2012	3:50:37 PM	PH3 valve closed
1/23/2012	3:50:37 PM	SiCl4 pre valve closed
1/23/2012	3:50:37 PM	SiCl4 post valve closed
1/23/2012	3:50:37 PM	Bypass valve closed
1/23/2012	3:50:37 PM	Bubbler valve closed
1/23/2012	3:50:37 PM	Main Vac valve opened
1/23/2012	3:50:37 PM	Helium MFC set to  0.000000
1/23/2012	3:50:37 PM	H2 MFC set to  0.000000
1/23/2012	3:50:37 PM	BCl3 MFC set to  0.000000
1/23/2012	3:50:37 PM	PH3 MFC set to  0.000000
1/23/2012	3:50:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:50:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:50:37 PM	Tube furnace set to 150
1/23/2012	3:51:07 PM	H2 valve closed
1/23/2012	3:51:07 PM	BCl3 valve closed
1/23/2012	3:51:07 PM	PH3 valve closed
1/23/2012	3:51:07 PM	SiCl4 pre valve closed
1/23/2012	3:51:07 PM	SiCl4 post valve closed
1/23/2012	3:51:07 PM	Bypass valve closed
1/23/2012	3:51:07 PM	Bubbler valve closed
1/23/2012	3:51:07 PM	Helium valve opened
1/23/2012	3:51:07 PM	Main Vac valve opened
1/23/2012	3:51:07 PM	Helium MFC set to  20.000000
1/23/2012	3:51:07 PM	H2 MFC set to  0.000000
1/23/2012	3:51:07 PM	BCl3 MFC set to  0.000000
1/23/2012	3:51:07 PM	PH3 MFC set to  0.000000
1/23/2012	3:51:07 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:51:07 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:51:08 PM	Tube furnace set to 150
1/23/2012	3:51:38 PM	Helium valve closed
1/23/2012	3:51:38 PM	H2 valve closed
1/23/2012	3:51:38 PM	BCl3 valve closed
1/23/2012	3:51:38 PM	PH3 valve closed
1/23/2012	3:51:38 PM	SiCl4 pre valve closed
1/23/2012	3:51:38 PM	SiCl4 post valve closed
1/23/2012	3:51:38 PM	Bypass valve closed
1/23/2012	3:51:38 PM	Bubbler valve closed
1/23/2012	3:51:38 PM	Main Vac valve opened
1/23/2012	3:51:38 PM	Helium MFC set to  0.000000
1/23/2012	3:51:38 PM	H2 MFC set to  0.000000
1/23/2012	3:51:38 PM	BCl3 MFC set to  0.000000
1/23/2012	3:51:38 PM	PH3 MFC set to  0.000000
1/23/2012	3:51:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:51:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:51:38 PM	Tube furnace set to 150
1/23/2012	3:52:08 PM	H2 valve closed
1/23/2012	3:52:08 PM	BCl3 valve closed
1/23/2012	3:52:08 PM	PH3 valve closed
1/23/2012	3:52:08 PM	SiCl4 pre valve closed
1/23/2012	3:52:08 PM	SiCl4 post valve closed
1/23/2012	3:52:08 PM	Bypass valve closed
1/23/2012	3:52:08 PM	Bubbler valve closed
1/23/2012	3:52:08 PM	Helium valve opened
1/23/2012	3:52:08 PM	Main Vac valve opened
1/23/2012	3:52:08 PM	Helium MFC set to  20.000000
1/23/2012	3:52:08 PM	H2 MFC set to  0.000000
1/23/2012	3:52:08 PM	BCl3 MFC set to  0.000000
1/23/2012	3:52:08 PM	PH3 MFC set to  0.000000
1/23/2012	3:52:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:52:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:52:08 PM	Tube furnace set to 150
1/23/2012	3:52:38 PM	Helium valve closed
1/23/2012	3:52:38 PM	H2 valve closed
1/23/2012	3:52:38 PM	BCl3 valve closed
1/23/2012	3:52:38 PM	PH3 valve closed
1/23/2012	3:52:38 PM	SiCl4 pre valve closed
1/23/2012	3:52:38 PM	SiCl4 post valve closed
1/23/2012	3:52:38 PM	Bypass valve closed
1/23/2012	3:52:38 PM	Bubbler valve closed
1/23/2012	3:52:38 PM	Main Vac valve opened
1/23/2012	3:52:38 PM	Helium MFC set to  0.000000
1/23/2012	3:52:38 PM	H2 MFC set to  0.000000
1/23/2012	3:52:38 PM	BCl3 MFC set to  0.000000
1/23/2012	3:52:38 PM	PH3 MFC set to  0.000000
1/23/2012	3:52:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:52:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:52:38 PM	Tube furnace set to 150
1/23/2012	3:53:08 PM	H2 valve closed
1/23/2012	3:53:08 PM	BCl3 valve closed
1/23/2012	3:53:08 PM	PH3 valve closed
1/23/2012	3:53:08 PM	SiCl4 pre valve closed
1/23/2012	3:53:08 PM	SiCl4 post valve closed
1/23/2012	3:53:08 PM	Bypass valve closed
1/23/2012	3:53:08 PM	Bubbler valve closed
1/23/2012	3:53:08 PM	Helium valve opened
1/23/2012	3:53:08 PM	Main Vac valve opened
1/23/2012	3:53:08 PM	Helium MFC set to  20.000000
1/23/2012	3:53:08 PM	H2 MFC set to  0.000000
1/23/2012	3:53:08 PM	BCl3 MFC set to  0.000000
1/23/2012	3:53:08 PM	PH3 MFC set to  0.000000
1/23/2012	3:53:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:53:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:53:08 PM	Tube furnace set to 150
1/23/2012	3:53:38 PM	Helium valve closed
1/23/2012	3:53:38 PM	H2 valve closed
1/23/2012	3:53:38 PM	BCl3 valve closed
1/23/2012	3:53:38 PM	PH3 valve closed
1/23/2012	3:53:38 PM	SiCl4 pre valve closed
1/23/2012	3:53:38 PM	SiCl4 post valve closed
1/23/2012	3:53:38 PM	Bypass valve closed
1/23/2012	3:53:38 PM	Bubbler valve closed
1/23/2012	3:53:38 PM	Main Vac valve opened
1/23/2012	3:53:38 PM	Helium MFC set to  0.000000
1/23/2012	3:53:38 PM	H2 MFC set to  0.000000
1/23/2012	3:53:38 PM	BCl3 MFC set to  0.000000
1/23/2012	3:53:38 PM	PH3 MFC set to  0.000000
1/23/2012	3:53:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:53:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:53:39 PM	Tube furnace set to 150
1/23/2012	3:54:09 PM	H2 valve closed
1/23/2012	3:54:09 PM	BCl3 valve closed
1/23/2012	3:54:09 PM	PH3 valve closed
1/23/2012	3:54:09 PM	SiCl4 pre valve closed
1/23/2012	3:54:09 PM	SiCl4 post valve closed
1/23/2012	3:54:09 PM	Bypass valve closed
1/23/2012	3:54:09 PM	Bubbler valve closed
1/23/2012	3:54:09 PM	Helium valve opened
1/23/2012	3:54:09 PM	Main Vac valve opened
1/23/2012	3:54:09 PM	Helium MFC set to  20.000000
1/23/2012	3:54:09 PM	H2 MFC set to  0.000000
1/23/2012	3:54:09 PM	BCl3 MFC set to  0.000000
1/23/2012	3:54:09 PM	PH3 MFC set to  0.000000
1/23/2012	3:54:09 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:54:09 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:54:09 PM	Tube furnace set to 150
1/23/2012	3:54:39 PM	Helium valve closed
1/23/2012	3:54:39 PM	H2 valve closed
1/23/2012	3:54:39 PM	BCl3 valve closed
1/23/2012	3:54:39 PM	PH3 valve closed
1/23/2012	3:54:39 PM	SiCl4 pre valve closed
1/23/2012	3:54:39 PM	SiCl4 post valve closed
1/23/2012	3:54:39 PM	Bypass valve closed
1/23/2012	3:54:39 PM	Bubbler valve closed
1/23/2012	3:54:39 PM	Main Vac valve opened
1/23/2012	3:54:39 PM	Helium MFC set to  0.000000
1/23/2012	3:54:39 PM	H2 MFC set to  0.000000
1/23/2012	3:54:39 PM	BCl3 MFC set to  0.000000
1/23/2012	3:54:39 PM	PH3 MFC set to  0.000000
1/23/2012	3:54:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:54:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:54:39 PM	Tube furnace set to 150
1/23/2012	3:55:09 PM	H2 valve closed
1/23/2012	3:55:09 PM	BCl3 valve closed
1/23/2012	3:55:09 PM	PH3 valve closed
1/23/2012	3:55:09 PM	SiCl4 pre valve closed
1/23/2012	3:55:09 PM	SiCl4 post valve closed
1/23/2012	3:55:09 PM	Bypass valve closed
1/23/2012	3:55:09 PM	Bubbler valve closed
1/23/2012	3:55:09 PM	Helium valve opened
1/23/2012	3:55:09 PM	Main Vac valve opened
1/23/2012	3:55:09 PM	Helium MFC set to  20.000000
1/23/2012	3:55:09 PM	H2 MFC set to  0.000000
1/23/2012	3:55:09 PM	BCl3 MFC set to  0.000000
1/23/2012	3:55:09 PM	PH3 MFC set to  0.000000
1/23/2012	3:55:09 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:55:09 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:55:09 PM	Tube furnace set to 150
1/23/2012	3:55:39 PM	Helium valve closed
1/23/2012	3:55:39 PM	H2 valve closed
1/23/2012	3:55:39 PM	BCl3 valve closed
1/23/2012	3:55:39 PM	PH3 valve closed
1/23/2012	3:55:39 PM	SiCl4 pre valve closed
1/23/2012	3:55:39 PM	SiCl4 post valve closed
1/23/2012	3:55:39 PM	Bypass valve closed
1/23/2012	3:55:39 PM	Bubbler valve closed
1/23/2012	3:55:39 PM	Main Vac valve opened
1/23/2012	3:55:39 PM	Helium MFC set to  0.000000
1/23/2012	3:55:39 PM	H2 MFC set to  0.000000
1/23/2012	3:55:39 PM	BCl3 MFC set to  0.000000
1/23/2012	3:55:39 PM	PH3 MFC set to  0.000000
1/23/2012	3:55:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:55:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:55:39 PM	Tube furnace set to 150
1/23/2012	3:56:09 PM	H2 valve closed
1/23/2012	3:56:09 PM	BCl3 valve closed
1/23/2012	3:56:09 PM	PH3 valve closed
1/23/2012	3:56:09 PM	SiCl4 pre valve closed
1/23/2012	3:56:09 PM	SiCl4 post valve closed
1/23/2012	3:56:09 PM	Bypass valve closed
1/23/2012	3:56:09 PM	Bubbler valve closed
1/23/2012	3:56:09 PM	Helium valve opened
1/23/2012	3:56:09 PM	Main Vac valve opened
1/23/2012	3:56:09 PM	Helium MFC set to  20.000000
1/23/2012	3:56:09 PM	H2 MFC set to  0.000000
1/23/2012	3:56:09 PM	BCl3 MFC set to  0.000000
1/23/2012	3:56:09 PM	PH3 MFC set to  0.000000
1/23/2012	3:56:09 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:56:09 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:56:10 PM	Tube furnace set to 150
1/23/2012	3:56:40 PM	Helium valve closed
1/23/2012	3:56:40 PM	H2 valve closed
1/23/2012	3:56:40 PM	BCl3 valve closed
1/23/2012	3:56:40 PM	PH3 valve closed
1/23/2012	3:56:40 PM	SiCl4 pre valve closed
1/23/2012	3:56:40 PM	SiCl4 post valve closed
1/23/2012	3:56:40 PM	Bypass valve closed
1/23/2012	3:56:40 PM	Bubbler valve closed
1/23/2012	3:56:40 PM	Main Vac valve opened
1/23/2012	3:56:40 PM	Helium MFC set to  0.000000
1/23/2012	3:56:40 PM	H2 MFC set to  0.000000
1/23/2012	3:56:40 PM	BCl3 MFC set to  0.000000
1/23/2012	3:56:40 PM	PH3 MFC set to  0.000000
1/23/2012	3:56:40 PM	SiCl4 MFC set to  0.000000
1/23/2012	3:56:40 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	3:56:40 PM	Tube furnace set to 150
1/23/2012	3:56:41 PM	Run finished at 3:56 PM
1/23/2012	4:12:56 PM	Main Vac valve closed
1/23/2012	4:13:30 PM	Main Vac valve opened
1/23/2012	4:14:19 PM	Recipe started at 4:14 PM
1/23/2012	4:14:19 PM	Helium valve closed
1/23/2012	4:14:19 PM	H2 valve closed
1/23/2012	4:14:19 PM	BCl3 valve closed
1/23/2012	4:14:19 PM	PH3 valve closed
1/23/2012	4:14:19 PM	SiCl4 pre valve closed
1/23/2012	4:14:19 PM	SiCl4 post valve closed
1/23/2012	4:14:19 PM	Main Vac valve closed
1/23/2012	4:14:19 PM	Bypass valve closed
1/23/2012	4:14:19 PM	Bubbler valve closed
1/23/2012	4:14:19 PM	Helium MFC set to  0.000000
1/23/2012	4:14:19 PM	H2 MFC set to  0.000000
1/23/2012	4:14:19 PM	BCl3 MFC set to  0.000000
1/23/2012	4:14:19 PM	PH3 MFC set to  0.000000
1/23/2012	4:14:19 PM	SiCl4 MFC set to  0.000000
1/23/2012	4:14:19 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	4:14:19 PM	Tube furnace set to 0
1/23/2012	4:14:22 PM	Helium valve closed
1/23/2012	4:14:22 PM	BCl3 valve closed
1/23/2012	4:14:22 PM	PH3 valve closed
1/23/2012	4:14:22 PM	SiCl4 pre valve closed
1/23/2012	4:14:22 PM	SiCl4 post valve closed
1/23/2012	4:14:22 PM	Main Vac valve closed
1/23/2012	4:14:22 PM	Bypass valve closed
1/23/2012	4:14:22 PM	Bubbler valve closed
1/23/2012	4:14:22 PM	H2 valve opened
1/23/2012	4:14:22 PM	Helium MFC set to  0.000000
1/23/2012	4:14:22 PM	H2 MFC set to  500.000000
1/23/2012	4:14:22 PM	BCl3 MFC set to  0.000000
1/23/2012	4:14:22 PM	PH3 MFC set to  0.000000
1/23/2012	4:14:22 PM	SiCl4 MFC set to  0.000000
1/23/2012	4:14:22 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	4:14:22 PM	Tube furnace set to 0
1/23/2012	4:15:27 PM	Helium valve closed
1/23/2012	4:15:27 PM	BCl3 valve closed
1/23/2012	4:15:27 PM	PH3 valve closed
1/23/2012	4:15:27 PM	SiCl4 pre valve closed
1/23/2012	4:15:27 PM	SiCl4 post valve closed
1/23/2012	4:15:27 PM	Main Vac valve closed
1/23/2012	4:15:27 PM	Bypass valve closed
1/23/2012	4:15:27 PM	H2 valve opened
1/23/2012	4:15:27 PM	Bubbler valve opened
1/23/2012	4:15:27 PM	Helium MFC set to  0.000000
1/23/2012	4:15:27 PM	H2 MFC set to  500.000000
1/23/2012	4:15:27 PM	BCl3 MFC set to  0.000000
1/23/2012	4:15:27 PM	PH3 MFC set to  0.000000
1/23/2012	4:15:27 PM	SiCl4 MFC set to  0.000000
1/23/2012	4:15:27 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	4:15:27 PM	Tube furnace set to 0
1/23/2012	4:15:28 PM	Helium valve closed
1/23/2012	4:15:28 PM	BCl3 valve closed
1/23/2012	4:15:28 PM	PH3 valve closed
1/23/2012	4:15:28 PM	SiCl4 pre valve closed
1/23/2012	4:15:28 PM	SiCl4 post valve closed
1/23/2012	4:15:28 PM	Main Vac valve closed
1/23/2012	4:15:28 PM	Bypass valve closed
1/23/2012	4:15:28 PM	H2 valve opened
1/23/2012	4:15:28 PM	Bubbler valve opened
1/23/2012	4:15:28 PM	Helium MFC set to  0.000000
1/23/2012	4:15:28 PM	H2 MFC set to  500.000000
1/23/2012	4:15:28 PM	BCl3 MFC set to  0.000000
1/23/2012	4:15:28 PM	PH3 MFC set to  0.000000
1/23/2012	4:15:28 PM	SiCl4 MFC set to  0.000000
1/23/2012	4:15:28 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	4:15:28 PM	Tube furnace set to 1000
1/23/2012	4:35:28 PM	Helium valve closed
1/23/2012	4:35:28 PM	BCl3 valve closed
1/23/2012	4:35:28 PM	Main Vac valve closed
1/23/2012	4:35:28 PM	Bypass valve closed
1/23/2012	4:35:28 PM	H2 valve opened
1/23/2012	4:35:28 PM	PH3 valve opened
1/23/2012	4:35:28 PM	SiCl4 pre valve opened
1/23/2012	4:35:28 PM	SiCl4 post valve opened
1/23/2012	4:35:28 PM	Bubbler valve opened
1/23/2012	4:35:28 PM	Helium MFC set to  0.000000
1/23/2012	4:35:28 PM	H2 MFC set to  500.000000
1/23/2012	4:35:28 PM	BCl3 MFC set to  0.000000
1/23/2012	4:35:28 PM	PH3 MFC set to  0.300000
1/23/2012	4:35:28 PM	SiCl4 MFC set to  25.000000
1/23/2012	4:35:28 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	4:35:29 PM	Tube furnace set to 1000
1/23/2012	4:55:29 PM	Helium valve closed
1/23/2012	4:55:29 PM	BCl3 valve closed
1/23/2012	4:55:29 PM	PH3 valve closed
1/23/2012	4:55:29 PM	SiCl4 pre valve closed
1/23/2012	4:55:29 PM	SiCl4 post valve closed
1/23/2012	4:55:29 PM	Main Vac valve closed
1/23/2012	4:55:29 PM	Bypass valve closed
1/23/2012	4:55:29 PM	H2 valve opened
1/23/2012	4:55:29 PM	Bubbler valve opened
1/23/2012	4:55:29 PM	Helium MFC set to  0.000000
1/23/2012	4:55:29 PM	H2 MFC set to  500.000000
1/23/2012	4:55:29 PM	BCl3 MFC set to  0.000000
1/23/2012	4:55:29 PM	PH3 MFC set to  0.000000
1/23/2012	4:55:29 PM	SiCl4 MFC set to  0.000000
1/23/2012	4:55:29 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	4:55:29 PM	Tube furnace set to 750
1/23/2012	5:00:29 PM	H2 valve closed
1/23/2012	5:00:29 PM	BCl3 valve closed
1/23/2012	5:00:29 PM	PH3 valve closed
1/23/2012	5:00:29 PM	SiCl4 pre valve closed
1/23/2012	5:00:29 PM	SiCl4 post valve closed
1/23/2012	5:00:29 PM	Main Vac valve closed
1/23/2012	5:00:29 PM	Bypass valve closed
1/23/2012	5:00:29 PM	Helium valve opened
1/23/2012	5:00:29 PM	Bubbler valve opened
1/23/2012	5:00:29 PM	Helium MFC set to  500.000000
1/23/2012	5:00:29 PM	H2 MFC set to  0.000000
1/23/2012	5:00:29 PM	BCl3 MFC set to  0.000000
1/23/2012	5:00:29 PM	PH3 MFC set to  0.000000
1/23/2012	5:00:29 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:00:29 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:00:29 PM	Tube furnace set to 0
1/23/2012	5:18:23 PM	Helium valve closed
1/23/2012	5:18:23 PM	H2 valve closed
1/23/2012	5:18:23 PM	BCl3 valve closed
1/23/2012	5:18:23 PM	PH3 valve closed
1/23/2012	5:18:23 PM	SiCl4 pre valve closed
1/23/2012	5:18:23 PM	SiCl4 post valve closed
1/23/2012	5:18:23 PM	Main Vac valve closed
1/23/2012	5:18:23 PM	Bypass valve closed
1/23/2012	5:18:23 PM	Bubbler valve closed
1/23/2012	5:18:23 PM	Helium MFC set to  0.000000
1/23/2012	5:18:23 PM	H2 MFC set to  0.000000
1/23/2012	5:18:23 PM	BCl3 MFC set to  0.000000
1/23/2012	5:18:23 PM	PH3 MFC set to  0.000000
1/23/2012	5:18:23 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:18:23 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:18:23 PM	Tube furnace set to 0
1/23/2012	5:18:24 PM	Run finished at 5:18 PM
1/23/2012	5:21:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	5:21:40 PM	Recipe started at 5:21 PM
1/23/2012	5:21:40 PM	Helium valve closed
1/23/2012	5:21:40 PM	H2 valve closed
1/23/2012	5:21:40 PM	BCl3 valve closed
1/23/2012	5:21:40 PM	PH3 valve closed
1/23/2012	5:21:40 PM	SiCl4 pre valve closed
1/23/2012	5:21:40 PM	SiCl4 post valve closed
1/23/2012	5:21:40 PM	Main Vac valve closed
1/23/2012	5:21:40 PM	Bubbler valve closed
1/23/2012	5:21:40 PM	Bypass valve opened
1/23/2012	5:21:40 PM	Helium MFC set to  0.000000
1/23/2012	5:21:40 PM	H2 MFC set to  0.000000
1/23/2012	5:21:40 PM	BCl3 MFC set to  0.000000
1/23/2012	5:21:40 PM	PH3 MFC set to  0.000000
1/23/2012	5:21:40 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:21:40 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:21:40 PM	Tube furnace set to 0
1/23/2012	5:22:37 PM	Helium valve closed
1/23/2012	5:22:37 PM	H2 valve closed
1/23/2012	5:22:37 PM	BCl3 valve closed
1/23/2012	5:22:37 PM	PH3 valve closed
1/23/2012	5:22:37 PM	SiCl4 pre valve closed
1/23/2012	5:22:37 PM	SiCl4 post valve closed
1/23/2012	5:22:37 PM	Main Vac valve closed
1/23/2012	5:22:37 PM	Bubbler valve closed
1/23/2012	5:22:37 PM	Bypass valve opened
1/23/2012	5:22:37 PM	Helium MFC set to  0.000000
1/23/2012	5:22:37 PM	H2 MFC set to  0.000000
1/23/2012	5:22:37 PM	BCl3 MFC set to  0.000000
1/23/2012	5:22:37 PM	PH3 MFC set to  0.000000
1/23/2012	5:22:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:22:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:22:37 PM	Tube furnace set to 0
1/23/2012	5:23:37 PM	Helium valve closed
1/23/2012	5:23:37 PM	H2 valve closed
1/23/2012	5:23:37 PM	BCl3 valve closed
1/23/2012	5:23:37 PM	PH3 valve closed
1/23/2012	5:23:37 PM	SiCl4 pre valve closed
1/23/2012	5:23:37 PM	SiCl4 post valve closed
1/23/2012	5:23:37 PM	Bypass valve closed
1/23/2012	5:23:37 PM	Bubbler valve closed
1/23/2012	5:23:37 PM	Main Vac valve opened
1/23/2012	5:23:37 PM	Helium MFC set to  0.000000
1/23/2012	5:23:37 PM	H2 MFC set to  0.000000
1/23/2012	5:23:37 PM	BCl3 MFC set to  0.000000
1/23/2012	5:23:37 PM	PH3 MFC set to  0.000000
1/23/2012	5:23:37 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:23:37 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:23:38 PM	Tube furnace set to 0
1/23/2012	5:23:39 PM	Run finished at 5:23 PM
1/23/2012	5:23:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	5:32:08 PM	Recipe started at 5:32 PM
1/23/2012	5:32:08 PM	Helium valve closed
1/23/2012	5:32:08 PM	H2 valve closed
1/23/2012	5:32:08 PM	BCl3 valve closed
1/23/2012	5:32:08 PM	PH3 valve closed
1/23/2012	5:32:08 PM	SiCl4 pre valve closed
1/23/2012	5:32:08 PM	SiCl4 post valve closed
1/23/2012	5:32:08 PM	Bypass valve closed
1/23/2012	5:32:08 PM	Bubbler valve closed
1/23/2012	5:32:08 PM	Main Vac valve opened
1/23/2012	5:32:08 PM	Helium MFC set to  0.000000
1/23/2012	5:32:08 PM	H2 MFC set to  0.000000
1/23/2012	5:32:08 PM	BCl3 MFC set to  0.000000
1/23/2012	5:32:08 PM	PH3 MFC set to  0.000000
1/23/2012	5:32:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:32:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:32:08 PM	Tube furnace set to 150
1/23/2012	5:32:38 PM	H2 valve closed
1/23/2012	5:32:38 PM	BCl3 valve closed
1/23/2012	5:32:38 PM	PH3 valve closed
1/23/2012	5:32:38 PM	SiCl4 pre valve closed
1/23/2012	5:32:38 PM	SiCl4 post valve closed
1/23/2012	5:32:38 PM	Bypass valve closed
1/23/2012	5:32:38 PM	Bubbler valve closed
1/23/2012	5:32:38 PM	Helium valve opened
1/23/2012	5:32:38 PM	Main Vac valve opened
1/23/2012	5:32:38 PM	Helium MFC set to  20.000000
1/23/2012	5:32:38 PM	H2 MFC set to  0.000000
1/23/2012	5:32:38 PM	BCl3 MFC set to  0.000000
1/23/2012	5:32:38 PM	PH3 MFC set to  0.000000
1/23/2012	5:32:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:32:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:32:38 PM	Tube furnace set to 150
1/23/2012	5:33:08 PM	Helium valve closed
1/23/2012	5:33:08 PM	H2 valve closed
1/23/2012	5:33:08 PM	BCl3 valve closed
1/23/2012	5:33:08 PM	PH3 valve closed
1/23/2012	5:33:08 PM	SiCl4 pre valve closed
1/23/2012	5:33:08 PM	SiCl4 post valve closed
1/23/2012	5:33:08 PM	Bypass valve closed
1/23/2012	5:33:08 PM	Bubbler valve closed
1/23/2012	5:33:08 PM	Main Vac valve opened
1/23/2012	5:33:08 PM	Helium MFC set to  0.000000
1/23/2012	5:33:08 PM	H2 MFC set to  0.000000
1/23/2012	5:33:08 PM	BCl3 MFC set to  0.000000
1/23/2012	5:33:08 PM	PH3 MFC set to  0.000000
1/23/2012	5:33:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:33:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:33:08 PM	Tube furnace set to 150
1/23/2012	5:33:38 PM	H2 valve closed
1/23/2012	5:33:38 PM	BCl3 valve closed
1/23/2012	5:33:38 PM	PH3 valve closed
1/23/2012	5:33:38 PM	SiCl4 pre valve closed
1/23/2012	5:33:38 PM	SiCl4 post valve closed
1/23/2012	5:33:38 PM	Bypass valve closed
1/23/2012	5:33:38 PM	Bubbler valve closed
1/23/2012	5:33:38 PM	Helium valve opened
1/23/2012	5:33:38 PM	Main Vac valve opened
1/23/2012	5:33:38 PM	Helium MFC set to  20.000000
1/23/2012	5:33:38 PM	H2 MFC set to  0.000000
1/23/2012	5:33:38 PM	BCl3 MFC set to  0.000000
1/23/2012	5:33:38 PM	PH3 MFC set to  0.000000
1/23/2012	5:33:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:33:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:33:38 PM	Tube furnace set to 150
1/23/2012	5:34:08 PM	Helium valve closed
1/23/2012	5:34:08 PM	H2 valve closed
1/23/2012	5:34:08 PM	BCl3 valve closed
1/23/2012	5:34:08 PM	PH3 valve closed
1/23/2012	5:34:08 PM	SiCl4 pre valve closed
1/23/2012	5:34:08 PM	SiCl4 post valve closed
1/23/2012	5:34:08 PM	Bypass valve closed
1/23/2012	5:34:08 PM	Bubbler valve closed
1/23/2012	5:34:08 PM	Main Vac valve opened
1/23/2012	5:34:08 PM	Helium MFC set to  0.000000
1/23/2012	5:34:08 PM	H2 MFC set to  0.000000
1/23/2012	5:34:08 PM	BCl3 MFC set to  0.000000
1/23/2012	5:34:08 PM	PH3 MFC set to  0.000000
1/23/2012	5:34:08 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:34:08 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:34:09 PM	Tube furnace set to 150
1/23/2012	5:34:39 PM	H2 valve closed
1/23/2012	5:34:39 PM	BCl3 valve closed
1/23/2012	5:34:39 PM	PH3 valve closed
1/23/2012	5:34:39 PM	SiCl4 pre valve closed
1/23/2012	5:34:39 PM	SiCl4 post valve closed
1/23/2012	5:34:39 PM	Bypass valve closed
1/23/2012	5:34:39 PM	Bubbler valve closed
1/23/2012	5:34:39 PM	Helium valve opened
1/23/2012	5:34:39 PM	Main Vac valve opened
1/23/2012	5:34:39 PM	Helium MFC set to  20.000000
1/23/2012	5:34:39 PM	H2 MFC set to  0.000000
1/23/2012	5:34:39 PM	BCl3 MFC set to  0.000000
1/23/2012	5:34:39 PM	PH3 MFC set to  0.000000
1/23/2012	5:34:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:34:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:34:39 PM	Tube furnace set to 150
1/23/2012	5:35:09 PM	Helium valve closed
1/23/2012	5:35:09 PM	H2 valve closed
1/23/2012	5:35:09 PM	BCl3 valve closed
1/23/2012	5:35:09 PM	PH3 valve closed
1/23/2012	5:35:09 PM	SiCl4 pre valve closed
1/23/2012	5:35:09 PM	SiCl4 post valve closed
1/23/2012	5:35:09 PM	Bypass valve closed
1/23/2012	5:35:09 PM	Bubbler valve closed
1/23/2012	5:35:09 PM	Main Vac valve opened
1/23/2012	5:35:09 PM	Helium MFC set to  0.000000
1/23/2012	5:35:09 PM	H2 MFC set to  0.000000
1/23/2012	5:35:09 PM	BCl3 MFC set to  0.000000
1/23/2012	5:35:09 PM	PH3 MFC set to  0.000000
1/23/2012	5:35:09 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:35:09 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:35:09 PM	Tube furnace set to 150
1/23/2012	5:35:39 PM	H2 valve closed
1/23/2012	5:35:39 PM	BCl3 valve closed
1/23/2012	5:35:39 PM	PH3 valve closed
1/23/2012	5:35:39 PM	SiCl4 pre valve closed
1/23/2012	5:35:39 PM	SiCl4 post valve closed
1/23/2012	5:35:39 PM	Bypass valve closed
1/23/2012	5:35:39 PM	Bubbler valve closed
1/23/2012	5:35:39 PM	Helium valve opened
1/23/2012	5:35:39 PM	Main Vac valve opened
1/23/2012	5:35:39 PM	Helium MFC set to  20.000000
1/23/2012	5:35:39 PM	H2 MFC set to  0.000000
1/23/2012	5:35:39 PM	BCl3 MFC set to  0.000000
1/23/2012	5:35:39 PM	PH3 MFC set to  0.000000
1/23/2012	5:35:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:35:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:35:39 PM	Tube furnace set to 150
1/23/2012	5:36:09 PM	Helium valve closed
1/23/2012	5:36:09 PM	H2 valve closed
1/23/2012	5:36:09 PM	BCl3 valve closed
1/23/2012	5:36:09 PM	PH3 valve closed
1/23/2012	5:36:09 PM	SiCl4 pre valve closed
1/23/2012	5:36:09 PM	SiCl4 post valve closed
1/23/2012	5:36:09 PM	Bypass valve closed
1/23/2012	5:36:09 PM	Bubbler valve closed
1/23/2012	5:36:09 PM	Main Vac valve opened
1/23/2012	5:36:09 PM	Helium MFC set to  0.000000
1/23/2012	5:36:09 PM	H2 MFC set to  0.000000
1/23/2012	5:36:09 PM	BCl3 MFC set to  0.000000
1/23/2012	5:36:09 PM	PH3 MFC set to  0.000000
1/23/2012	5:36:09 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:36:09 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:36:09 PM	Tube furnace set to 150
1/23/2012	5:36:39 PM	H2 valve closed
1/23/2012	5:36:39 PM	BCl3 valve closed
1/23/2012	5:36:39 PM	PH3 valve closed
1/23/2012	5:36:39 PM	SiCl4 pre valve closed
1/23/2012	5:36:39 PM	SiCl4 post valve closed
1/23/2012	5:36:39 PM	Bypass valve closed
1/23/2012	5:36:39 PM	Bubbler valve closed
1/23/2012	5:36:39 PM	Helium valve opened
1/23/2012	5:36:39 PM	Main Vac valve opened
1/23/2012	5:36:39 PM	Helium MFC set to  20.000000
1/23/2012	5:36:39 PM	H2 MFC set to  0.000000
1/23/2012	5:36:39 PM	BCl3 MFC set to  0.000000
1/23/2012	5:36:39 PM	PH3 MFC set to  0.000000
1/23/2012	5:36:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:36:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:36:40 PM	Tube furnace set to 150
1/23/2012	5:37:10 PM	Helium valve closed
1/23/2012	5:37:10 PM	H2 valve closed
1/23/2012	5:37:10 PM	BCl3 valve closed
1/23/2012	5:37:10 PM	PH3 valve closed
1/23/2012	5:37:10 PM	SiCl4 pre valve closed
1/23/2012	5:37:10 PM	SiCl4 post valve closed
1/23/2012	5:37:10 PM	Bypass valve closed
1/23/2012	5:37:10 PM	Bubbler valve closed
1/23/2012	5:37:10 PM	Main Vac valve opened
1/23/2012	5:37:10 PM	Helium MFC set to  0.000000
1/23/2012	5:37:10 PM	H2 MFC set to  0.000000
1/23/2012	5:37:10 PM	BCl3 MFC set to  0.000000
1/23/2012	5:37:10 PM	PH3 MFC set to  0.000000
1/23/2012	5:37:10 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:37:10 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:37:10 PM	Tube furnace set to 150
1/23/2012	5:37:40 PM	H2 valve closed
1/23/2012	5:37:40 PM	BCl3 valve closed
1/23/2012	5:37:40 PM	PH3 valve closed
1/23/2012	5:37:40 PM	SiCl4 pre valve closed
1/23/2012	5:37:40 PM	SiCl4 post valve closed
1/23/2012	5:37:40 PM	Bypass valve closed
1/23/2012	5:37:40 PM	Bubbler valve closed
1/23/2012	5:37:40 PM	Helium valve opened
1/23/2012	5:37:40 PM	Main Vac valve opened
1/23/2012	5:37:40 PM	Helium MFC set to  20.000000
1/23/2012	5:37:40 PM	H2 MFC set to  0.000000
1/23/2012	5:37:40 PM	BCl3 MFC set to  0.000000
1/23/2012	5:37:40 PM	PH3 MFC set to  0.000000
1/23/2012	5:37:40 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:37:40 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:37:40 PM	Tube furnace set to 150
1/23/2012	5:38:10 PM	Helium valve closed
1/23/2012	5:38:10 PM	H2 valve closed
1/23/2012	5:38:10 PM	BCl3 valve closed
1/23/2012	5:38:10 PM	PH3 valve closed
1/23/2012	5:38:10 PM	SiCl4 pre valve closed
1/23/2012	5:38:10 PM	SiCl4 post valve closed
1/23/2012	5:38:10 PM	Bypass valve closed
1/23/2012	5:38:10 PM	Bubbler valve closed
1/23/2012	5:38:10 PM	Main Vac valve opened
1/23/2012	5:38:10 PM	Helium MFC set to  0.000000
1/23/2012	5:38:10 PM	H2 MFC set to  0.000000
1/23/2012	5:38:10 PM	BCl3 MFC set to  0.000000
1/23/2012	5:38:10 PM	PH3 MFC set to  0.000000
1/23/2012	5:38:10 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:38:10 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:38:10 PM	Tube furnace set to 150
1/23/2012	5:38:40 PM	H2 valve closed
1/23/2012	5:38:40 PM	BCl3 valve closed
1/23/2012	5:38:40 PM	PH3 valve closed
1/23/2012	5:38:40 PM	SiCl4 pre valve closed
1/23/2012	5:38:40 PM	SiCl4 post valve closed
1/23/2012	5:38:40 PM	Bypass valve closed
1/23/2012	5:38:40 PM	Bubbler valve closed
1/23/2012	5:38:40 PM	Helium valve opened
1/23/2012	5:38:40 PM	Main Vac valve opened
1/23/2012	5:38:40 PM	Helium MFC set to  20.000000
1/23/2012	5:38:40 PM	H2 MFC set to  0.000000
1/23/2012	5:38:40 PM	BCl3 MFC set to  0.000000
1/23/2012	5:38:40 PM	PH3 MFC set to  0.000000
1/23/2012	5:38:40 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:38:40 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:38:40 PM	Tube furnace set to 150
1/23/2012	5:39:10 PM	Helium valve closed
1/23/2012	5:39:10 PM	H2 valve closed
1/23/2012	5:39:10 PM	BCl3 valve closed
1/23/2012	5:39:10 PM	PH3 valve closed
1/23/2012	5:39:10 PM	SiCl4 pre valve closed
1/23/2012	5:39:10 PM	SiCl4 post valve closed
1/23/2012	5:39:10 PM	Bypass valve closed
1/23/2012	5:39:10 PM	Bubbler valve closed
1/23/2012	5:39:10 PM	Main Vac valve opened
1/23/2012	5:39:10 PM	Helium MFC set to  0.000000
1/23/2012	5:39:10 PM	H2 MFC set to  0.000000
1/23/2012	5:39:10 PM	BCl3 MFC set to  0.000000
1/23/2012	5:39:10 PM	PH3 MFC set to  0.000000
1/23/2012	5:39:10 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:39:10 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:39:11 PM	Tube furnace set to 150
1/23/2012	5:39:41 PM	H2 valve closed
1/23/2012	5:39:41 PM	BCl3 valve closed
1/23/2012	5:39:41 PM	PH3 valve closed
1/23/2012	5:39:41 PM	SiCl4 pre valve closed
1/23/2012	5:39:41 PM	SiCl4 post valve closed
1/23/2012	5:39:41 PM	Bypass valve closed
1/23/2012	5:39:41 PM	Bubbler valve closed
1/23/2012	5:39:41 PM	Helium valve opened
1/23/2012	5:39:41 PM	Main Vac valve opened
1/23/2012	5:39:41 PM	Helium MFC set to  20.000000
1/23/2012	5:39:41 PM	H2 MFC set to  0.000000
1/23/2012	5:39:41 PM	BCl3 MFC set to  0.000000
1/23/2012	5:39:41 PM	PH3 MFC set to  0.000000
1/23/2012	5:39:41 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:39:41 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:39:41 PM	Tube furnace set to 150
1/23/2012	5:40:11 PM	Helium valve closed
1/23/2012	5:40:11 PM	H2 valve closed
1/23/2012	5:40:11 PM	BCl3 valve closed
1/23/2012	5:40:11 PM	PH3 valve closed
1/23/2012	5:40:11 PM	SiCl4 pre valve closed
1/23/2012	5:40:11 PM	SiCl4 post valve closed
1/23/2012	5:40:11 PM	Bypass valve closed
1/23/2012	5:40:11 PM	Bubbler valve closed
1/23/2012	5:40:11 PM	Main Vac valve opened
1/23/2012	5:40:11 PM	Helium MFC set to  0.000000
1/23/2012	5:40:11 PM	H2 MFC set to  0.000000
1/23/2012	5:40:11 PM	BCl3 MFC set to  0.000000
1/23/2012	5:40:11 PM	PH3 MFC set to  0.000000
1/23/2012	5:40:11 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:40:11 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:40:11 PM	Tube furnace set to 150
1/23/2012	5:40:41 PM	H2 valve closed
1/23/2012	5:40:41 PM	BCl3 valve closed
1/23/2012	5:40:41 PM	PH3 valve closed
1/23/2012	5:40:41 PM	SiCl4 pre valve closed
1/23/2012	5:40:41 PM	SiCl4 post valve closed
1/23/2012	5:40:41 PM	Bypass valve closed
1/23/2012	5:40:41 PM	Bubbler valve closed
1/23/2012	5:40:41 PM	Helium valve opened
1/23/2012	5:40:41 PM	Main Vac valve opened
1/23/2012	5:40:41 PM	Helium MFC set to  20.000000
1/23/2012	5:40:41 PM	H2 MFC set to  0.000000
1/23/2012	5:40:41 PM	BCl3 MFC set to  0.000000
1/23/2012	5:40:41 PM	PH3 MFC set to  0.000000
1/23/2012	5:40:41 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:40:41 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:40:41 PM	Tube furnace set to 150
1/23/2012	5:41:11 PM	Helium valve closed
1/23/2012	5:41:11 PM	H2 valve closed
1/23/2012	5:41:11 PM	BCl3 valve closed
1/23/2012	5:41:11 PM	PH3 valve closed
1/23/2012	5:41:11 PM	SiCl4 pre valve closed
1/23/2012	5:41:11 PM	SiCl4 post valve closed
1/23/2012	5:41:11 PM	Bypass valve closed
1/23/2012	5:41:11 PM	Bubbler valve closed
1/23/2012	5:41:11 PM	Main Vac valve opened
1/23/2012	5:41:11 PM	Helium MFC set to  0.000000
1/23/2012	5:41:11 PM	H2 MFC set to  0.000000
1/23/2012	5:41:11 PM	BCl3 MFC set to  0.000000
1/23/2012	5:41:11 PM	PH3 MFC set to  0.000000
1/23/2012	5:41:11 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:41:11 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:41:11 PM	Tube furnace set to 150
1/23/2012	5:41:41 PM	H2 valve closed
1/23/2012	5:41:41 PM	BCl3 valve closed
1/23/2012	5:41:41 PM	PH3 valve closed
1/23/2012	5:41:41 PM	SiCl4 pre valve closed
1/23/2012	5:41:41 PM	SiCl4 post valve closed
1/23/2012	5:41:41 PM	Bypass valve closed
1/23/2012	5:41:41 PM	Bubbler valve closed
1/23/2012	5:41:41 PM	Helium valve opened
1/23/2012	5:41:41 PM	Main Vac valve opened
1/23/2012	5:41:41 PM	Helium MFC set to  20.000000
1/23/2012	5:41:41 PM	H2 MFC set to  0.000000
1/23/2012	5:41:41 PM	BCl3 MFC set to  0.000000
1/23/2012	5:41:41 PM	PH3 MFC set to  0.000000
1/23/2012	5:41:41 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:41:41 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:41:42 PM	Tube furnace set to 150
1/23/2012	5:42:12 PM	Helium valve closed
1/23/2012	5:42:12 PM	H2 valve closed
1/23/2012	5:42:12 PM	BCl3 valve closed
1/23/2012	5:42:12 PM	PH3 valve closed
1/23/2012	5:42:12 PM	SiCl4 pre valve closed
1/23/2012	5:42:12 PM	SiCl4 post valve closed
1/23/2012	5:42:12 PM	Bypass valve closed
1/23/2012	5:42:12 PM	Bubbler valve closed
1/23/2012	5:42:12 PM	Main Vac valve opened
1/23/2012	5:42:12 PM	Helium MFC set to  0.000000
1/23/2012	5:42:12 PM	H2 MFC set to  0.000000
1/23/2012	5:42:12 PM	BCl3 MFC set to  0.000000
1/23/2012	5:42:12 PM	PH3 MFC set to  0.000000
1/23/2012	5:42:12 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:42:12 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:42:12 PM	Tube furnace set to 150
1/23/2012	5:42:13 PM	Run finished at 5:42 PM
1/23/2012	5:45:31 PM	Recipe started at 5:45 PM
1/23/2012	5:45:31 PM	Helium valve closed
1/23/2012	5:45:31 PM	H2 valve closed
1/23/2012	5:45:31 PM	BCl3 valve closed
1/23/2012	5:45:31 PM	PH3 valve closed
1/23/2012	5:45:31 PM	SiCl4 pre valve closed
1/23/2012	5:45:31 PM	SiCl4 post valve closed
1/23/2012	5:45:31 PM	Bypass valve closed
1/23/2012	5:45:31 PM	Bubbler valve closed
1/23/2012	5:45:31 PM	Main Vac valve opened
1/23/2012	5:45:31 PM	Helium MFC set to  0.000000
1/23/2012	5:45:31 PM	H2 MFC set to  0.000000
1/23/2012	5:45:31 PM	BCl3 MFC set to  0.000000
1/23/2012	5:45:31 PM	PH3 MFC set to  0.000000
1/23/2012	5:45:31 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:45:31 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:45:31 PM	Tube furnace set to 150
1/23/2012	5:46:01 PM	H2 valve closed
1/23/2012	5:46:01 PM	BCl3 valve closed
1/23/2012	5:46:01 PM	PH3 valve closed
1/23/2012	5:46:01 PM	SiCl4 pre valve closed
1/23/2012	5:46:01 PM	SiCl4 post valve closed
1/23/2012	5:46:01 PM	Bypass valve closed
1/23/2012	5:46:01 PM	Bubbler valve closed
1/23/2012	5:46:01 PM	Helium valve opened
1/23/2012	5:46:01 PM	Main Vac valve opened
1/23/2012	5:46:01 PM	Helium MFC set to  20.000000
1/23/2012	5:46:01 PM	H2 MFC set to  0.000000
1/23/2012	5:46:01 PM	BCl3 MFC set to  0.000000
1/23/2012	5:46:01 PM	PH3 MFC set to  0.000000
1/23/2012	5:46:01 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:46:01 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:46:01 PM	Tube furnace set to 150
1/23/2012	5:46:32 PM	Helium valve closed
1/23/2012	5:46:32 PM	H2 valve closed
1/23/2012	5:46:32 PM	BCl3 valve closed
1/23/2012	5:46:32 PM	PH3 valve closed
1/23/2012	5:46:32 PM	SiCl4 pre valve closed
1/23/2012	5:46:32 PM	SiCl4 post valve closed
1/23/2012	5:46:32 PM	Bypass valve closed
1/23/2012	5:46:32 PM	Bubbler valve closed
1/23/2012	5:46:32 PM	Main Vac valve opened
1/23/2012	5:46:32 PM	Helium MFC set to  0.000000
1/23/2012	5:46:32 PM	H2 MFC set to  0.000000
1/23/2012	5:46:32 PM	BCl3 MFC set to  0.000000
1/23/2012	5:46:32 PM	PH3 MFC set to  0.000000
1/23/2012	5:46:32 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:46:32 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:46:32 PM	Tube furnace set to 150
1/23/2012	5:47:02 PM	H2 valve closed
1/23/2012	5:47:02 PM	BCl3 valve closed
1/23/2012	5:47:02 PM	PH3 valve closed
1/23/2012	5:47:02 PM	SiCl4 pre valve closed
1/23/2012	5:47:02 PM	SiCl4 post valve closed
1/23/2012	5:47:02 PM	Bypass valve closed
1/23/2012	5:47:02 PM	Bubbler valve closed
1/23/2012	5:47:02 PM	Helium valve opened
1/23/2012	5:47:02 PM	Main Vac valve opened
1/23/2012	5:47:02 PM	Helium MFC set to  20.000000
1/23/2012	5:47:02 PM	H2 MFC set to  0.000000
1/23/2012	5:47:02 PM	BCl3 MFC set to  0.000000
1/23/2012	5:47:02 PM	PH3 MFC set to  0.000000
1/23/2012	5:47:02 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:47:02 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:47:02 PM	Tube furnace set to 150
1/23/2012	5:47:32 PM	Helium valve closed
1/23/2012	5:47:32 PM	H2 valve closed
1/23/2012	5:47:32 PM	BCl3 valve closed
1/23/2012	5:47:32 PM	PH3 valve closed
1/23/2012	5:47:32 PM	SiCl4 pre valve closed
1/23/2012	5:47:32 PM	SiCl4 post valve closed
1/23/2012	5:47:32 PM	Bypass valve closed
1/23/2012	5:47:32 PM	Bubbler valve closed
1/23/2012	5:47:32 PM	Main Vac valve opened
1/23/2012	5:47:32 PM	Helium MFC set to  0.000000
1/23/2012	5:47:32 PM	H2 MFC set to  0.000000
1/23/2012	5:47:32 PM	BCl3 MFC set to  0.000000
1/23/2012	5:47:32 PM	PH3 MFC set to  0.000000
1/23/2012	5:47:32 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:47:32 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:47:32 PM	Tube furnace set to 150
1/23/2012	5:48:02 PM	H2 valve closed
1/23/2012	5:48:02 PM	BCl3 valve closed
1/23/2012	5:48:02 PM	PH3 valve closed
1/23/2012	5:48:02 PM	SiCl4 pre valve closed
1/23/2012	5:48:02 PM	SiCl4 post valve closed
1/23/2012	5:48:02 PM	Bypass valve closed
1/23/2012	5:48:02 PM	Bubbler valve closed
1/23/2012	5:48:02 PM	Helium valve opened
1/23/2012	5:48:02 PM	Main Vac valve opened
1/23/2012	5:48:02 PM	Helium MFC set to  20.000000
1/23/2012	5:48:02 PM	H2 MFC set to  0.000000
1/23/2012	5:48:02 PM	BCl3 MFC set to  0.000000
1/23/2012	5:48:02 PM	PH3 MFC set to  0.000000
1/23/2012	5:48:02 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:48:02 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:48:02 PM	Tube furnace set to 150
1/23/2012	5:48:32 PM	Helium valve closed
1/23/2012	5:48:32 PM	H2 valve closed
1/23/2012	5:48:32 PM	BCl3 valve closed
1/23/2012	5:48:32 PM	PH3 valve closed
1/23/2012	5:48:32 PM	SiCl4 pre valve closed
1/23/2012	5:48:32 PM	SiCl4 post valve closed
1/23/2012	5:48:32 PM	Bypass valve closed
1/23/2012	5:48:32 PM	Bubbler valve closed
1/23/2012	5:48:32 PM	Main Vac valve opened
1/23/2012	5:48:32 PM	Helium MFC set to  0.000000
1/23/2012	5:48:32 PM	H2 MFC set to  0.000000
1/23/2012	5:48:32 PM	BCl3 MFC set to  0.000000
1/23/2012	5:48:32 PM	PH3 MFC set to  0.000000
1/23/2012	5:48:32 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:48:32 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:48:33 PM	Tube furnace set to 150
1/23/2012	5:49:03 PM	H2 valve closed
1/23/2012	5:49:03 PM	BCl3 valve closed
1/23/2012	5:49:03 PM	PH3 valve closed
1/23/2012	5:49:03 PM	SiCl4 pre valve closed
1/23/2012	5:49:03 PM	SiCl4 post valve closed
1/23/2012	5:49:03 PM	Bypass valve closed
1/23/2012	5:49:03 PM	Bubbler valve closed
1/23/2012	5:49:03 PM	Helium valve opened
1/23/2012	5:49:03 PM	Main Vac valve opened
1/23/2012	5:49:03 PM	Helium MFC set to  20.000000
1/23/2012	5:49:03 PM	H2 MFC set to  0.000000
1/23/2012	5:49:03 PM	BCl3 MFC set to  0.000000
1/23/2012	5:49:03 PM	PH3 MFC set to  0.000000
1/23/2012	5:49:03 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:49:03 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:49:03 PM	Tube furnace set to 150
1/23/2012	5:49:33 PM	Helium valve closed
1/23/2012	5:49:33 PM	H2 valve closed
1/23/2012	5:49:33 PM	BCl3 valve closed
1/23/2012	5:49:33 PM	PH3 valve closed
1/23/2012	5:49:33 PM	SiCl4 pre valve closed
1/23/2012	5:49:33 PM	SiCl4 post valve closed
1/23/2012	5:49:33 PM	Bypass valve closed
1/23/2012	5:49:33 PM	Bubbler valve closed
1/23/2012	5:49:33 PM	Main Vac valve opened
1/23/2012	5:49:33 PM	Helium MFC set to  0.000000
1/23/2012	5:49:33 PM	H2 MFC set to  0.000000
1/23/2012	5:49:33 PM	BCl3 MFC set to  0.000000
1/23/2012	5:49:33 PM	PH3 MFC set to  0.000000
1/23/2012	5:49:33 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:49:33 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:49:33 PM	Tube furnace set to 150
1/23/2012	5:50:03 PM	H2 valve closed
1/23/2012	5:50:03 PM	BCl3 valve closed
1/23/2012	5:50:03 PM	PH3 valve closed
1/23/2012	5:50:03 PM	SiCl4 pre valve closed
1/23/2012	5:50:03 PM	SiCl4 post valve closed
1/23/2012	5:50:03 PM	Bypass valve closed
1/23/2012	5:50:03 PM	Bubbler valve closed
1/23/2012	5:50:03 PM	Helium valve opened
1/23/2012	5:50:03 PM	Main Vac valve opened
1/23/2012	5:50:03 PM	Helium MFC set to  20.000000
1/23/2012	5:50:03 PM	H2 MFC set to  0.000000
1/23/2012	5:50:03 PM	BCl3 MFC set to  0.000000
1/23/2012	5:50:03 PM	PH3 MFC set to  0.000000
1/23/2012	5:50:03 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:50:03 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:50:03 PM	Tube furnace set to 150
1/23/2012	5:50:33 PM	Helium valve closed
1/23/2012	5:50:33 PM	H2 valve closed
1/23/2012	5:50:33 PM	BCl3 valve closed
1/23/2012	5:50:33 PM	PH3 valve closed
1/23/2012	5:50:33 PM	SiCl4 pre valve closed
1/23/2012	5:50:33 PM	SiCl4 post valve closed
1/23/2012	5:50:33 PM	Bypass valve closed
1/23/2012	5:50:33 PM	Bubbler valve closed
1/23/2012	5:50:33 PM	Main Vac valve opened
1/23/2012	5:50:33 PM	Helium MFC set to  0.000000
1/23/2012	5:50:33 PM	H2 MFC set to  0.000000
1/23/2012	5:50:33 PM	BCl3 MFC set to  0.000000
1/23/2012	5:50:33 PM	PH3 MFC set to  0.000000
1/23/2012	5:50:33 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:50:33 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:50:33 PM	Tube furnace set to 150
1/23/2012	5:51:03 PM	H2 valve closed
1/23/2012	5:51:03 PM	BCl3 valve closed
1/23/2012	5:51:03 PM	PH3 valve closed
1/23/2012	5:51:03 PM	SiCl4 pre valve closed
1/23/2012	5:51:03 PM	SiCl4 post valve closed
1/23/2012	5:51:03 PM	Bypass valve closed
1/23/2012	5:51:03 PM	Bubbler valve closed
1/23/2012	5:51:03 PM	Helium valve opened
1/23/2012	5:51:03 PM	Main Vac valve opened
1/23/2012	5:51:03 PM	Helium MFC set to  20.000000
1/23/2012	5:51:03 PM	H2 MFC set to  0.000000
1/23/2012	5:51:03 PM	BCl3 MFC set to  0.000000
1/23/2012	5:51:03 PM	PH3 MFC set to  0.000000
1/23/2012	5:51:03 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:51:03 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:51:04 PM	Tube furnace set to 150
1/23/2012	5:51:34 PM	Helium valve closed
1/23/2012	5:51:34 PM	H2 valve closed
1/23/2012	5:51:34 PM	BCl3 valve closed
1/23/2012	5:51:34 PM	PH3 valve closed
1/23/2012	5:51:34 PM	SiCl4 pre valve closed
1/23/2012	5:51:34 PM	SiCl4 post valve closed
1/23/2012	5:51:34 PM	Bypass valve closed
1/23/2012	5:51:34 PM	Bubbler valve closed
1/23/2012	5:51:34 PM	Main Vac valve opened
1/23/2012	5:51:34 PM	Helium MFC set to  0.000000
1/23/2012	5:51:34 PM	H2 MFC set to  0.000000
1/23/2012	5:51:34 PM	BCl3 MFC set to  0.000000
1/23/2012	5:51:34 PM	PH3 MFC set to  0.000000
1/23/2012	5:51:34 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:51:34 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:51:34 PM	Tube furnace set to 150
1/23/2012	5:52:04 PM	H2 valve closed
1/23/2012	5:52:04 PM	BCl3 valve closed
1/23/2012	5:52:04 PM	PH3 valve closed
1/23/2012	5:52:04 PM	SiCl4 pre valve closed
1/23/2012	5:52:04 PM	SiCl4 post valve closed
1/23/2012	5:52:04 PM	Bypass valve closed
1/23/2012	5:52:04 PM	Bubbler valve closed
1/23/2012	5:52:04 PM	Helium valve opened
1/23/2012	5:52:04 PM	Main Vac valve opened
1/23/2012	5:52:04 PM	Helium MFC set to  20.000000
1/23/2012	5:52:04 PM	H2 MFC set to  0.000000
1/23/2012	5:52:04 PM	BCl3 MFC set to  0.000000
1/23/2012	5:52:04 PM	PH3 MFC set to  0.000000
1/23/2012	5:52:04 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:52:04 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:52:04 PM	Tube furnace set to 150
1/23/2012	5:52:34 PM	Helium valve closed
1/23/2012	5:52:34 PM	H2 valve closed
1/23/2012	5:52:34 PM	BCl3 valve closed
1/23/2012	5:52:34 PM	PH3 valve closed
1/23/2012	5:52:34 PM	SiCl4 pre valve closed
1/23/2012	5:52:34 PM	SiCl4 post valve closed
1/23/2012	5:52:34 PM	Bypass valve closed
1/23/2012	5:52:34 PM	Bubbler valve closed
1/23/2012	5:52:34 PM	Main Vac valve opened
1/23/2012	5:52:34 PM	Helium MFC set to  0.000000
1/23/2012	5:52:34 PM	H2 MFC set to  0.000000
1/23/2012	5:52:34 PM	BCl3 MFC set to  0.000000
1/23/2012	5:52:34 PM	PH3 MFC set to  0.000000
1/23/2012	5:52:34 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:52:34 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:52:34 PM	Tube furnace set to 150
1/23/2012	5:53:04 PM	H2 valve closed
1/23/2012	5:53:04 PM	BCl3 valve closed
1/23/2012	5:53:04 PM	PH3 valve closed
1/23/2012	5:53:04 PM	SiCl4 pre valve closed
1/23/2012	5:53:04 PM	SiCl4 post valve closed
1/23/2012	5:53:04 PM	Bypass valve closed
1/23/2012	5:53:04 PM	Bubbler valve closed
1/23/2012	5:53:04 PM	Helium valve opened
1/23/2012	5:53:04 PM	Main Vac valve opened
1/23/2012	5:53:04 PM	Helium MFC set to  20.000000
1/23/2012	5:53:04 PM	H2 MFC set to  0.000000
1/23/2012	5:53:04 PM	BCl3 MFC set to  0.000000
1/23/2012	5:53:04 PM	PH3 MFC set to  0.000000
1/23/2012	5:53:04 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:53:04 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:53:04 PM	Tube furnace set to 150
1/23/2012	5:53:34 PM	Helium valve closed
1/23/2012	5:53:34 PM	H2 valve closed
1/23/2012	5:53:34 PM	BCl3 valve closed
1/23/2012	5:53:34 PM	PH3 valve closed
1/23/2012	5:53:34 PM	SiCl4 pre valve closed
1/23/2012	5:53:34 PM	SiCl4 post valve closed
1/23/2012	5:53:34 PM	Bypass valve closed
1/23/2012	5:53:34 PM	Bubbler valve closed
1/23/2012	5:53:34 PM	Main Vac valve opened
1/23/2012	5:53:34 PM	Helium MFC set to  0.000000
1/23/2012	5:53:34 PM	H2 MFC set to  0.000000
1/23/2012	5:53:34 PM	BCl3 MFC set to  0.000000
1/23/2012	5:53:34 PM	PH3 MFC set to  0.000000
1/23/2012	5:53:34 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:53:34 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:53:35 PM	Tube furnace set to 150
1/23/2012	5:54:05 PM	H2 valve closed
1/23/2012	5:54:05 PM	BCl3 valve closed
1/23/2012	5:54:05 PM	PH3 valve closed
1/23/2012	5:54:05 PM	SiCl4 pre valve closed
1/23/2012	5:54:05 PM	SiCl4 post valve closed
1/23/2012	5:54:05 PM	Bypass valve closed
1/23/2012	5:54:05 PM	Bubbler valve closed
1/23/2012	5:54:05 PM	Helium valve opened
1/23/2012	5:54:05 PM	Main Vac valve opened
1/23/2012	5:54:05 PM	Helium MFC set to  20.000000
1/23/2012	5:54:05 PM	H2 MFC set to  0.000000
1/23/2012	5:54:05 PM	BCl3 MFC set to  0.000000
1/23/2012	5:54:05 PM	PH3 MFC set to  0.000000
1/23/2012	5:54:05 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:54:05 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:54:05 PM	Tube furnace set to 150
1/23/2012	5:54:35 PM	Helium valve closed
1/23/2012	5:54:35 PM	H2 valve closed
1/23/2012	5:54:35 PM	BCl3 valve closed
1/23/2012	5:54:35 PM	PH3 valve closed
1/23/2012	5:54:35 PM	SiCl4 pre valve closed
1/23/2012	5:54:35 PM	SiCl4 post valve closed
1/23/2012	5:54:35 PM	Bypass valve closed
1/23/2012	5:54:35 PM	Bubbler valve closed
1/23/2012	5:54:35 PM	Main Vac valve opened
1/23/2012	5:54:35 PM	Helium MFC set to  0.000000
1/23/2012	5:54:35 PM	H2 MFC set to  0.000000
1/23/2012	5:54:35 PM	BCl3 MFC set to  0.000000
1/23/2012	5:54:35 PM	PH3 MFC set to  0.000000
1/23/2012	5:54:35 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:54:35 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:54:35 PM	Tube furnace set to 150
1/23/2012	5:55:05 PM	H2 valve closed
1/23/2012	5:55:05 PM	BCl3 valve closed
1/23/2012	5:55:05 PM	PH3 valve closed
1/23/2012	5:55:05 PM	SiCl4 pre valve closed
1/23/2012	5:55:05 PM	SiCl4 post valve closed
1/23/2012	5:55:05 PM	Bypass valve closed
1/23/2012	5:55:05 PM	Bubbler valve closed
1/23/2012	5:55:05 PM	Helium valve opened
1/23/2012	5:55:05 PM	Main Vac valve opened
1/23/2012	5:55:05 PM	Helium MFC set to  20.000000
1/23/2012	5:55:05 PM	H2 MFC set to  0.000000
1/23/2012	5:55:05 PM	BCl3 MFC set to  0.000000
1/23/2012	5:55:05 PM	PH3 MFC set to  0.000000
1/23/2012	5:55:05 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:55:05 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:55:05 PM	Tube furnace set to 150
1/23/2012	5:55:35 PM	Helium valve closed
1/23/2012	5:55:35 PM	H2 valve closed
1/23/2012	5:55:35 PM	BCl3 valve closed
1/23/2012	5:55:35 PM	PH3 valve closed
1/23/2012	5:55:35 PM	SiCl4 pre valve closed
1/23/2012	5:55:35 PM	SiCl4 post valve closed
1/23/2012	5:55:35 PM	Bypass valve closed
1/23/2012	5:55:35 PM	Bubbler valve closed
1/23/2012	5:55:35 PM	Main Vac valve opened
1/23/2012	5:55:35 PM	Helium MFC set to  0.000000
1/23/2012	5:55:35 PM	H2 MFC set to  0.000000
1/23/2012	5:55:35 PM	BCl3 MFC set to  0.000000
1/23/2012	5:55:35 PM	PH3 MFC set to  0.000000
1/23/2012	5:55:35 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:55:35 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:55:35 PM	Tube furnace set to 150
1/23/2012	5:55:36 PM	Run finished at 5:55 PM
1/23/2012	5:56:45 PM	Main Vac valve closed
1/23/2012	5:57:10 PM	Main Vac valve opened
1/23/2012	5:57:10 PM	Main Vac valve closed
1/23/2012	5:57:12 PM	Main Vac valve opened
1/23/2012	5:59:29 PM	Recipe started at 5:59 PM
1/23/2012	5:59:29 PM	Helium valve closed
1/23/2012	5:59:29 PM	H2 valve closed
1/23/2012	5:59:29 PM	BCl3 valve closed
1/23/2012	5:59:29 PM	PH3 valve closed
1/23/2012	5:59:29 PM	SiCl4 pre valve closed
1/23/2012	5:59:29 PM	SiCl4 post valve closed
1/23/2012	5:59:29 PM	Main Vac valve closed
1/23/2012	5:59:29 PM	Bypass valve closed
1/23/2012	5:59:29 PM	Bubbler valve closed
1/23/2012	5:59:29 PM	Helium MFC set to  0.000000
1/23/2012	5:59:29 PM	H2 MFC set to  0.000000
1/23/2012	5:59:29 PM	BCl3 MFC set to  0.000000
1/23/2012	5:59:29 PM	PH3 MFC set to  0.000000
1/23/2012	5:59:29 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:59:29 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:59:30 PM	Tube furnace set to 0
1/23/2012	5:59:33 PM	Helium valve closed
1/23/2012	5:59:33 PM	BCl3 valve closed
1/23/2012	5:59:33 PM	PH3 valve closed
1/23/2012	5:59:33 PM	SiCl4 pre valve closed
1/23/2012	5:59:33 PM	SiCl4 post valve closed
1/23/2012	5:59:33 PM	Main Vac valve closed
1/23/2012	5:59:33 PM	Bypass valve closed
1/23/2012	5:59:33 PM	Bubbler valve closed
1/23/2012	5:59:33 PM	H2 valve opened
1/23/2012	5:59:33 PM	Helium MFC set to  0.000000
1/23/2012	5:59:33 PM	H2 MFC set to  500.000000
1/23/2012	5:59:33 PM	BCl3 MFC set to  0.000000
1/23/2012	5:59:33 PM	PH3 MFC set to  0.000000
1/23/2012	5:59:33 PM	SiCl4 MFC set to  0.000000
1/23/2012	5:59:33 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	5:59:33 PM	Tube furnace set to 0
1/23/2012	6:00:37 PM	Helium valve closed
1/23/2012	6:00:37 PM	BCl3 valve closed
1/23/2012	6:00:37 PM	PH3 valve closed
1/23/2012	6:00:37 PM	SiCl4 pre valve closed
1/23/2012	6:00:37 PM	SiCl4 post valve closed
1/23/2012	6:00:37 PM	Main Vac valve closed
1/23/2012	6:00:37 PM	Bypass valve closed
1/23/2012	6:00:37 PM	H2 valve opened
1/23/2012	6:00:37 PM	Bubbler valve opened
1/23/2012	6:00:37 PM	Helium MFC set to  0.000000
1/23/2012	6:00:38 PM	H2 MFC set to  500.000000
1/23/2012	6:00:38 PM	BCl3 MFC set to  0.000000
1/23/2012	6:00:38 PM	PH3 MFC set to  0.000000
1/23/2012	6:00:38 PM	SiCl4 MFC set to  0.000000
1/23/2012	6:00:38 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:00:38 PM	Tube furnace set to 0
1/23/2012	6:00:39 PM	Helium valve closed
1/23/2012	6:00:39 PM	BCl3 valve closed
1/23/2012	6:00:39 PM	PH3 valve closed
1/23/2012	6:00:39 PM	SiCl4 pre valve closed
1/23/2012	6:00:39 PM	SiCl4 post valve closed
1/23/2012	6:00:39 PM	Main Vac valve closed
1/23/2012	6:00:39 PM	Bypass valve closed
1/23/2012	6:00:39 PM	H2 valve opened
1/23/2012	6:00:39 PM	Bubbler valve opened
1/23/2012	6:00:39 PM	Helium MFC set to  0.000000
1/23/2012	6:00:39 PM	H2 MFC set to  500.000000
1/23/2012	6:00:39 PM	BCl3 MFC set to  0.000000
1/23/2012	6:00:39 PM	PH3 MFC set to  0.000000
1/23/2012	6:00:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	6:00:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:00:39 PM	Tube furnace set to 1000
1/23/2012	6:20:39 PM	Helium valve closed
1/23/2012	6:20:39 PM	BCl3 valve closed
1/23/2012	6:20:39 PM	Main Vac valve closed
1/23/2012	6:20:39 PM	Bypass valve closed
1/23/2012	6:20:39 PM	H2 valve opened
1/23/2012	6:20:39 PM	PH3 valve opened
1/23/2012	6:20:39 PM	SiCl4 pre valve opened
1/23/2012	6:20:39 PM	SiCl4 post valve opened
1/23/2012	6:20:39 PM	Bubbler valve opened
1/23/2012	6:20:39 PM	Helium MFC set to  0.000000
1/23/2012	6:20:39 PM	H2 MFC set to  500.000000
1/23/2012	6:20:39 PM	BCl3 MFC set to  0.000000
1/23/2012	6:20:39 PM	PH3 MFC set to  0.400000
1/23/2012	6:20:39 PM	SiCl4 MFC set to  25.000000
1/23/2012	6:20:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:20:39 PM	Tube furnace set to 1000
1/23/2012	6:40:39 PM	Helium valve closed
1/23/2012	6:40:39 PM	BCl3 valve closed
1/23/2012	6:40:39 PM	PH3 valve closed
1/23/2012	6:40:39 PM	SiCl4 pre valve closed
1/23/2012	6:40:39 PM	SiCl4 post valve closed
1/23/2012	6:40:39 PM	Main Vac valve closed
1/23/2012	6:40:39 PM	Bypass valve closed
1/23/2012	6:40:39 PM	H2 valve opened
1/23/2012	6:40:39 PM	Bubbler valve opened
1/23/2012	6:40:39 PM	Helium MFC set to  0.000000
1/23/2012	6:40:39 PM	H2 MFC set to  500.000000
1/23/2012	6:40:39 PM	BCl3 MFC set to  0.000000
1/23/2012	6:40:39 PM	PH3 MFC set to  0.000000
1/23/2012	6:40:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	6:40:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:40:39 PM	Tube furnace set to 750
1/23/2012	6:45:39 PM	H2 valve closed
1/23/2012	6:45:39 PM	BCl3 valve closed
1/23/2012	6:45:39 PM	PH3 valve closed
1/23/2012	6:45:39 PM	SiCl4 pre valve closed
1/23/2012	6:45:39 PM	SiCl4 post valve closed
1/23/2012	6:45:39 PM	Main Vac valve closed
1/23/2012	6:45:39 PM	Bypass valve closed
1/23/2012	6:45:39 PM	Helium valve opened
1/23/2012	6:45:39 PM	Bubbler valve opened
1/23/2012	6:45:39 PM	Helium MFC set to  500.000000
1/23/2012	6:45:39 PM	H2 MFC set to  0.000000
1/23/2012	6:45:39 PM	BCl3 MFC set to  0.000000
1/23/2012	6:45:39 PM	PH3 MFC set to  0.000000
1/23/2012	6:45:39 PM	SiCl4 MFC set to  0.000000
1/23/2012	6:45:39 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:45:39 PM	Tube furnace set to 0
1/23/2012	6:57:00 PM	Helium valve closed
1/23/2012	6:57:00 PM	H2 valve closed
1/23/2012	6:57:00 PM	BCl3 valve closed
1/23/2012	6:57:00 PM	PH3 valve closed
1/23/2012	6:57:00 PM	SiCl4 pre valve closed
1/23/2012	6:57:00 PM	SiCl4 post valve closed
1/23/2012	6:57:00 PM	Main Vac valve closed
1/23/2012	6:57:00 PM	Bypass valve closed
1/23/2012	6:57:00 PM	Bubbler valve closed
1/23/2012	6:57:00 PM	Helium MFC set to  0.000000
1/23/2012	6:57:00 PM	H2 MFC set to  0.000000
1/23/2012	6:57:00 PM	BCl3 MFC set to  0.000000
1/23/2012	6:57:00 PM	PH3 MFC set to  0.000000
1/23/2012	6:57:00 PM	SiCl4 MFC set to  0.000000
1/23/2012	6:57:00 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:57:01 PM	Tube furnace set to 0
1/23/2012	6:57:02 PM	Run finished at 6:57 PM
1/23/2012	6:59:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/23/2012	6:59:58 PM	Recipe started at 6:59 PM
1/23/2012	6:59:58 PM	Helium valve closed
1/23/2012	6:59:58 PM	H2 valve closed
1/23/2012	6:59:58 PM	BCl3 valve closed
1/23/2012	6:59:58 PM	PH3 valve closed
1/23/2012	6:59:58 PM	SiCl4 pre valve closed
1/23/2012	6:59:58 PM	SiCl4 post valve closed
1/23/2012	6:59:58 PM	Main Vac valve closed
1/23/2012	6:59:58 PM	Bubbler valve closed
1/23/2012	6:59:58 PM	Bypass valve opened
1/23/2012	6:59:58 PM	Helium MFC set to  0.000000
1/23/2012	6:59:58 PM	H2 MFC set to  0.000000
1/23/2012	6:59:58 PM	BCl3 MFC set to  0.000000
1/23/2012	6:59:58 PM	PH3 MFC set to  0.000000
1/23/2012	6:59:58 PM	SiCl4 MFC set to  0.000000
1/23/2012	6:59:58 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	6:59:58 PM	Tube furnace set to 0
1/23/2012	7:00:53 PM	Helium valve closed
1/23/2012	7:00:53 PM	H2 valve closed
1/23/2012	7:00:53 PM	BCl3 valve closed
1/23/2012	7:00:53 PM	PH3 valve closed
1/23/2012	7:00:53 PM	SiCl4 pre valve closed
1/23/2012	7:00:53 PM	SiCl4 post valve closed
1/23/2012	7:00:53 PM	Main Vac valve closed
1/23/2012	7:00:53 PM	Bubbler valve closed
1/23/2012	7:00:53 PM	Bypass valve opened
1/23/2012	7:00:53 PM	Helium MFC set to  0.000000
1/23/2012	7:00:53 PM	H2 MFC set to  0.000000
1/23/2012	7:00:53 PM	BCl3 MFC set to  0.000000
1/23/2012	7:00:53 PM	PH3 MFC set to  0.000000
1/23/2012	7:00:53 PM	SiCl4 MFC set to  0.000000
1/23/2012	7:00:53 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	7:00:53 PM	Tube furnace set to 0
1/23/2012	7:01:53 PM	Helium valve closed
1/23/2012	7:01:53 PM	H2 valve closed
1/23/2012	7:01:53 PM	BCl3 valve closed
1/23/2012	7:01:53 PM	PH3 valve closed
1/23/2012	7:01:53 PM	SiCl4 pre valve closed
1/23/2012	7:01:53 PM	SiCl4 post valve closed
1/23/2012	7:01:53 PM	Bypass valve closed
1/23/2012	7:01:53 PM	Bubbler valve closed
1/23/2012	7:01:53 PM	Main Vac valve opened
1/23/2012	7:01:53 PM	Helium MFC set to  0.000000
1/23/2012	7:01:53 PM	H2 MFC set to  0.000000
1/23/2012	7:01:53 PM	BCl3 MFC set to  0.000000
1/23/2012	7:01:53 PM	PH3 MFC set to  0.000000
1/23/2012	7:01:53 PM	SiCl4 MFC set to  0.000000
1/23/2012	7:01:53 PM	Bypass solenoid MFC set to  0.000000
1/23/2012	7:01:54 PM	Tube furnace set to 0
1/23/2012	7:01:55 PM	Run finished at 7:01 PM
1/23/2012	7:01:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
